using masks

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CPC
C23C16/042

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/042using masks

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Patents Grantslast 30 patents

Information Patent Grant
Film forming method and semiconductor production apparatus
- Patent number 12,359,308
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Yusuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Back plate
- Patent number 12,359,299
- Issue date Jul 15, 2025
- Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Dingcheng Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method of forming metal oxide layer using...
- Patent number 12,359,313
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display articles with antiglare surfaces and thin, durable antirefl...
- Patent number 12,360,290
- Issue date Jul 15, 2025
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment apparatus, deposition apparatus, electronic device manufa...
- Patent number 12,354,894
- Issue date Jul 8, 2025
- CANON TOKKI CORPORATION
- Toshiaki Himeji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chromatographic hardware improvements for separation of reactive mo...
- Patent number 12,352,734
- Issue date Jul 8, 2025
- Waters Technologies Corporation
- Mathew DeLano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition mask and method of manufacturing the deposition mask
- Patent number 12,351,898
- Issue date Jul 8, 2025
- Samsung Display Co., Ltd.
- Hwi Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display articles with diffractive, antiglare surfaces and methods o...
- Patent number 12,352,924
- Issue date Jul 8, 2025
- Corning Incorporated
- Jiangwei Feng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiN film embedding method
- Patent number 12,344,933
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming metal oxide layer using deposition apparatus
- Patent number 12,331,398
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,334,343
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Toru Hisamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,331,393
- Issue date Jun 17, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask structure for deposition device, deposition device, and operat...
- Patent number 12,312,671
- Issue date May 27, 2025
- United Semiconductor Japan Co., Ltd.
- Satoshi Inagaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of diamond coatings
- Patent number 12,312,681
- Issue date May 27, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Olaf Dietrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal mask, method of manufacturing the same, and method of manufac...
- Patent number 12,297,530
- Issue date May 13, 2025
- Samsung Display Co., Ltd.
- Hyosung Kim
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
UV cure for local stress modulation
- Patent number 12,300,489
- Issue date May 13, 2025
- Lam Research Corporation
- Anirvan Sircar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor-deposition mask, method for manufacturing vapor-deposition ma...
- Patent number 12,295,245
- Issue date May 6, 2025
- TOPPAN INC.
- Takayuki Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system for high accuracy patterning
- Patent number 12,289,979
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extendible deposition mask and display apparatus provided using the...
- Patent number 12,279,512
- Issue date Apr 15, 2025
- Samsung Display Co., Ltd.
- Dongseob Jeong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer and method for manufacturing same
- Patent number 12,243,739
- Issue date Mar 4, 2025
- Mitsubishi Electric Corporation
- Yuki Taketomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,191,144
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Yi Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively clamped carrier assembly for processing tools
- Patent number 12,191,186
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Benjamin B. Riordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Alignment mask, metal mask assembly, and preparation method therefor
- Patent number 12,183,617
- Issue date Dec 31, 2024
- Chengdu BOE Optoelectronics Technology Co., Ltd.
- Ju Mei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition mask and method of manufacturing device using vapo...
- Patent number 12,178,111
- Issue date Dec 24, 2024
- Canon Kabushiki Kaisha
- Shinichiro Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask assembly and apparatus for manufacturing display device
- Patent number 12,178,112
- Issue date Dec 24, 2024
- Samsung Display Co., Ltd.
- Sanghoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask, method of manufacturing the same, and method of manufacturing...
- Patent number 12,178,113
- Issue date Dec 24, 2024
- Samsung Display Co., Ltd.
- Kabjong Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano robotic system for high throughput single cell DNA sequencing
- Patent number 12,163,979
- Issue date Dec 10, 2024
- Versitech Limited
- Ning Xi
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,159,787
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of oxide thin films
- Patent number 12,154,785
- Issue date Nov 26, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING
- Publication number 20250230536
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION ON METAL-CONTAINING MASK USING PROMOTER
- Publication number 20250224677
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Katie Lutker-Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...
- Publication number 20250215024
- Publication date Jul 3, 2025
- FUJIFILM CORPORATION
- Koichi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20250207245
- Publication date Jun 26, 2025
- Tokyo Electron Limited
- Tomohiro NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION EQUIPMENT
- Publication number 20250207243
- Publication date Jun 26, 2025
- SAMSUNG DISPLAY CO., LTD.
- Sung Woon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20250207244
- Publication date Jun 26, 2025
- Tokyo Electron Limited
- Shuji AZUMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20250197990
- Publication date Jun 19, 2025
- Tokyo Electron Limited
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA SELECTIVE DEPOSITION
- Publication number 20250197991
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Sabrina Myriam Guillemot Wack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN...
- Publication number 20250201610
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lu-Chih LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250183032
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING CARBON-BASED FILM AND FILM FORMING APPARATUS
- Publication number 20250171893
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250174466
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AREA-SELECTIVE FILM FORMING METHOD USING POLYUREA
- Publication number 20250163569
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Soyoung LEE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NIT...
- Publication number 20250167044
- Publication date May 22, 2025
- EUGENUS, INC.
- Ajit Dhamdhere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20250129485
- Publication date Apr 24, 2025
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MATRIX-CONTROLLED PRINTHEAD FOR AN ELECTROCHEMICAL ADDITIVE MANUFAC...
- Publication number 20250115989
- Publication date Apr 10, 2025
- FABRIC8LABS, INC.
- David PAIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION
- Publication number 20250109490
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Krzysztof Kamil Kachel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND DEPOSITION ASSEMBLIES
- Publication number 20250109491
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20250104998
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Shoma MIYATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND A DEPOSITION ASSEMBLIES
- Publication number 20250092510
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Bhagyesh Purohit
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250087482
- Publication date Mar 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yi CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS
- Publication number 20250076550
- Publication date Mar 6, 2025
- Modulight Corporation
- Timo Aho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK ASSEMBLY, METHOD OF MANUFACTURING MASK ASSEMBLY, AND METHOD AN...
- Publication number 20250075313
- Publication date Mar 6, 2025
- SAMSUNG DISPLAY CO., LTD.
- Wonje CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING...
- Publication number 20250063932
- Publication date Feb 20, 2025
- Kabjong SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON MASK DEPOSITION
- Publication number 20250054760
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Daniela ANJOS RIGSBY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-ASSEMBLED MONOLAYER DEPOSITION FROM LOW VAPOR PRESSURE ORGANIC...
- Publication number 20250054739
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON GAP FILL
- Publication number 20250046599
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEXTURED REGION TO REDUCE SPECULAR REFLECTANCE INCLUDING A LOW REFR...
- Publication number 20250035820
- Publication date Jan 30, 2025
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF OXIDE THIN FILMS
- Publication number 20250037995
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DETECTING METAL MASK
- Publication number 20250034698
- Publication date Jan 30, 2025
- Darwin Precisions Corporation
- SEN LI CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using masks

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film forming method and semiconductor production apparatus

Back plate

Deposition apparatus and method of forming metal oxide layer using...

Display articles with antiglare surfaces and thin, durable antirefl...

Alignment apparatus, deposition apparatus, electronic device manufa...

Chromatographic hardware improvements for separation of reactive mo...

Deposition mask and method of manufacturing the deposition mask

Display articles with diffractive, antiglare surfaces and methods o...

SiN film embedding method

Spatially tunable deposition to compensate within wafer differentia...

Method of forming metal oxide layer using deposition apparatus

Substrate processing method and substrate processing system

Method of processing substrate, method of manufacturing semiconduct...

Mask structure for deposition device, deposition device, and operat...

Method for selective deposition of diamond coatings

Metal mask, method of manufacturing the same, and method of manufac...

UV cure for local stress modulation

Vapor-deposition mask, method for manufacturing vapor-deposition ma...

Deposition system for high accuracy patterning

Extendible deposition mask and display apparatus provided using the...

Semiconductor wafer and method for manufacturing same

Semiconductor device and manufacturing method thereof

Actively clamped carrier assembly for processing tools

Alignment mask, metal mask assembly, and preparation method therefor

Vapor deposition mask and method of manufacturing device using vapo...

Mask assembly and apparatus for manufacturing display device

Mask, method of manufacturing the same, and method of manufacturing...

Nano robotic system for high throughput single cell DNA sequencing

Method of manufacturing a semiconductor device and pattern formatio...

Deposition of oxide thin films

Patents Applicationslast 30 patents

DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING

SELECTIVE DEPOSITION ON METAL-CONTAINING MASK USING PROMOTER

CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...

FILM FORMATION METHOD AND FILM FORMATION DEVICE

DEPOSITION EQUIPMENT

FILM FORMATION METHOD AND FILM FORMATION DEVICE

FILM FORMATION METHOD AND FILM FORMATION DEVICE

AREA SELECTIVE DEPOSITION

RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD OF FORMING CARBON-BASED FILM AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

AREA-SELECTIVE FILM FORMING METHOD USING POLYUREA

DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NIT...

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

MATRIX-CONTROLLED PRINTHEAD FOR AN ELECTROCHEMICAL ADDITIVE MANUFAC...

SELECTIVE DEPOSITION

SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND DEPOSITION ASSEMBLIES

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND A DEPOSITION ASSEMBLIES

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS

MASK ASSEMBLY, METHOD OF MANUFACTURING MASK ASSEMBLY, AND METHOD AN...

MASK, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING...

CARBON MASK DEPOSITION

SELF-ASSEMBLED MONOLAYER DEPOSITION FROM LOW VAPOR PRESSURE ORGANIC...

DIAMOND-LIKE CARBON GAP FILL

TEXTURED REGION TO REDUCE SPECULAR REFLECTANCE INCLUDING A LOW REFR...

DEPOSITION OF OXIDE THIN FILMS

METHOD FOR DETECTING METAL MASK