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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67051
using mainly spraying means
Industries
Overview
Organizations
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Wafer cleaning device and wafer cleaning system
Patent number
11,969,767
Issue date
Apr 30, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Feng Zhang
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for cleaning semiconductor wafers
Patent number
11,967,497
Issue date
Apr 23, 2024
ACM Research (Shanghai) Inc.
Jun Wang
B08 - CLEANING
Information
Patent Grant
Substrate holding apparatus and substrate processing apparatus
Patent number
11,961,757
Issue date
Apr 16, 2024
SCREEN Holdings Co., Ltd.
Ryo Muramoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,958,090
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo Chen Chen
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,961,744
Issue date
Apr 16, 2024
SCREEN Holdings Co., Ltd.
Eiji Fukatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
11,955,352
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hiroki Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature adjustment device and method for manufacturing temperat...
Patent number
11,955,353
Issue date
Apr 9, 2024
Kelk Ltd.
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning apparatus and polishing apparatus
Patent number
11,948,811
Issue date
Apr 2, 2024
Ebara Corporation
Mitsuru Miyazaki
B08 - CLEANING
Information
Patent Grant
Cooling device, substrate treatment device, cooling method, and sub...
Patent number
11,948,812
Issue date
Apr 2, 2024
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
Information
Patent Grant
Apparatus for processing substrate and operating method thereof
Patent number
11,938,493
Issue date
Mar 26, 2024
Semes Co., Ltd.
Noh Hoon Myoung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,935,736
Issue date
Mar 19, 2024
Tokyo Electron Limited
Rintaro Higuchi
B08 - CLEANING
Information
Patent Grant
Substrate processing device
Patent number
11,935,763
Issue date
Mar 19, 2024
SCREEN Holdings Co., Ltd.
Michinori Iwao
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate treating method
Patent number
11,927,886
Issue date
Mar 12, 2024
Semes Co., Ltd.
Doo Young Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for cleaning substrates using high temperature...
Patent number
11,925,881
Issue date
Mar 12, 2024
ACM Research (Shanghai) Inc.
Fuping Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Apparatus for treating substrate
Patent number
11,923,219
Issue date
Mar 5, 2024
Semes Co., Ltd.
Youngseop Choi
B08 - CLEANING
Information
Patent Grant
Substrate heating unit, substrate processing apparatus, and substra...
Patent number
11,923,213
Issue date
Mar 5, 2024
Semes Co., Ltd.
Tae Shin Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,921,428
Issue date
Mar 5, 2024
Kioxia Corporation
Yoshihiro Uozumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,923,209
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Hyunwoong Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,919,049
Issue date
Mar 5, 2024
SCREEN Holdings Co., Ltd.
Linh da Ho
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,915,944
Issue date
Feb 27, 2024
Tokyo Electron Limited
Suguen Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing method
Patent number
11,915,965
Issue date
Feb 27, 2024
ZEUS CO., LTD.
Seung Dae Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,915,945
Issue date
Feb 27, 2024
SCREEN Holdings Co., Ltd.
Hajime Nishide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for cleaning substrates
Patent number
11,911,807
Issue date
Feb 27, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for cleaning semiconductor wafers
Patent number
11,911,808
Issue date
Feb 27, 2024
ACM Research (Shanghai) Inc.
Hui Wang
B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,908,680
Issue date
Feb 20, 2024
Tokyo Electron Limited
Akira Fujita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for processing substrate
Patent number
11,897,007
Issue date
Feb 13, 2024
Semes Co., Ltd.
Yun Hwa Hong
B08 - CLEANING
Information
Patent Grant
Substrate treatment method and substrate treatment equipment
Patent number
11,901,174
Issue date
Feb 13, 2024
Organo Corporation
Daisaku Yano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for supplying liquid
Patent number
11,887,870
Issue date
Jan 30, 2024
Semes Co., Ltd.
Do Gyeong Ha
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
PROCESS FLUID TREATMENT APPARATUS, AND WAFER CLEANING APPARATUS AND...
Publication number
20240145265
Publication date
May 2, 2024
SEMES CO., LTD.
Young Seop CHOI
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR PROCESS SYSTEM AND METHOD OF CLEANING THE SAME
Publication number
20240141481
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
IREH SEO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR A SURFACE TREATMENT OF A SUBSTRATE WITH A LIQUID
Publication number
20240145231
Publication date
May 2, 2024
Semsysco GmbH
Georg Hofer
B08 - CLEANING
Information
Patent Application
SINGLE WAFER SPIN CLEANING APPARATUS WITH SOAKING, CLEANING, AND ET...
Publication number
20240145292
Publication date
May 2, 2024
GRAND PROCESS TECHNOLOGY CORP.
Li-tso HUANG
B08 - CLEANING
Information
Patent Application
WAFER STORAGE CONTAINER CLEANING APPARATUS, AND WAFER STORAGE CONTA...
Publication number
20240128095
Publication date
Apr 18, 2024
SUMCO CORPORATION
Fumitoshi IWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL TEST APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240118216
Publication date
Apr 11, 2024
SEMES CO., LTD.
Sangwoo PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240116085
Publication date
Apr 11, 2024
SEMES CO., LTD.
Seungeun Na
B08 - CLEANING
Information
Patent Application
POLISHING APPARATUS
Publication number
20240091899
Publication date
Mar 21, 2024
EBARA CORPORATION
Kenichi KOBAYASHI
B24 - GRINDING POLISHING
Information
Patent Application
ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...
Publication number
20240096658
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20240096653
Publication date
Mar 21, 2024
SHIBAURA MECHATRONICS CORPORATION
Kensuke DEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
Publication number
20240096657
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20240096652
Publication date
Mar 21, 2024
KIOXIA Corporation
Mana TANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING NOZZLE UNIT AND SUBSTRATE...
Publication number
20240091819
Publication date
Mar 21, 2024
SEMES CO., LTD.
Ju Hwan LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
Publication number
20240096659
Publication date
Mar 21, 2024
KIOXIA Corporation
Fuyuma ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240096651
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Shuichi YASUDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240096654
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Fumihiro KAMIMURA
B08 - CLEANING
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
Publication number
20240087916
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Hirokazu UEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR WAFER CLEANING APPARATUS
Publication number
20240087878
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Lun CHEN
B08 - CLEANING
Information
Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR TAPE-FRAME SUBSTRATE CLEANING A...
Publication number
20240071745
Publication date
Feb 29, 2024
Ying WANG
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS
Publication number
20240071744
Publication date
Feb 29, 2024
SHIBAURA MECHATRONICS CORPORATION
Yotaro FUKUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD OF SUBSTRATE EDGE CLEANING AND SUBSTRATE CARRI...
Publication number
20240047238
Publication date
Feb 8, 2024
Applied Materials, Inc.
Wei LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Publication number
20240047244
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Koki YOSHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
Publication number
20240047245
Publication date
Feb 8, 2024
SCREEN Holdings Co., Ltd.
Kana TAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREWET MODULE AND PREWET METHOD
Publication number
20240047235
Publication date
Feb 8, 2024
EBARA CORPORATION
Masaya SEKI
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
UNIT FOR SUPPLYING CHEMICAL AND APPARATUS FOR TREATING SUBSTRATE WI...
Publication number
20240047236
Publication date
Feb 8, 2024
SEMES CO., LTD.
Soo Han SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Publication number
20240047237
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Koki YOSHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CENTERING DEVICE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240038565
Publication date
Feb 1, 2024
SCREEN Holdings Co., Ltd.
Itsuki KAJINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
Publication number
20240033786
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Yuki ITO
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240030047
Publication date
Jan 25, 2024
SCREEN Holdings Co., Ltd.
Tadashi MAEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240021445
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Hiroki SAKURAI
H01 - BASIC ELECTRIC ELEMENTS