using mechanical means

Industry

CPC
H01L21/687

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/687using mechanical means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Mechanical indexer for multi-station process module
- Patent number 12,322,641
- Issue date Jun 3, 2025
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Height adjustable semiconductor wafer support
- Patent number 12,322,643
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Ming Shing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder for use in a lithographic apparatus
- Patent number 12,321,104
- Issue date Jun 3, 2025
- ASML Netherlands B.V.
- Thomas Poiesz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual zone heaters for metallic pedestals
- Patent number 12,322,617
- Issue date Jun 3, 2025
- Lam Research Corporation
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 12,322,642
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support member, substrate treatment apparatus, and substr...
- Patent number 12,321,098
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Hitoshi Hashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer storage device
- Patent number 12,322,621
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system, substrate processing method, and recor...
- Patent number 12,322,631
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and substrate processing method
- Patent number 12,322,586
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Koji Nishiyama
- B08 - CLEANING
Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 12,322,607
- Issue date Jun 3, 2025
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure heating apparatus
- Patent number 12,322,613
- Issue date Jun 3, 2025
- Samsung Electronics Co., Ltd.
- Tatsuya Ishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring electronic component from flexible carri...
- Patent number 12,322,630
- Issue date Jun 3, 2025
- MICRAFT SYSTEM PLUS CO., LTD.
- Chingju Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with improved temperature control
- Patent number 12,322,633
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, modification device and substrate proc...
- Patent number 12,322,599
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Norifumi Kohama
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Reactor with centering pin for epitaxial deposition
- Patent number 12,322,644
- Issue date Jun 3, 2025
- Veeco Instruments, Inc.
- Alexander Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,748
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,747
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
- Patent number 12,315,707
- Issue date May 27, 2025
- Tokyo Electron Limited
- Motoi Yamagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a substrate support for a lithographic appa...
- Patent number 12,315,756
- Issue date May 27, 2025
- ASML Netherlands B.V.
- Michael Marinus Anna Steur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked structure and semiconductor manufacturing apparatus member
- Patent number 12,315,757
- Issue date May 27, 2025
- NGK Insulators, Ltd.
- Asumi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom cover plate to reduce wafer planar nonuniformity
- Patent number 12,315,746
- Issue date May 27, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate fixing device
- Patent number 12,315,755
- Issue date May 27, 2025
- Shinko Electric Industries Co., Ltd.
- Yasuhiko Kusama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater cover plate for uniformity improvement
- Patent number 12,315,745
- Issue date May 27, 2025
- Applied Materials, Inc.
- Muhammad M. Rasheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Universal ring wafer support apparatus
- Patent number 12,308,278
- Issue date May 20, 2025
- GREEN TECHNOLOGY INVESTMENTS, LLC
- Tal Levin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus having bowl assembly
- Patent number 12,308,256
- Issue date May 20, 2025
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing device and wafer conveying method
- Patent number 12,308,277
- Issue date May 20, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hui Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer treatment apparatus and method for reducing scattering of tre...
- Patent number 12,308,257
- Issue date May 20, 2025
- Semes Co., Ltd.
- Young Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Transport System and Substrate Position Adjustment Method
- Publication number 20250183079
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Keisuke Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...
- Publication number 20250178845
- Publication date Jun 5, 2025
- ASMPT SINGAPORE PTE. LTD
- Chak Tong SZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20250183084
- Publication date Jun 5, 2025
- SAMSUNG DISPLAY CO., LTD.
- YONGHYUN KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20250180996
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND POSITIONING METHOD OF CONVEYANCE ARM
- Publication number 20250183081
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Junya MIYAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CUP, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
- Publication number 20250183092
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Kouichirou TANAKA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HYBRID SEAL FOR SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20250183093
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Suresh GUPTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
- Publication number 20250183067
- Publication date Jun 5, 2025
- Intel Corporation
- John William Rudolph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DICING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMICON...
- Publication number 20250174473
- Publication date May 29, 2025
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoshikuni SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS IN...
- Publication number 20250174481
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Takuya SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER
- Publication number 20250176075
- Publication date May 29, 2025
- NGK Insulators, Ltd.
- Keisuke TAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING
- Publication number 20250174595
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hong-Ta Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
YTTRIUM-BASED PROTECTIVE FILM, METHOD FOR PRODUCING SAME, AND MEMBER
- Publication number 20250171886
- Publication date May 29, 2025
- AGC Inc.
- Shuhei OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHIP EJECTOR APPARATUS
- Publication number 20250174488
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Sangjin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174477
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174480
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...
- Publication number 20250174482
- Publication date May 29, 2025
- SEMES CO., LTD.
- Hee Jae BYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING DEVICE INCLU...
- Publication number 20250174486
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174487
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AXIAL GAP MOTOR, ROBOT, AND ROBOT SYSTEM
- Publication number 20250175045
- Publication date May 29, 2025
- Kabushiki Kaisha Yaskawa Denki
- Masanobu KAKIHARA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MULTI-SIZED SUBSTRATE FIXTURE
- Publication number 20250167039
- Publication date May 22, 2025
- ONTO INNOVATION INC.
- Troy Palm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK ASSEMBLY
- Publication number 20250167037
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR DETERMINING WAFER BOW
- Publication number 20250167023
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Daniel FULFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR REDUCING WAFER BACKSIDE DAMAGE
- Publication number 20250167025
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT
- Publication number 20250167036
- Publication date May 22, 2025
- Applied Materials, Inc.
- Sanjay BHAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME
- Publication number 20250164897
- Publication date May 22, 2025
- SAMSUNG DISPLAY CO., LTD.
- Jungwoong Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT
- Publication number 20250167030
- Publication date May 22, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...
- Publication number 20250167022
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Keita Hirase
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND DETECTING METHOD OF TRAY TILTING
- Publication number 20250167038
- Publication date May 22, 2025
- TES CO., LTD.
- Jin-Hyung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250167040
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

using mechanical means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mechanical indexer for multi-station process module

Height adjustable semiconductor wafer support

Substrate holder for use in a lithographic apparatus

Dual zone heaters for metallic pedestals

Substrate transfer device and substrate transfer method

Substrate support member, substrate treatment apparatus, and substr...

Semiconductor wafer storage device

Transfer apparatus and transfer method

Substrate processing system, substrate processing method, and recor...

Substrate cleaning method and substrate processing method

Wafer processing apparatus and wafer processing method

Pressure heating apparatus

Apparatus for transferring electronic component from flexible carri...

Electrostatic chuck with improved temperature control

Substrate processing method, modification device and substrate proc...

Reactor with centering pin for epitaxial deposition

Workpiece handling architecture for high workpiece throughput

Workpiece handling architecture for high workpiece throughput

Mounting table structure, substrate processing apparatus, and metho...

Method of manufacturing a substrate support for a lithographic appa...

Stacked structure and semiconductor manufacturing apparatus member

Plasma processing apparatus, and method and program for controlling...

Bottom cover plate to reduce wafer planar nonuniformity

Substrate fixing device

Heater cover plate for uniformity improvement

Universal ring wafer support apparatus

Substrate treatment apparatus having bowl assembly

Wafer processing device and wafer conveying method

Heated substrate support

Wafer treatment apparatus and method for reducing scattering of tre...

Patents Applicationslast 30 patents

Substrate Transport System and Substrate Position Adjustment Method

APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

SUBSTRATE PROCESSING DEVICE AND POSITIONING METHOD OF CONVEYANCE ARM

CUP, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

HYBRID SEAL FOR SEMICONDUCTOR PROCESSING CHAMBERS

MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS

DICING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMICON...

SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS IN...

CERAMIC HEATER

METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING

YTTRIUM-BASED PROTECTIVE FILM, METHOD FOR PRODUCING SAME, AND MEMBER

CHIP EJECTOR APPARATUS

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...

SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING DEVICE INCLU...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

AXIAL GAP MOTOR, ROBOT, AND ROBOT SYSTEM

MULTI-SIZED SUBSTRATE FIXTURE

WAFER CHUCK ASSEMBLY

DEVICE AND METHOD FOR DETERMINING WAFER BOW

APPARATUS AND METHODS FOR REDUCING WAFER BACKSIDE DAMAGE

MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT

STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME

LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT

SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...

SUBSTRATE PROCESSING APPARATUS AND DETECTING METHOD OF TRAY TILTING

LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS