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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/6708
using mainly spraying means
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,972,958
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wet bench structure
Patent number
11,961,745
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Yu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding apparatus and substrate processing apparatus
Patent number
11,961,757
Issue date
Apr 16, 2024
SCREEN Holdings Co., Ltd.
Ryo Muramoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support unit and substrate treating apparatus including the same
Patent number
11,961,748
Issue date
Apr 16, 2024
Semes Co., Ltd.
Kangseop Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for manufacturing printed circuit boards
Patent number
11,963,306
Issue date
Apr 16, 2024
Gebr. Schmid GmbH
Christian Schmid
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,955,365
Issue date
Apr 9, 2024
Tokyo Electron Limited
Yoshinori Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,955,352
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hiroki Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,948,804
Issue date
Apr 2, 2024
Tokyo Electron Limited
Takumi Honda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Module for chemically processing a substrate
Patent number
11,938,522
Issue date
Mar 26, 2024
SEMSYSCO GMBH
Andreas Gleissner
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,935,739
Issue date
Mar 19, 2024
Tokyo Electron Limited
Akira Fujita
B08 - CLEANING
Information
Patent Grant
Substrate processing device
Patent number
11,935,763
Issue date
Mar 19, 2024
SCREEN Holdings Co., Ltd.
Michinori Iwao
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,915,944
Issue date
Feb 27, 2024
Tokyo Electron Limited
Suguen Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for manufacturing printed circuit boards
Patent number
11,917,767
Issue date
Feb 27, 2024
Gebr. Schmid GmbH
Christian Schmid
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,915,947
Issue date
Feb 27, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,908,752
Issue date
Feb 20, 2024
SCREEN Holdings Co., Ltd.
Hideji Naohara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate processing liquid for etching a metal layer, substrate pr...
Patent number
11,908,938
Issue date
Feb 20, 2024
SCREEN Holdings Co., Ltd.
Dai Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treatment method and substrate treatment equipment
Patent number
11,901,174
Issue date
Feb 13, 2024
Organo Corporation
Daisaku Yano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,887,871
Issue date
Jan 30, 2024
Tokyo Electron Limited
Kazushige Sano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,881,419
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Toru Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,881,403
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Ayumi Higuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,881,417
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Shuichi Yasuda
B08 - CLEANING
Information
Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
Patent number
11,880,213
Issue date
Jan 23, 2024
Tokyo Electron Limited
Mikio Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus
Patent number
11,869,780
Issue date
Jan 9, 2024
Tokyo Electron Limited
Takahiro Kawazu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,869,781
Issue date
Jan 9, 2024
Tokyo Electron Limited
Hiroshi Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving etching rate of wet etching
Patent number
11,869,774
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Nannan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
11,862,486
Issue date
Jan 2, 2024
Tokyo Electron Limited
Kazuki Kosai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control device and substrate processing method
Patent number
11,842,904
Issue date
Dec 12, 2023
Tokyo Electron Limited
Hiroshi Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing substrate
Patent number
11,817,330
Issue date
Nov 14, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Po-Yuan Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wetting processing apparatus and operation method thereof
Patent number
11,810,797
Issue date
Nov 7, 2023
PYXIS CF PTE. LTD.
Amlan Sen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,806,835
Issue date
Nov 7, 2023
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
Publication number
20240105470
Publication date
Mar 28, 2024
Samsung Electronics Co., Ltd.
Dong Il PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORTING APPARATUS
Publication number
20240105496
Publication date
Mar 28, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...
Publication number
20240096658
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
Publication number
20240096657
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
Publication number
20240096659
Publication date
Mar 21, 2024
KIOXIA Corporation
Fuyuma ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER HEATING APPARATUS AND WAFER PROCESSING APPARATUS USING THE SAME
Publication number
20240096663
Publication date
Mar 21, 2024
SEMES CO., LTD.
Soo Han SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240096651
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Shuichi YASUDA
B08 - CLEANING
Information
Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
Publication number
20240096656
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SE...
Publication number
20240087918
Publication date
Mar 14, 2024
KIOXIA Corporation
Tomohiko SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240071794
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240071793
Publication date
Feb 29, 2024
SCREEN Holdings Co., Ltd.
Shuhei NEMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
Publication number
20240047245
Publication date
Feb 8, 2024
SCREEN Holdings Co., Ltd.
Kana TAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING
Publication number
20240021431
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wan Hsuan Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BATCH SUBSTRATE TREATMENT APPARATUS
Publication number
20240014050
Publication date
Jan 11, 2024
SCREEN Holdings Co., Ltd.
Mitsutoshi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
Publication number
20240006201
Publication date
Jan 4, 2024
ELEMENTAL SCIENTIFIC, INC.
Tyler Yost
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN DIE RELEASE FOR SEMICONDUCTOR DEVICE ASSEMBLY
Publication number
20230420300
Publication date
Dec 28, 2023
Micron Technology, Inc.
Andrew M. Bayless
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EQUIPMENT AND PROCESS TECHNOLOGIES FOR CATALYST INFLUENCED CHEMICAL...
Publication number
20230411178
Publication date
Dec 21, 2023
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PLASMA ETCHING
Publication number
20230411164
Publication date
Dec 21, 2023
NANYA TECHNOLOGY CORPORATION
Shih Pin KUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
Publication number
20230395406
Publication date
Dec 7, 2023
ELEMENTAL SCIENTIFIC, INC.
Tyler Yost
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230386855
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Koji Kagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING THIN FILM AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230377911
Publication date
Nov 23, 2023
SEMES CO., LTD.
Won-Geun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING ETCH LAYER
Publication number
20230377912
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING SYS...
Publication number
20230377894
Publication date
Nov 23, 2023
SEMES CO., LTD.
Minyoung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
Publication number
20230369056
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING FACILITY AND SUBSTRATE TREATING METHOD
Publication number
20230360933
Publication date
Nov 9, 2023
SEMES CO., LTD.
Tae Shin KIM
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
WET PROCESSING OF MICROELECTRONIC SUBSTRATES WITH CONTROLLED MIXING...
Publication number
20230352321
Publication date
Nov 2, 2023
TEL Manufacturing and Engineering of America, Inc.
Thomas J. Wagener
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE MANUFACTURING METHOD AND STRUCTURE MANUFACTURING APPARATUS
Publication number
20230343597
Publication date
Oct 26, 2023
Sumitomo Chemical Company, Limited
Fumimasa HORIKIRI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE TREATMENT METHOD
Publication number
20230343610
Publication date
Oct 26, 2023
SEMES CO., LTD.
Jung Suk GOH
B08 - CLEANING
Information
Patent Application
LIQUID-CARRYING ROLLER FOR WET ETCHING AND WET ETCHING METHOD
Publication number
20230343888
Publication date
Oct 26, 2023
JA Solar Technology Yangzhou Co., Ltd.
Lin LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230323205
Publication date
Oct 12, 2023
SCREEN Holdings Co., Ltd.
Sei NEGORO
H01 - BASIC ELECTRIC ELEMENTS