using measurement in the gas phase

Industry

CPC
C23C14/544

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/544using measurement in the gas phase

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for determining the concentration of a vapor
- Patent number 11,187,676
- Issue date Nov 30, 2021
- Aixtron SE
- Michael Long
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation apparatus and calibration method thereof
- Patent number 10,895,007
- Issue date Jan 19, 2021
- Industrial Technology Research Institute
- Yu-Lin Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monomer vaporizing device and method of controlling the same
- Patent number 10,266,941
- Issue date Apr 23, 2019
- Samsung Display Co., Ltd.
- Yong-Suk Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a gas supply to a process chamber, controlle...
- Patent number 10,174,415
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Frank Schnappenberger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition apparatus and vapor deposition method
- Patent number 10,081,860
- Issue date Sep 25, 2018
- BOE Technology Group Co., Ltd.
- Gu Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation apparatus and evaporation method
- Patent number 10,066,288
- Issue date Sep 4, 2018
- AU OPTRONICS CORPORATION
- Chih-Hung Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for measuring deposition rate
- Patent number 9,897,539
- Issue date Feb 20, 2018
- Samsung Display Co., Ltd.
- Tae Min Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device and sputtering method
- Patent number 9,650,710
- Issue date May 16, 2017
- Samsung Display Co., Ltd.
- Seung-Ho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma emission monitor and process gas delivery system
- Patent number 9,633,823
- Issue date Apr 25, 2017
- Cardinal CG Company
- Keith J. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma sputtering process for producing particles
- Patent number 9,447,493
- Issue date Sep 20, 2016
- Plasmadvance AB
- Ulf Helmersson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of measuring vapor flux density
- Patent number 9,383,316
- Issue date Jul 5, 2016
- First Solar, Inc
- Markus E. Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for processing vapor
- Patent number 9,302,291
- Issue date Apr 5, 2016
- 3M Innovative Properties Company
- Christopher S. Lyons
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Device for detecting evaporation source and method for applying the...
- Patent number 9,299,958
- Issue date Mar 29, 2016
- Everdisplay Optronics (Shanghai) Limited
- ChungChe Sou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film deposition apparatus, method of manufacturing organic lig...
- Patent number 9,279,177
- Issue date Mar 8, 2016
- Samsung Display Co., Ltd.
- Yong-Sup Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering method and sputtering apparatus
- Patent number 9,121,094
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Kaoru Maekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering method and reactive sputtering apparatus
- Patent number 8,974,648
- Issue date Mar 10, 2015
- Canon Anelva Corporation
- Yuichi Otani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for accurately measuring the incident flux of amb...
- Patent number 8,803,072
- Issue date Aug 12, 2014
- British Columbia Institute of Technology
- James Lawrence Booth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flux monitor
- Patent number 8,646,408
- Issue date Feb 11, 2014
- First Solar, Inc
- Markus E. Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ flux measurement devices, methods, and systems
- Patent number 8,377,518
- Issue date Feb 19, 2013
- Georgia Tech Research Corporation
- W. Alan Doolittle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ flux measurement devices, methods, and systems
- Patent number 8,360,002
- Issue date Jan 29, 2013
- Georgia Tech Research Corporation
- W. Alan Doolittle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ flux measurement devices, methods, and systems
- Patent number 8,261,690
- Issue date Sep 11, 2012
- Georgia Tech Research Corporation
- W. Alan Doolittle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron gun evaporation apparatus and film formation method using...
- Patent number 8,133,528
- Issue date Mar 13, 2012
- Canon Anelva Corporation
- Masato Nakayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling the volume of a molecular beam
- Patent number 8,025,734
- Issue date Sep 27, 2011
- Choshu Industry Co., Ltd.
- Osamu Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a crystalline silicon thin film
- Patent number 7,763,153
- Issue date Jul 27, 2010
- Nissin Electric Co., Ltd.
- Eiji Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for measuring vapor flux density
- Patent number 7,719,681
- Issue date May 18, 2010
- Inficon
- Chih-shun Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling the volume of a molecular beam
- Patent number 7,682,670
- Issue date Mar 23, 2010
- Choshu Industry Co., Ltd.
- Osamu Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real-time system for monitoring and controlling film uniformity and...
- Patent number 7,436,526
- Issue date Oct 14, 2008
- ProMos Technologies Inc.
- Wen-Li Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition device
- Patent number 7,354,482
- Issue date Apr 8, 2008
- Shimadzu Corporation
- Yoshiyuki Konishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
End point detection for sputtering and resputtering
- Patent number 7,048,837
- Issue date May 23, 2006
- Applied Materials, Inc.
- Sasson R. Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam size diagnostics and workpiece processing
- Patent number 6,831,272
- Issue date Dec 14, 2004
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBST...
- Publication number 20210147975
- Publication date May 20, 2021
- Applied Materials, Inc.
- Thomas GEBELE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210010130
- Publication date Jan 14, 2021
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR DETERMINING THE CONCENTRATION OF A VAPOR
- Publication number 20200033295
- Publication date Jan 30, 2020
- AIXTRON SE
- Michael LONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION APPARATUS AND CALIBRATION METHOD THEREOF
- Publication number 20190127843
- Publication date May 2, 2019
- Industrial Technology Research Institute
- Yu-Lin Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Evaporation Apparatus
- Publication number 20180363129
- Publication date Dec 20, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Shupeng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, CONTROLLE...
- Publication number 20180135160
- Publication date May 17, 2018
- Applied Materials, Inc.
- Frank SCHNAPPENBERGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
- Publication number 20180135163
- Publication date May 17, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Gu YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
- Publication number 20170283938
- Publication date Oct 5, 2017
- BOE TECHNOLOGY GROUP CO., LTD.
- Gu YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS REGULATOR AND MANUFACTURING METHOD THEREOF, FILM THI...
- Publication number 20170037507
- Publication date Feb 9, 2017
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaohu LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING A GAS SUPPLY AND CONTROLLER
- Publication number 20160244870
- Publication date Aug 25, 2016
- Applied Materials, Inc.
- Frank SCHNAPPENBERGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION RATE MEASURING APPARATUS
- Publication number 20160216143
- Publication date Jul 28, 2016
- SAMSUNG DISPLAY CO., LTD.
- Hee Dok CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING DEVICE AND SPUTTERING METHOD
- Publication number 20150200383
- Publication date Jul 16, 2015
- SAMSUNG DISPLAY CO., LTD.
- Seung-Ho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING EXHAUST FLOW IN WAFER PROCESSING MODULE
- Publication number 20150191816
- Publication date Jul 9, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuo-Shu TSENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for the Evaporation and Deposition of Materials
- Publication number 20140302238
- Publication date Oct 9, 2014
- Mustang Vacuum Systems, Inc.
- Robert Choquette
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR DETECTING EVAPORATION SOURCE AND METHOD FOR APPLYING THE...
- Publication number 20140238105
- Publication date Aug 28, 2014
- EverDisplay Optronics (Shanghai) Limited
- ChungChe SOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Processing Vapor
- Publication number 20140178567
- Publication date Jun 26, 2014
- Christopher S. Lyons
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
REACTIVE SPUTTERING METHOD AND REACTIVE SPUTTERING APPARATUS
- Publication number 20140158524
- Publication date Jun 12, 2014
- Canon ANELVA Corporation
- Yuichi OTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOMER VAPORIZING DEVICE AND METHOD OF CONTROLLING THE SAME
- Publication number 20140161966
- Publication date Jun 12, 2014
- Yong-Suk Lee
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FLUX MONITOR
- Publication number 20140104616
- Publication date Apr 17, 2014
- First Solar, Inc.
- MARKUS E. BECK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATING APPARATUS AND EVAPORATING METHOD
- Publication number 20130209666
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FLUX MEASUREMENT DEVICES, METHODS, AND SYSTEMS
- Publication number 20120306508
- Publication date Dec 6, 2012
- Georgia Tech Research Corporation
- W. Alan Doolittle
- C30 - CRYSTAL GROWTH
Information Patent Application
IN-SITU FLUX MEASURMENT DEVICES, METHODS, AND SYSTEMS
- Publication number 20120304927
- Publication date Dec 6, 2012
- Georgia Tech Research Corporation
- W. Alan Doolittle
- C30 - CRYSTAL GROWTH
Information Patent Application
PLASMA SPUTTERING PROCESS FOR PRODUCING PARTICLES
- Publication number 20120305385
- Publication date Dec 6, 2012
- TIÅ AB
- Ulf Helmersson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING APPARATUS FOR FORMING THIN FILM
- Publication number 20120260855
- Publication date Oct 18, 2012
- Whang Sin CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIG...
- Publication number 20120009706
- Publication date Jan 12, 2012
- Yong-Sup Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR ACCURATELY MEASURING THE INCIDENT FLUX OF AMB...
- Publication number 20110290991
- Publication date Dec 1, 2011
- British Columbia Institute of Technology
- James Lawrence Booth
- C30 - CRYSTAL GROWTH
Information Patent Application
DEPOSITION RATE CONTROL
- Publication number 20110212256
- Publication date Sep 1, 2011
- First Solar, Inc.
- Markus E. Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING...
- Publication number 20110183069
- Publication date Jul 28, 2011
- TOKYO ELECTRON LIMITED
- Hiroyuki Ikuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Flux Monitor
- Publication number 20110165315
- Publication date Jul 7, 2011
- First Solar, Inc.
- Markus E. Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING METHOD AND REACTIVE SPUTTERING APPARATUS
- Publication number 20110155561
- Publication date Jun 30, 2011
- Canon ANELVA Corporation
- Yuichi OTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using measurement in the gas phase

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device and method for determining the concentration of a vapor

Evaporation apparatus and calibration method thereof

Monomer vaporizing device and method of controlling the same

Method for controlling a gas supply to a process chamber, controlle...

Vacuum deposition apparatus and vapor deposition method

Evaporation apparatus and evaporation method

Apparatus and method for measuring deposition rate

Sputtering device and sputtering method

Plasma emission monitor and process gas delivery system

Plasma sputtering process for producing particles

Method of measuring vapor flux density

Systems and methods for processing vapor

Device for detecting evaporation source and method for applying the...

Thin film deposition apparatus, method of manufacturing organic lig...

Sputtering method and sputtering apparatus

Reactive sputtering method and reactive sputtering apparatus

Method and device for accurately measuring the incident flux of amb...

Flux monitor

In-situ flux measurement devices, methods, and systems

In-situ flux measurement devices, methods, and systems

In-situ flux measurement devices, methods, and systems

Electron gun evaporation apparatus and film formation method using...

Method for controlling the volume of a molecular beam

Method and apparatus for forming a crystalline silicon thin film

Apparatus and method for measuring vapor flux density

Method for controlling the volume of a molecular beam

Real-time system for monitoring and controlling film uniformity and...

Film deposition device

End point detection for sputtering and resputtering

Gas cluster ion beam size diagnostics and workpiece processing

Patents Applicationslast 30 patents

EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBST...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

DEVICE AND METHOD FOR DETERMINING THE CONCENTRATION OF A VAPOR

EVAPORATION APPARATUS AND CALIBRATION METHOD THEREOF

Evaporation Apparatus

METHOD FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, CONTROLLE...

VACUUM DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

VACUUM DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

FILM THICKNESS REGULATOR AND MANUFACTURING METHOD THEREOF, FILM THI...

METHOD FOR CONTROLLING A GAS SUPPLY AND CONTROLLER

DEPOSITION RATE MEASURING APPARATUS

SPUTTERING DEVICE AND SPUTTERING METHOD

METHOD FOR CONTROLLING EXHAUST FLOW IN WAFER PROCESSING MODULE

Apparatus and Method for the Evaporation and Deposition of Materials

DEVICE FOR DETECTING EVAPORATION SOURCE AND METHOD FOR APPLYING THE...

Systems and Methods for Processing Vapor

REACTIVE SPUTTERING METHOD AND REACTIVE SPUTTERING APPARATUS

MONOMER VAPORIZING DEVICE AND METHOD OF CONTROLLING THE SAME

FLUX MONITOR

EVAPORATING APPARATUS AND EVAPORATING METHOD

IN-SITU FLUX MEASUREMENT DEVICES, METHODS, AND SYSTEMS

IN-SITU FLUX MEASURMENT DEVICES, METHODS, AND SYSTEMS

PLASMA SPUTTERING PROCESS FOR PRODUCING PARTICLES

DEPOSITING APPARATUS FOR FORMING THIN FILM

THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIG...

METHOD AND DEVICE FOR ACCURATELY MEASURING THE INCIDENT FLUX OF AMB...

DEPOSITION RATE CONTROL

DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING...

Flux Monitor

REACTIVE SPUTTERING METHOD AND REACTIVE SPUTTERING APPARATUS