using mask

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CPC
H01J2237/31711

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31711using mask

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Fabricating non-uniform diffraction gratings
- Patent number 11,609,365
- Issue date Mar 21, 2023
- Magic Leap, Inc.
- Mauro Melli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for implanting ions in wafers
- Patent number 11,056,309
- Issue date Jul 6, 2021
- MI2-FACTORY GMBH
- Florian Krippendorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-piece substrate holder and alignment mechanism
- Patent number 10,854,772
- Issue date Dec 1, 2020
- Intevac, Inc.
- Hoang Huy Vu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isotope tagging for workpiece authentication
- Patent number 10,269,464
- Issue date Apr 23, 2019
- Board of Trustees of Michigan State University
- Wolfgang Bauer
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,008,390
- Issue date Jun 26, 2018
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for controlling ion implanter
- Patent number 9,870,896
- Issue date Jan 16, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Po-Feng Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,863,032
- Issue date Jan 9, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Complementary traveling masks
- Patent number 9,722,129
- Issue date Aug 1, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P T Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modification of magnetic properties of films using ion and neutral...
- Patent number 9,508,375
- Issue date Nov 29, 2016
- Applied Materials, Inc.
- Majeed A. Foad
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High-throughput ion implanter
- Patent number 9,437,392
- Issue date Sep 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- William T. Weaver
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Multi-part mask for implanting workpieces
- Patent number 9,333,733
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Aaron P. Webb
- B32 - LAYERED PRODUCTS
Information Patent Grant
Ion implantation at high temperature surface equilibrium conditions
- Patent number 9,218,991
- Issue date Dec 22, 2015
- Infineon Technologies Americas Corp.
- Michael A. Briere
- C30 - CRYSTAL GROWTH
Information Patent Grant
Ion implantation based emitter profile engineering via process modi...
- Patent number 9,196,489
- Issue date Nov 24, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of creating two dimensional doping patterns in solar cells
- Patent number 9,190,548
- Issue date Nov 17, 2015
- Varian Semiconductor Equipment Associates, Inc.
- John Graff
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Ion implantation method, carrier, and ion implantation device
- Patent number 9,117,960
- Issue date Aug 25, 2015
- Sumitomo Heavy Industries, Ltd.
- Tomohiro Soga
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,076,914
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Implant method and implanter by using a variable aperture
- Patent number 9,057,129
- Issue date Jun 16, 2015
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for processing a substrate using a mask
- Patent number 9,006,688
- Issue date Apr 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a substrate
- Patent number 9,000,446
- Issue date Apr 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin B. Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and method for maskless patterned implantation
- Patent number 8,907,307
- Issue date Dec 9, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Christopher J. Leavitt
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Techniques for processing a substrate
- Patent number 8,900,982
- Issue date Dec 2, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kevin M. Daniels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for aligning substrates for multiple implants
- Patent number 8,895,325
- Issue date Nov 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- John W. Graff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for multiple slot ion implantation
- Patent number 8,716,682
- Issue date May 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,710,469
- Issue date Apr 29, 2014
- Nissin Ion Equipment Co., Ltd.
- Hirofumi Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of ion beam tails to manufacture a workpiece
- Patent number 8,697,559
- Issue date Apr 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Technique for processing a substrate
- Patent number 8,685,846
- Issue date Apr 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Implant method and implanter by using a variable aperture
- Patent number 8,669,539
- Issue date Mar 11, 2014
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,552,404
- Issue date Oct 8, 2013
- Nissin Ion Equipment Co., Ltd.
- Hirofumi Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Masked ion implant with fast-slow scan
- Patent number 8,461,553
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Mask health monitor using a faraday probe
- Patent number 8,455,847
- Issue date Jun 4, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin B. Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Transmission Electron Microscope and Imaging Method
- Publication number 20220359153
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Hiroki KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20180277388
- Publication date Sep 27, 2018
- Toshiba Memory Corporation
- Yukiteru MATSUI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ION IMPLANTER, ION IMPLANTATION METHOD, AND BEAM MEASUREMENT APPARATUS
- Publication number 20160042915
- Publication date Feb 11, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Makoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20160027660
- Publication date Jan 28, 2016
- Kabushiki Kaisha Toshiba
- YUKITERU MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Complementary Traveling Masks
- Publication number 20150228842
- Publication date Aug 13, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas PT Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING ION IMPLANTER
- Publication number 20150162166
- Publication date Jun 11, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Feng TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Part Mask For Implanting Workpieces
- Publication number 20150028232
- Publication date Jan 29, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Aaron P. Webb
- B32 - LAYERED PRODUCTS
Information Patent Application
PROXIMITY MASK FOR ION IMPLANTATION
- Publication number 20140374626
- Publication date Dec 25, 2014
- Benjamin B. Riordon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF ION BEAM TAILS TO MANUFACTURE A WORKPIECE
- Publication number 20140224310
- Publication date Aug 14, 2014
- Nicholas P.T. Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION BASED EMITTER PROFILE ENGINEERING VIA PROCESS MODI...
- Publication number 20140213014
- Publication date Jul 31, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC MASKS FOR AN ION IMPLANT APPARATUS
- Publication number 20140165906
- Publication date Jun 19, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Christopher N. Grant
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MONITOR FOR DEVICES IN AN ION IMPLANT APPARATUS
- Publication number 20140169402
- Publication date Jun 19, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Aaron P. Webb
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLANT METHOD AND IMPLANTER BY USING A VARIABLE APERTURE
- Publication number 20140161987
- Publication date Jun 12, 2014
- ADVANCED ION BEAM TECHNOLOGY., INC.
- ZHIMIN WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Implantation at High Temperature Surface Equilibrium Conditions
- Publication number 20140147998
- Publication date May 29, 2014
- INTERNATIONAL RECTIFIER CORPORATION
- Michael A. Briere
- C30 - CRYSTAL GROWTH
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20140004688
- Publication date Jan 2, 2014
- NISSIN ION EQUIPMENT CO., LTD.
- Hirofumi ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Aligning Substrates for Multiple Implants
- Publication number 20130288400
- Publication date Oct 31, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John W. Graff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD, CARRIER, AND ION IMPLANTATION DEVICE
- Publication number 20130210183
- Publication date Aug 15, 2013
- Sumitomo Heavy Industries, Ltd.
- Tomohiro Soga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL, SOLAR CELL MANUFACTURING DEVICE, AND METHOD FOR MANUFAC...
- Publication number 20130186457
- Publication date Jul 25, 2013
- LG ELECTRONICS INC.
- Gyeayoung KWAG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-THROUGHPUT ION IMPLANTER
- Publication number 20130108799
- Publication date May 2, 2013
- Varian Semiconductor Equipment Associates, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CREATING TWO DIMENSIONAL DOPING PATTERNS IN SOLAR CELLS
- Publication number 20130087189
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Graff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF ION BEAM TAILS TO MANUFACTURE A WORKPIECE
- Publication number 20130008494
- Publication date Jan 10, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P.T. Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MULTIPLE SLOT ION IMPLANTATION
- Publication number 20120248328
- Publication date Oct 4, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION
- Publication number 20120244692
- Publication date Sep 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
APPARATUS AND METHOD FOR MASKLESS PATTERNED IMPLANTION
- Publication number 20120228515
- Publication date Sep 13, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Christopher J. Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20120196428
- Publication date Aug 2, 2012
- NISSIN ION EQUIPMENT CO., LTD.
- Hirofumi ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING MULTIPLE MASKS TO FORM INDEPENDENT FEATURES ON A WORKPIECE
- Publication number 20120190183
- Publication date Jul 26, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Justin M. Ricci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK HEALTH MONITOR USING A FARADAY PROBE
- Publication number 20120181443
- Publication date Jul 19, 2012
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.,
- Benjamin B. RIORDON
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Integrated Shadow Mask/Carrier for Pattern Ion Implantation
- Publication number 20120083102
- Publication date Apr 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
MECHANISM AND METHOD FOR ENSURING ALIGNMENT OF A WORKPIECE TO A MASK
- Publication number 20120060353
- Publication date Mar 15, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK
- Publication number 20120043712
- Publication date Feb 23, 2012
- Varian Semiconductor Equipment Associates, Inc.
- William Weaver
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Fabricating non-uniform diffraction gratings

Method and device for implanting ions in wafers

Multi-piece substrate holder and alignment mechanism

Isotope tagging for workpiece authentication

Manufacturing method of semiconductor device and semiconductor manu...

System and method for controlling ion implanter

Techniques for processing a substrate

Complementary traveling masks

Modification of magnetic properties of films using ion and neutral...

High-throughput ion implanter

Multi-part mask for implanting workpieces

Ion implantation at high temperature surface equilibrium conditions

Ion implantation based emitter profile engineering via process modi...

Method of creating two dimensional doping patterns in solar cells

Ion implantation method, carrier, and ion implantation device

Techniques for processing a substrate

Implant method and implanter by using a variable aperture

Techniques for processing a substrate using a mask

Techniques for processing a substrate

Apparatus and method for maskless patterned implantation

Techniques for processing a substrate

System and method for aligning substrates for multiple implants

Apparatus and method for multiple slot ion implantation

Ion implantation method and ion implantation apparatus

Use of ion beam tails to manufacture a workpiece

Technique for processing a substrate

Implant method and implanter by using a variable aperture

Ion implantation method and ion implantation apparatus

Masked ion implant with fast-slow scan

Mask health monitor using a faraday probe

Patents Applicationslast 30 patents

Transmission Electron Microscope and Imaging Method

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

ION IMPLANTER, ION IMPLANTATION METHOD, AND BEAM MEASUREMENT APPARATUS

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

Complementary Traveling Masks

SYSTEM AND METHOD FOR CONTROLLING ION IMPLANTER

Multi-Part Mask For Implanting Workpieces

PROXIMITY MASK FOR ION IMPLANTATION

USE OF ION BEAM TAILS TO MANUFACTURE A WORKPIECE

ION IMPLANTATION BASED EMITTER PROFILE ENGINEERING VIA PROCESS MODI...

MAGNETIC MASKS FOR AN ION IMPLANT APPARATUS

TEMPERATURE MONITOR FOR DEVICES IN AN ION IMPLANT APPARATUS

IMPLANT METHOD AND IMPLANTER BY USING A VARIABLE APERTURE

Ion Implantation at High Temperature Surface Equilibrium Conditions

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

System and Method for Aligning Substrates for Multiple Implants

ION IMPLANTATION METHOD, CARRIER, AND ION IMPLANTATION DEVICE

SOLAR CELL, SOLAR CELL MANUFACTURING DEVICE, AND METHOD FOR MANUFAC...

HIGH-THROUGHPUT ION IMPLANTER

METHOD OF CREATING TWO DIMENSIONAL DOPING PATTERNS IN SOLAR CELLS

USE OF ION BEAM TAILS TO MANUFACTURE A WORKPIECE

APPARATUS AND METHOD FOR MULTIPLE SLOT ION IMPLANTATION

INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION

APPARATUS AND METHOD FOR MASKLESS PATTERNED IMPLANTION

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

USING MULTIPLE MASKS TO FORM INDEPENDENT FEATURES ON A WORKPIECE

MASK HEALTH MONITOR USING A FARADAY PROBE

Integrated Shadow Mask/Carrier for Pattern Ion Implantation

MECHANISM AND METHOD FOR ENSURING ALIGNMENT OF A WORKPIECE TO A MASK

MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK