Membership
Tour
Register
Log in
using mainly spraying means
Follow
Industry
CPC
H01L21/67051
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67051
using mainly spraying means
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,362,202
Issue date
Jul 15, 2025
Tokyo Electron Limited
Fumihiro Kamimura
B08 - CLEANING
Information
Patent Grant
Method of manufacturing semiconductor device using stationary laser...
Patent number
12,362,204
Issue date
Jul 15, 2025
Samsung Electronics Co., Ltd.
Ji Hoon Cha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
12,362,179
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,362,199
Issue date
Jul 15, 2025
SCREEN Holdings Co., Ltd.
Kei Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cup, liquid processing apparatus, and liquid processing method
Patent number
12,358,016
Issue date
Jul 15, 2025
Tokyo Electron Limited
Ryunosuke Higashi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing apparatus
Patent number
12,350,787
Issue date
Jul 8, 2025
Ebara Corporation
Kuniaki Yamaguchi
B08 - CLEANING
Information
Patent Grant
Process kits and related methods for processing chambers to facilit...
Patent number
12,354,855
Issue date
Jul 8, 2025
Applied Materials, Inc.
Zhepeng Cong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Adjustable height spray system for cleaner
Patent number
12,350,720
Issue date
Jul 8, 2025
Illinois Tool Works Inc.
Eric Wayne Becker
B08 - CLEANING
Information
Patent Grant
Liquid processing apparatus and liquid processing method
Patent number
12,347,698
Issue date
Jul 1, 2025
Tokyo Electron Limited
Koki Yoshimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Prewet module and prewet method
Patent number
12,347,697
Issue date
Jul 1, 2025
Ebara Corporation
Masaya Seki
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Treating vessel and liquid processing apparatus
Patent number
12,341,027
Issue date
Jun 24, 2025
Semes Co., Ltd.
Dae Sung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resin shaping device
Patent number
12,341,036
Issue date
Jun 24, 2025
BONDTECH CO., LTD.
Akira Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus
Patent number
12,341,052
Issue date
Jun 24, 2025
ZEUS CO., LTD.
Seung Dae Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical liquid preparation device, and substrate processing device
Patent number
12,337,289
Issue date
Jun 24, 2025
SCREEN Holdings Co., Ltd.
Hajime Nishide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing substrate
Patent number
12,341,028
Issue date
Jun 24, 2025
Semes Co., Ltd.
Sun Wook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for smoothly exhausting the atmosphere in a processing sp...
Patent number
12,331,399
Issue date
Jun 17, 2025
Semes Co., Ltd.
Ju Won Kim
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
12,334,370
Issue date
Jun 17, 2025
Semes Co., Ltd.
Sangmin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated semiconductor part cleaning system
Patent number
12,327,738
Issue date
Jun 10, 2025
Applied Materials, Inc.
Jenn C. Chow
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,322,609
Issue date
Jun 3, 2025
Ebara Corporation
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing liquid supply apparatus and method of removing solids fr...
Patent number
12,322,610
Issue date
Jun 3, 2025
Semes Co., Ltd.
Mu Hyeon Lee
B08 - CLEANING
Information
Patent Grant
Apparatus and methods for cleaning a package
Patent number
12,322,608
Issue date
Jun 3, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ying-Hao Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method and substrate processing method
Patent number
12,322,586
Issue date
Jun 3, 2025
SCREEN Holdings Co., Ltd.
Koji Nishiyama
B08 - CLEANING
Information
Patent Grant
Wafer processing apparatus and wafer processing method
Patent number
12,322,607
Issue date
Jun 3, 2025
ZEUS CO., LTD.
Seung Dae Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,311,415
Issue date
May 27, 2025
Semes Co., Ltd.
Do Hyung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus having bowl assembly
Patent number
12,308,256
Issue date
May 20, 2025
DEVICEENG CO., LTD
Taek Youb Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrasonically activated water ejector
Patent number
12,303,946
Issue date
May 20, 2025
Disco Corporation
Xiaoming Qiu
B08 - CLEANING
Information
Patent Grant
Wafer treatment apparatus and method for reducing scattering of tre...
Patent number
12,308,257
Issue date
May 20, 2025
Semes Co., Ltd.
Young Jin Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shaped-channel scanning nozzle for scanning of a material surface
Patent number
12,300,480
Issue date
May 13, 2025
Elemental Scientific, Inc.
Beau A. Marth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical liquid supply unit and substrate processing apparatus incl...
Patent number
12,300,514
Issue date
May 13, 2025
Semes Co., Ltd.
Seong Soo Lee
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Grant
Substrate processing apparatus and substrate processing method havi...
Patent number
12,300,518
Issue date
May 13, 2025
Tokyo Electron Limited
Kazuki Kosai
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...
Publication number
20250232987
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Boi IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250232988
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Kazuki KOSAI
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATMENT DEVICE
Publication number
20250226240
Publication date
Jul 10, 2025
SHIBAURA MECHATRONICS CORPORATION
Minami NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250222494
Publication date
Jul 10, 2025
SHIBAURA MECHATRONIS CORPORATION
Masaya KAMIYA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250218814
Publication date
Jul 3, 2025
SEMES CO., LTD.
Myung A JEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20250218854
Publication date
Jul 3, 2025
SEMES CO., LTD.
In Ki JUNG
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20250218857
Publication date
Jul 3, 2025
SEMES CO., LTD.
In Ki JUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250214124
Publication date
Jul 3, 2025
SEMES CO., LTD.
In Ki JUNG
B08 - CLEANING
Information
Patent Application
SCRUBBER APPARATUS
Publication number
20250218811
Publication date
Jul 3, 2025
Samsung Electronics Co., Ltd.
Keunsun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, PHOTOGRAPHING UNIT AND LIQUID PROCE...
Publication number
20250218812
Publication date
Jul 3, 2025
SEMES CO., LTD.
Oh Yeol KWON
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHEMICAL SUPPLY APPARATUS AND CHEMICAL SUPPLY METHOD
Publication number
20250218813
Publication date
Jul 3, 2025
SEMES CO., LTD.
Jin Ah HAN
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250205752
Publication date
Jun 26, 2025
SCREEN Holdings Co., Ltd.
Tsungju LIN
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20250210379
Publication date
Jun 26, 2025
SEMES CO., LTD.
Gu Won SEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING A SEMICONDUCTOR WAFER
Publication number
20250201547
Publication date
Jun 19, 2025
Siltronic AG
Damian BROCK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20250201593
Publication date
Jun 19, 2025
SCREEN Holdings Co., Ltd.
Masaki INABA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250201635
Publication date
Jun 19, 2025
EBARA CORPORATION
Issei SUGANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...
Publication number
20250201590
Publication date
Jun 19, 2025
Samsung Electronics Co., Ltd.
Dae-Woong CHOI
B08 - CLEANING
Information
Patent Application
MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND CONTROL METH...
Publication number
20250201591
Publication date
Jun 19, 2025
SEMES CO., LTD.
Do Hyeon YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF SERVICING ASSEMBLY
Publication number
20250187050
Publication date
Jun 12, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Hsueh WU
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250191943
Publication date
Jun 12, 2025
SCREEN Holdings Co., Ltd.
Shinji SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
Publication number
20250187043
Publication date
Jun 12, 2025
Samsung Electronics Co., Ltd.
AHRA JEON
B08 - CLEANING
Information
Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
Publication number
20250189412
Publication date
Jun 12, 2025
ELEMENTAL SCIENTIFIC, INC.
Beau A. Marth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING APPARATUS
Publication number
20250187051
Publication date
Jun 12, 2025
Samsung Electronics Co., Ltd.
Seonguk JEONG
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
Publication number
20250191904
Publication date
Jun 12, 2025
SEMES CO., LTD.
So Young PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHIP ATTACHING DEVICE, CHIP PROCESSING SYSTEM, AND CHIP PROCESSING...
Publication number
20250183222
Publication date
Jun 5, 2025
TOKYO ELECTRON LIMITED
Yasutaka Mizomoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CUP, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
Publication number
20250183092
Publication date
Jun 5, 2025
TOKYO ELECTRON LIMITED
Kouichirou TANAKA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
ADJUSTABLE NOZZLE DEVICE
Publication number
20250170597
Publication date
May 29, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Nathan Ang Wee Kiat
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
A METHOD OF CLEANING A SEMICONDUCTOR SUBSTRATE FOR A SOLAR CELL, AN...
Publication number
20250174453
Publication date
May 29, 2025
REC SOLAR PTE. LTD.
Chui Yu CHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus And Method For Wafer Cleaning
Publication number
20250161998
Publication date
May 22, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo Chen CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
Publication number
20250167012
Publication date
May 22, 2025
Samsung Electronics Co., Ltd.
Jihoon JEONG
B08 - CLEANING