using mechanical means

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CPC
H01L21/687

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/687using mechanical means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Lamellar ceramic structure
- Patent number 12,368,029
- Issue date Jul 22, 2025
- Lam Research Corporation
- Joel Philip Hollingsworth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device including housing provided with fan
- Patent number 12,368,069
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate processing apparatus, subst...
- Patent number 12,368,059
- Issue date Jul 22, 2025
- Ebara Corporation
- Shuji Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,362,202
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Fumihiro Kamimura
- B08 - CLEANING
Information Patent Grant
Ceramic sintered body comprising magnesium aluminate spinel
- Patent number 12,358,806
- Issue date Jul 15, 2025
- Heraeus Covantics North America LLC
- Luke Walker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device using stationary laser...
- Patent number 12,362,204
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Ji Hoon Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching apparatus and method
- Patent number 12,362,152
- Issue date Jul 15, 2025
- SPTS Technologies Limited
- Maxime Varvara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching chamber with etching by-product redistributor
- Patent number 12,362,154
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 12,362,179
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Hung Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for low temperature silicon nitride films
- Patent number 12,362,169
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Wenbo Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer transfer robot apparatus based on direct drive motor
- Patent number 12,358,734
- Issue date Jul 15, 2025
- RAONTEC INC.
- Jin Ho Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus and display panel manufacturing apparatus incl...
- Patent number 12,354,903
- Issue date Jul 8, 2025
- Samsung Display Co., Ltd.
- Gyungmin Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,354,855
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 12,354,890
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Shota Ezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 12,354,849
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Gyeong min Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fixture and method for determining position of a target in a reacti...
- Patent number 12,354,893
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Siyao Luan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method, method...
- Patent number 12,354,848
- Issue date Jul 8, 2025
- Kokusai Electric Corporation
- Yasunori Ejiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,347,698
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Koki Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 12,347,654
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Hwajun Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 12,347,658
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Ryota Sakane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Floating pin for substrate transfer
- Patent number 12,347,719
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Sreenath Sovenahalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,347,720
- Issue date Jul 1, 2025
- Semes Co., Ltd.
- Jin Woo Jung
- B08 - CLEANING
Information Patent Grant
Die separation ring for wafers having a large die aspect ratio
- Patent number 12,347,733
- Issue date Jul 1, 2025
- SanDisk Technologies, Inc.
- Shuo Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing system and system and method for manufacturing semic...
- Patent number 12,347,702
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ying-Chieh Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer conveyance unit and wafer conveyance method
- Patent number 12,347,718
- Issue date Jul 1, 2025
- Hamamatsu Photonics K.K.
- Akira Shimase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,340,985
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Tetsuji Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treating vessel and liquid processing apparatus
- Patent number 12,341,027
- Issue date Jun 24, 2025
- Semes Co., Ltd.
- Dae Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 12,341,031
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus
- Patent number 12,341,052
- Issue date Jun 24, 2025
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Member for semiconductor manufacturing apparatus
- Patent number 12,340,990
- Issue date Jun 24, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD LOCK DEVICE
- Publication number 20250239465
- Publication date Jul 24, 2025
- Canon ANELVA Corporation
- Jun MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20250239480
- Publication date Jul 24, 2025
- NGK Insulators, Ltd.
- Shota YAMAKOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF OPERATING A SPATIAL DEPOSITION TOOL
- Publication number 20250239479
- Publication date Jul 24, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-SLIP COMPOSITIONS AND COMPONENTS FOR SEMICONDUCTOR WAFER HANDL...
- Publication number 20250237944
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Chung-Ming Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...
- Publication number 20250232987
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Boi IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND MOUNTING TABLE THEREOF
- Publication number 20250233008
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Yohei UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGING SEMICONDUCTOR WAFER AND DIE HANDLING
- Publication number 20250233005
- Publication date Jul 17, 2025
- CIENA CORPORATION
- Martin Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACEMENT MEMBER
- Publication number 20250233009
- Publication date Jul 17, 2025
- KYOCERA CORPORATION
- Koji AKASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARTUS FOR DETECTING POSITION OF WAFER AND OPERATING METHOD THEREOF
- Publication number 20250233006
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Kyungrim Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BASE, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD OF BASE
- Publication number 20250233010
- Publication date Jul 17, 2025
- Sumitomo Osaka Cement Co., Ltd.
- Yuya Nakazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD
- Publication number 20250233011
- Publication date Jul 17, 2025
- ZEUS CO., LTD.
- Woon KONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20250232967
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...
- Publication number 20250233007
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Tilakraj Durgadahalli Shankaregowda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT DEVICE
- Publication number 20250226240
- Publication date Jul 10, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Minami NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250222494
- Publication date Jul 10, 2025
- SHIBAURA MECHATRONIS CORPORATION
- Masaya KAMIYA
- B08 - CLEANING
Information Patent Application
Susceptor For High Temperature Semiconductor Process
- Publication number 20250226257
- Publication date Jul 10, 2025
- MICO CERAMICS LTD.
- Mina Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250226190
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Takayuki ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250226259
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Woojin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT FACEPLATE LOADING PLATFORM
- Publication number 20250226258
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- Thyagarajan Kathavarayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS
- Publication number 20250218819
- Publication date Jul 3, 2025
- LAM RESEARCH CORPORATION
- Ilia Kalinovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218825
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jae Woo KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250218846
- Publication date Jul 3, 2025
- HITACHI HIGH-TECH CORPORATION
- Tomoyuki Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218854
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ki JUNG
- B08 - CLEANING
Information Patent Application
Method and Device to Reduce Epitaxial Defects Due to Contact Stress...
- Publication number 20250218856
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SAMPLE HOLDER
- Publication number 20250218858
- Publication date Jul 3, 2025
- KYOCERA CORPORATION
- Musashi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING...
- Publication number 20250214786
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Ha Neul YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSTRUCTING A SUBSTRATE TOPOLOGY MAP BASED ON MEASURED PROPERTIES
- Publication number 20250218831
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Saitanay Naribole
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE SUPPORT UNIT AND HEAT TREATMENT DEVICE INCLUDING SAME
- Publication number 20250218855
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218857
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ki JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMI...
- Publication number 20250218872
- Publication date Jul 3, 2025
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoshikuni SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS

using mechanical means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lamellar ceramic structure

Substrate transfer device including housing provided with fan

Substrate cleaning apparatus, substrate processing apparatus, subst...

Substrate processing method and substrate processing apparatus

Ceramic sintered body comprising magnesium aluminate spinel

Method of manufacturing semiconductor device using stationary laser...

Plasma etching apparatus and method

Ion beam etching chamber with etching by-product redistributor

Method and apparatus for coating photo resist over a substrate

Methods and apparatus for low temperature silicon nitride films

Wafer transfer robot apparatus based on direct drive motor

Deposition apparatus and display panel manufacturing apparatus incl...

Process kits and related methods for processing chambers to facilit...

Stage and plasma processing apparatus

Plasma processing apparatus

Fixture and method for determining position of a target in a reacti...

Substrate processing apparatus, substrate processing method, method...

Liquid processing apparatus and liquid processing method

Plasma processing apparatus

Stage and plasma processing apparatus

Floating pin for substrate transfer

Apparatus for treating substrate

Die separation ring for wafers having a large die aspect ratio

Wet processing system and system and method for manufacturing semic...

Wafer conveyance unit and wafer conveyance method

Plasma processing apparatus and plasma processing method

Treating vessel and liquid processing apparatus

Light irradiation type heat treatment method and heat treatment app...

Wafer cleaning apparatus

Member for semiconductor manufacturing apparatus

Patents Applicationslast 30 patents

LOAD LOCK DEVICE

MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

METHODS OF OPERATING A SPATIAL DEPOSITION TOOL

ANTI-SLIP COMPOSITIONS AND COMPONENTS FOR SEMICONDUCTOR WAFER HANDL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...

PLASMA PROCESSING APPARATUS AND MOUNTING TABLE THEREOF

MANAGING SEMICONDUCTOR WAFER AND DIE HANDLING

PLACEMENT MEMBER

APPARTUS FOR DETECTING POSITION OF WAFER AND OPERATING METHOD THEREOF

BASE, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD OF BASE

WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD

PROCESSING SYSTEM AND PROCESSING METHOD

SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...

SUBSTRATE TREATMENT DEVICE

VIBRATING BODY AND SUBSTRATE PROCESSING APPARATUS

Susceptor For High Temperature Semiconductor Process

STAGE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

COMPACT FACEPLATE LOADING PLATFORM

RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Method and Device to Reduce Epitaxial Defects Due to Contact Stress...

SAMPLE HOLDER

SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING...

CONSTRUCTING A SUBSTRATE TOPOLOGY MAP BASED ON MEASURED PROPERTIES

SUBSTRATE SUPPORT UNIT AND HEAT TREATMENT DEVICE INCLUDING SAME

SUBSTRATE PROCESSING APPARATUS

EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMI...