using mainly spraying means

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CPC
H01L21/67051

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67051using mainly spraying means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,362,202
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Fumihiro Kamimura
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device using stationary laser...
- Patent number 12,362,204
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Ji Hoon Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 12,362,179
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Hung Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,362,199
- Issue date Jul 15, 2025
- SCREEN Holdings Co., Ltd.
- Kei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cup, liquid processing apparatus, and liquid processing method
- Patent number 12,358,016
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Ryunosuke Higashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,350,787
- Issue date Jul 8, 2025
- Ebara Corporation
- Kuniaki Yamaguchi
- B08 - CLEANING
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,354,855
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable height spray system for cleaner
- Patent number 12,350,720
- Issue date Jul 8, 2025
- Illinois Tool Works Inc.
- Eric Wayne Becker
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,347,698
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Koki Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prewet module and prewet method
- Patent number 12,347,697
- Issue date Jul 1, 2025
- Ebara Corporation
- Masaya Seki
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Treating vessel and liquid processing apparatus
- Patent number 12,341,027
- Issue date Jun 24, 2025
- Semes Co., Ltd.
- Dae Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resin shaping device
- Patent number 12,341,036
- Issue date Jun 24, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus
- Patent number 12,341,052
- Issue date Jun 24, 2025
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid preparation device, and substrate processing device
- Patent number 12,337,289
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrate
- Patent number 12,341,028
- Issue date Jun 24, 2025
- Semes Co., Ltd.
- Sun Wook Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for smoothly exhausting the atmosphere in a processing sp...
- Patent number 12,331,399
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Ju Won Kim
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,334,370
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Sangmin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated semiconductor part cleaning system
- Patent number 12,327,738
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Jenn C. Chow
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,322,609
- Issue date Jun 3, 2025
- Ebara Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supply apparatus and method of removing solids fr...
- Patent number 12,322,610
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Mu Hyeon Lee
- B08 - CLEANING
Information Patent Grant
Apparatus and methods for cleaning a package
- Patent number 12,322,608
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and substrate processing method
- Patent number 12,322,586
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Koji Nishiyama
- B08 - CLEANING
Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 12,322,607
- Issue date Jun 3, 2025
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,311,415
- Issue date May 27, 2025
- Semes Co., Ltd.
- Do Hyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus having bowl assembly
- Patent number 12,308,256
- Issue date May 20, 2025
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonically activated water ejector
- Patent number 12,303,946
- Issue date May 20, 2025
- Disco Corporation
- Xiaoming Qiu
- B08 - CLEANING
Information Patent Grant
Wafer treatment apparatus and method for reducing scattering of tre...
- Patent number 12,308,257
- Issue date May 20, 2025
- Semes Co., Ltd.
- Young Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped-channel scanning nozzle for scanning of a material surface
- Patent number 12,300,480
- Issue date May 13, 2025
- Elemental Scientific, Inc.
- Beau A. Marth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid supply unit and substrate processing apparatus incl...
- Patent number 12,300,514
- Issue date May 13, 2025
- Semes Co., Ltd.
- Seong Soo Lee
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Substrate processing apparatus and substrate processing method havi...
- Patent number 12,300,518
- Issue date May 13, 2025
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...
- Publication number 20250232987
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Boi IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250232988
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT DEVICE
- Publication number 20250226240
- Publication date Jul 10, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Minami NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250222494
- Publication date Jul 10, 2025
- SHIBAURA MECHATRONIS CORPORATION
- Masaya KAMIYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250218814
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Myung A JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218854
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ki JUNG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218857
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ki JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250214124
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ki JUNG
- B08 - CLEANING
Information Patent Application
SCRUBBER APPARATUS
- Publication number 20250218811
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Keunsun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PHOTOGRAPHING UNIT AND LIQUID PROCE...
- Publication number 20250218812
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Oh Yeol KWON
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHEMICAL SUPPLY APPARATUS AND CHEMICAL SUPPLY METHOD
- Publication number 20250218813
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jin Ah HAN
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250205752
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Tsungju LIN
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20250210379
- Publication date Jun 26, 2025
- SEMES CO., LTD.
- Gu Won SEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A SEMICONDUCTOR WAFER
- Publication number 20250201547
- Publication date Jun 19, 2025
- Siltronic AG
- Damian BROCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20250201593
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250201635
- Publication date Jun 19, 2025
- EBARA CORPORATION
- Issei SUGANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...
- Publication number 20250201590
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Dae-Woong CHOI
- B08 - CLEANING
Information Patent Application
MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND CONTROL METH...
- Publication number 20250201591
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Do Hyeon YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF SERVICING ASSEMBLY
- Publication number 20250187050
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Meng-Hsueh WU
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250191943
- Publication date Jun 12, 2025
- SCREEN Holdings Co., Ltd.
- Shinji SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20250187043
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- AHRA JEON
- B08 - CLEANING
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20250189412
- Publication date Jun 12, 2025
- ELEMENTAL SCIENTIFIC, INC.
- Beau A. Marth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS
- Publication number 20250187051
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Seonguk JEONG
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
- Publication number 20250191904
- Publication date Jun 12, 2025
- SEMES CO., LTD.
- So Young PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP ATTACHING DEVICE, CHIP PROCESSING SYSTEM, AND CHIP PROCESSING...
- Publication number 20250183222
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Yasutaka Mizomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CUP, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
- Publication number 20250183092
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Kouichirou TANAKA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ADJUSTABLE NOZZLE DEVICE
- Publication number 20250170597
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Nathan Ang Wee Kiat
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
A METHOD OF CLEANING A SEMICONDUCTOR SUBSTRATE FOR A SOLAR CELL, AN...
- Publication number 20250174453
- Publication date May 29, 2025
- REC SOLAR PTE. LTD.
- Chui Yu CHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus And Method For Wafer Cleaning
- Publication number 20250161998
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Bo Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20250167012
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Jihoon JEONG
- B08 - CLEANING

using mainly spraying means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device using stationary laser...

Method and apparatus for coating photo resist over a substrate

Substrate processing method and substrate processing apparatus

Cup, liquid processing apparatus, and liquid processing method

Substrate processing apparatus

Process kits and related methods for processing chambers to facilit...

Adjustable height spray system for cleaner

Liquid processing apparatus and liquid processing method

Prewet module and prewet method

Treating vessel and liquid processing apparatus

Resin shaping device

Wafer cleaning apparatus

Chemical liquid preparation device, and substrate processing device

Apparatus for processing substrate

Apparatus for smoothly exhausting the atmosphere in a processing sp...

Apparatus and method for treating substrate

Integrated semiconductor part cleaning system

Substrate processing apparatus and substrate processing method

Processing liquid supply apparatus and method of removing solids fr...

Apparatus and methods for cleaning a package

Substrate cleaning method and substrate processing method

Wafer processing apparatus and wafer processing method

Substrate processing apparatus and substrate processing method

Substrate treatment apparatus having bowl assembly

Ultrasonically activated water ejector

Wafer treatment apparatus and method for reducing scattering of tre...

Shaped-channel scanning nozzle for scanning of a material surface

Chemical liquid supply unit and substrate processing apparatus incl...

Substrate processing apparatus and substrate processing method havi...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT DEVICE

VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SCRUBBER APPARATUS

SUBSTRATE PROCESSING APPARATUS, PHOTOGRAPHING UNIT AND LIQUID PROCE...

CHEMICAL SUPPLY APPARATUS AND CHEMICAL SUPPLY METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

METHOD FOR CLEANING A SEMICONDUCTOR WAFER

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...

MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND CONTROL METH...

PARTICLE REMOVING ASSEMBLY AND METHOD OF SERVICING ASSEMBLY

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

CLEANING APPARATUS

APPARATUS AND METHOD OF TREATING SUBSTRATE

CHIP ATTACHING DEVICE, CHIP PROCESSING SYSTEM, AND CHIP PROCESSING...

CUP, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

ADJUSTABLE NOZZLE DEVICE

A METHOD OF CLEANING A SEMICONDUCTOR SUBSTRATE FOR A SOLAR CELL, AN...

Apparatus And Method For Wafer Cleaning

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...