using mechanical means

Industry

CPC
H01L21/687

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/687using mechanical means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,748
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,747
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
- Patent number 12,315,707
- Issue date May 27, 2025
- Tokyo Electron Limited
- Motoi Yamagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a substrate support for a lithographic appa...
- Patent number 12,315,756
- Issue date May 27, 2025
- ASML Netherlands B.V.
- Michael Marinus Anna Steur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked structure and semiconductor manufacturing apparatus member
- Patent number 12,315,757
- Issue date May 27, 2025
- NGK Insulators, Ltd.
- Asumi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom cover plate to reduce wafer planar nonuniformity
- Patent number 12,315,746
- Issue date May 27, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate fixing device
- Patent number 12,315,755
- Issue date May 27, 2025
- Shinko Electric Industries Co., Ltd.
- Yasuhiko Kusama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater cover plate for uniformity improvement
- Patent number 12,315,745
- Issue date May 27, 2025
- Applied Materials, Inc.
- Muhammad M. Rasheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus having bowl assembly
- Patent number 12,308,256
- Issue date May 20, 2025
- DEVICEENG CO., LTD
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Universal ring wafer support apparatus
- Patent number 12,308,278
- Issue date May 20, 2025
- GREEN TECHNOLOGY INVESTMENTS, LLC
- Tal Levin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing device and wafer conveying method
- Patent number 12,308,277
- Issue date May 20, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hui Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer treatment apparatus and method for reducing scattering of tre...
- Patent number 12,308,257
- Issue date May 20, 2025
- Semes Co., Ltd.
- Young Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 12,308,262
- Issue date May 20, 2025
- Disco Corporation
- Takashi Uchiho
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Tape pressure bonding apparatus
- Patent number 12,308,276
- Issue date May 20, 2025
- Disco Corporation
- Takashi Uchiho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-resistant member
- Patent number 12,304,875
- Issue date May 20, 2025
- Toto Ltd.
- Junichi Iwasawa
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Load lock device
- Patent number 12,308,254
- Issue date May 20, 2025
- Canon Anelva Corporation
- Jun Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate boat and methods of using the same
- Patent number 12,308,266
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Huang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and bonding system
- Patent number 12,300,516
- Issue date May 13, 2025
- YAMAHA ROBOTICS HOLDINGS CO., LTD.
- Hiroshi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus having edge impedance control circuit
- Patent number 12,300,470
- Issue date May 13, 2025
- Semes Co., Ltd.
- Daehyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,297,536
- Issue date May 13, 2025
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,298,668
- Issue date May 13, 2025
- Tokyo Electron Limited
- Shinichiro Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support and substrate processing apparatus
- Patent number 12,300,475
- Issue date May 13, 2025
- Tokyo Electron Limited
- Michishige Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,300,515
- Issue date May 13, 2025
- Semes Co., Ltd.
- Miso Park
- B08 - CLEANING
Information Patent Grant
Wafer frame sorter and stocker
- Patent number 12,300,532
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and mounting table thereof
- Patent number 12,293,937
- Issue date May 6, 2025
- Tokyo Electron Limited
- Yohei Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 12,293,938
- Issue date May 6, 2025
- ZEUS CO., LTD.
- Woon Kong
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-SIZED SUBSTRATE FIXTURE
- Publication number 20250167039
- Publication date May 22, 2025
- ONTO INNOVATION INC.
- Troy Palm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK ASSEMBLY
- Publication number 20250167037
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR DETERMINING WAFER BOW
- Publication number 20250167023
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Daniel FULFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR REDUCING WAFER BACKSIDE DAMAGE
- Publication number 20250167025
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT
- Publication number 20250167036
- Publication date May 22, 2025
- Applied Materials, Inc.
- Sanjay BHAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME
- Publication number 20250164897
- Publication date May 22, 2025
- SAMSUNG DISPLAY CO., LTD.
- Jungwoong Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT
- Publication number 20250167030
- Publication date May 22, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND DETECTING METHOD OF TRAY TILTING
- Publication number 20250167038
- Publication date May 22, 2025
- TES CO., LTD.
- Jin-Hyung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250167040
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...
- Publication number 20250167022
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Keita Hirase
- B08 - CLEANING
Information Patent Application
HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER
- Publication number 20250157835
- Publication date May 15, 2025
- HERMES-EPITEK CORPORATION
- Shang-Jr Gwo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER STORAGE DEVICE
- Publication number 20250157837
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Ju- CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20250157842
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...
- Publication number 20250157848
- Publication date May 15, 2025
- SEMES CO., LTD.
- Mun Hyeok HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE IMPLANT FOR WAFER CURVATURE CONTROL
- Publication number 20250157821
- Publication date May 15, 2025
- Axcelis Technologies, Inc.
- Sean Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...
- Publication number 20250155234
- Publication date May 15, 2025
- Applied Materials, Inc.
- Mohsin Waqar
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR BOND TREATING AND CLEAVING OF SILICON WAFERS
- Publication number 20250157847
- Publication date May 15, 2025
- GLOBALWAFERS CO., LTD.
- Peter Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-CARRIER STRUCTURE
- Publication number 20250154653
- Publication date May 15, 2025
- SGL CARBON SE
- Shane BRAUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDER FOR USE IN LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20250157849
- Publication date May 15, 2025
- ASML NETHERLANDS B.V.
- Johannes Josephus MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE MOTION PROFILE SYSTEM AND METHOD
- Publication number 20250157850
- Publication date May 15, 2025
- KLA Corporation
- Zhaolong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCE...
- Publication number 20250144669
- Publication date May 8, 2025
- Applied Materials, Inc.
- Jordan B. TYE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS
- Publication number 20250149362
- Publication date May 8, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...
- Publication number 20250149365
- Publication date May 8, 2025
- Jong Hyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...
- Publication number 20250149374
- Publication date May 8, 2025
- Jae Oh BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
- Publication number 20250149373
- Publication date May 8, 2025
- Applied Materials, Inc.
- Nitin Deepak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...
- Publication number 20250146133
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yeontae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER EDGE TILT AND ETCH RATE UNIFORMITY
- Publication number 20250149306
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20250149357
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Hyuntae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137133
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Controlling Substrate Processing System and Substrate Pr...
- Publication number 20250140591
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS

using mechanical means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Workpiece handling architecture for high workpiece throughput

Workpiece handling architecture for high workpiece throughput

Mounting table structure, substrate processing apparatus, and metho...

Method of manufacturing a substrate support for a lithographic appa...

Stacked structure and semiconductor manufacturing apparatus member

Plasma processing apparatus, and method and program for controlling...

Bottom cover plate to reduce wafer planar nonuniformity

Substrate fixing device

Heater cover plate for uniformity improvement

Substrate treatment apparatus having bowl assembly

Universal ring wafer support apparatus

Wafer processing device and wafer conveying method

Heated substrate support

Wafer treatment apparatus and method for reducing scattering of tre...

Processing apparatus

Tape pressure bonding apparatus

Apparatus and method for drying substrate

Plasma-resistant member

Load lock device

Semiconductor substrate boat and methods of using the same

Wafer cleaning apparatus and bonding system

Method and apparatus for low temperature selective epitaxy in a dee...

Substrate treating apparatus having edge impedance control circuit

Substrate processing apparatus and substrate processing method

Heat treatment apparatus and heat treatment method

Substrate support and substrate processing apparatus

Substrate treating apparatus and substrate treating method

Wafer frame sorter and stocker

Plasma processing apparatus and mounting table thereof

Wafer processing apparatus and wafer processing method

Patents Applicationslast 30 patents

MULTI-SIZED SUBSTRATE FIXTURE

WAFER CHUCK ASSEMBLY

DEVICE AND METHOD FOR DETERMINING WAFER BOW

APPARATUS AND METHODS FOR REDUCING WAFER BACKSIDE DAMAGE

MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT

STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME

LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT

SUBSTRATE PROCESSING APPARATUS AND DETECTING METHOD OF TRAY TILTING

LIFTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRAT...

HEATING APPARATUS AND PRETREMENT METHOD FOR WAFER

SEMICONDUCTOR WAFER STORAGE DEVICE

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

SUBSTRATE LIFTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCL...

BACKSIDE IMPLANT FOR WAFER CURVATURE CONTROL

METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...

SYSTEMS AND METHODS FOR BOND TREATING AND CLEAVING OF SILICON WAFERS

SUBSTRATE-CARRIER STRUCTURE

SUBSTRATE HOLDER FOR USE IN LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

STAGE MOTION PROFILE SYSTEM AND METHOD

VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCE...

WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS

UNIT HANGING APPARATUS, OVERHEAD HOIST TRANSPORT, AND OVERHEAD HOIS...

VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPAR...

SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING

SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...

WAFER EDGE TILT AND ETCH RATE UNIFORMITY

APPARATUS FOR PROCESSING A WAFER

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

Method for Controlling Substrate Processing System and Substrate Pr...