using microwave discharges

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CPC
C23C16/511

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/511using microwave discharges

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Controlling exhaust gas pressure of a plasma reactor for plasma sta...
- Patent number 12,159,768
- Issue date Dec 3, 2024
- Recarbon, Inc.
- George Stephen Leonard
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Artificial diamond plasma production device
- Patent number 12,084,759
- Issue date Sep 10, 2024
- WAVE POWER TECHNOLOGY INC.
- Ming-Hsiung Tsao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and control method
- Patent number 12,068,208
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,060,641
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,046,453
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a diamond film
- Patent number 12,037,679
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Flim forming method of carbon-containing film by microwave plasma
- Patent number 12,018,375
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Singapore diamond preparation method
- Patent number 12,018,362
- Issue date Jun 25, 2024
- Shanghai Zhengshi Technology Co., Ltd.
- Weidong Man
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method of low temperature thin film deposition and in-si...
- Patent number 12,018,374
- Issue date Jun 25, 2024
- DSGI Technologies, Inc.
- Jeffrey Edward Kowalski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for forming graphene structure
- Patent number 12,014,907
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical system for monitoring plasma reactions and reactors
- Patent number 12,014,900
- Issue date Jun 18, 2024
- Recarbon, Inc.
- Curtis Peter Tom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alternating and continuous microwave fiber tow coating thermo-chemi...
- Patent number 12,000,049
- Issue date Jun 4, 2024
- RTX Corporation
- John J. Gangloff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing apparatus
- Patent number 11,996,270
- Issue date May 28, 2024
- Samsung Electronics Co., Ltd.
- Eunhee Jeang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and film forming method
- Patent number 11,972,929
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Makoto Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma chemical vapor deposition apparatus
- Patent number 11,956,884
- Issue date Apr 9, 2024
- Draka Comteq B.V.
- Igor Milicevic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
- Patent number 11,948,783
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma source, microwave plasma processing apparatus and...
- Patent number 11,942,308
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Yasuaki Taniike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for a treatment to deposit a barrier coating
- Patent number 11,898,241
- Issue date Feb 13, 2024
- INNOVATIVE SYSTEMS ET TECHNOLOGIES (ISYTECH)
- Nasser Beldi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,894,227
- Issue date Feb 6, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 11,881,384
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- James Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polycrystalline chemical vapour deposition synthetic diamond material
- Patent number 11,873,224
- Issue date Jan 16, 2024
- Element Six Technologies Limited
- Gruffudd Trefor Williams
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a coating on a yarn in a microwave field
- Patent number 11,858,859
- Issue date Jan 2, 2024
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
- Patent number 11,854,775
- Issue date Dec 26, 2023
- Board of Trustees of Michigan State University
- Timothy A. Grotjohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 11,837,465
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Jun Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PEALD titanium nitride with direct microwave plasma
- Patent number 11,823,870
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with local lorentz force
- Patent number 11,721,532
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
- Patent number 11,702,749
- Issue date Jul 18, 2023
- Board of Trustees of Michigan State University
- Jes Asmussen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 11,682,542
- Issue date Jun 20, 2023
- HITACHI HIGH-TECH CORPORATION
- Tooru Aramaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,664,205
- Issue date May 30, 2023
- Kokusai Electric Corporation
- Naofumi Ohashi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PLASMA CLEANING OF FUSED SILICA TUBES
- Publication number 20240363317
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTERNATING AND CONTINUOUS MICROWAVE FIBER TOW COATING THERMO-CHEMI...
- Publication number 20240301556
- Publication date Sep 12, 2024
- RTX Corporation
- John J. Gangloff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240254626
- Publication date Aug 1, 2024
- Tokyo Electron Limited
- Hiroki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCALABLE METHOD FOR ACHIEVING SHAPE CONTROL OF DIAMOND MICRO-NANOPA...
- Publication number 20240240311
- Publication date Jul 18, 2024
- Versitech Limited
- Zhiqin CHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
- Publication number 20240218502
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- TUERXUN AILIHUMAER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...
- Publication number 20240186118
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- JAMES CARDUCCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE
- Publication number 20240158910
- Publication date May 16, 2024
- Wuhan Youmeike Automation Co., Ltd
- Zhiwen KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...
- Publication number 20240162020
- Publication date May 16, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240120183
- Publication date Apr 11, 2024
- Tokyo Electron Limited
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA TREATMENT DEVICE
- Publication number 20240098866
- Publication date Mar 21, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Hideaki YAMADA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240047194
- Publication date Feb 8, 2024
- Tokyo Electron Limited
- Kenichi KOTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP FILL
- Publication number 20230399745
- Publication date Dec 14, 2023
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
- Publication number 20230392255
- Publication date Dec 7, 2023
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230386791
- Publication date Nov 30, 2023
- Tokyo Electron Limited
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR LARGE-SCALE PRODUCTION OF GRAPHENE
- Publication number 20230357017
- Publication date Nov 9, 2023
- Marius Andreassen Jakobsen
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...
- Publication number 20230323529
- Publication date Oct 12, 2023
- RHEINISCH-WESTFÄLISCHE TECHNISCHE HOCHSCHULE (RWTH) AACHEN KÖRPERSCHAFT DES Ö...
- Montgomery JARITZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230317421
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOSILOXANES AND FILMS MADE THEREWITH
- Publication number 20230279030
- Publication date Sep 7, 2023
- VERSUM MATERIALS US, LLC
- FORREST GLENN BROWN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A DIAMOND FILM
- Publication number 20230279540
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MPCVD DEVICE CAPABLE OF REALIZING EFFECTIVE DOPING
- Publication number 20230279549
- Publication date Sep 7, 2023
- Nanjing University
- Shulin Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECHARGEABLE BATTERY
- Publication number 20230275211
- Publication date Aug 31, 2023
- Nedertandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
- Wilhelmus Jozef SOPPE
- B82 - NANO-TECHNOLOGY
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230257871
- Publication date Aug 17, 2023
- Tokyo Electron Limited
- Takashi MATSUMOTO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Multi-port Phase Compensation Nested Microwave-plasma Apparatus for...
- Publication number 20230260756
- Publication date Aug 17, 2023
- Hangzhou Dianzi University
- Jie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
- Publication number 20230253186
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A COATING ON A YARN IN A MICROWAVE FIELD
- Publication number 20230242453
- Publication date Aug 3, 2023
- SAFRAN CERAMICS
- Arnaud DELEHOUZE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTIFICIAL DIAMOND PLASMA PRODUCTION DEVICE
- Publication number 20230220543
- Publication date Jul 13, 2023
- WAVE POWER TECHNOLOGY INC.
- Ming-Hsiung TSAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF GRAPHENE ON OPTICAL FI...
- Publication number 20230212743
- Publication date Jul 6, 2023
- California Institute of Technology
- Deepan Kishore Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTERNATING AND CONTINUOUS MICROWAVE FIBER TOW COATING THERMO-CHEMI...
- Publication number 20230193467
- Publication date Jun 22, 2023
- Raytheon Technologies Corporation
- John J. Gangloff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICALLY-FINISHED THIN DIAMOND SUBSTRATE OR WINDOW OF HIGH ASPECT...
- Publication number 20230193457
- Publication date Jun 22, 2023
- Wen-Qing XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using microwave discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Controlling exhaust gas pressure of a plasma reactor for plasma sta...

Artificial diamond plasma production device

Plasma processing apparatus and control method

Film forming method and film forming apparatus

Plasma processing apparatus

Method of forming a diamond film

Flim forming method of carbon-containing film by microwave plasma

Singapore diamond preparation method

System and method of low temperature thin film deposition and in-si...

Method and device for forming graphene structure

Optical system for monitoring plasma reactions and reactors

Alternating and continuous microwave fiber tow coating thermo-chemi...

Wafer processing apparatus

Processing apparatus and film forming method

Plasma chemical vapor deposition apparatus

Dynamic phased array plasma source for complete plasma coverage of...

Microwave plasma source, microwave plasma processing apparatus and...

Method for a treatment to deposit a barrier coating

Conformal deposition of silicon carbide films

Monolithic modular microwave source with integrated process gas dis...

Polycrystalline chemical vapour deposition synthetic diamond material

Modular reactor for microwave plasma-assisted deposition

Method for depositing a coating on a yarn in a microwave field

Methods and apparatus for microwave plasma assisted chemical vapor...

Deposition method

PEALD titanium nitride with direct microwave plasma

Modular microwave source with local lorentz force

Methods and apparatus for microwave plasma assisted chemical vapor...

Plasma processing device

Substrate processing apparatus

Patents Applicationslast 30 patents

METHOD OF PLASMA CLEANING OF FUSED SILICA TUBES

ALTERNATING AND CONTINUOUS MICROWAVE FIBER TOW COATING THERMO-CHEMI...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SCALABLE METHOD FOR ACHIEVING SHAPE CONTROL OF DIAMOND MICRO-NANOPA...

PLASMA-ENHANCED MOLYBDENUM DEPOSITION

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE

Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MICROWAVE PLASMA TREATMENT DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHODS AND APPARATUSES FOR FLOWABLE GAP FILL

Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...

PLASMA PROCESSING APPARATUS

APPARATUS AND METHOD FOR LARGE-SCALE PRODUCTION OF GRAPHENE

METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...

PLASMA PROCESSING APPARATUS

CYCLOSILOXANES AND FILMS MADE THEREWITH

METHOD OF FORMING A DIAMOND FILM

MPCVD DEVICE CAPABLE OF REALIZING EFFECTIVE DOPING

RECHARGEABLE BATTERY

FILM FORMING METHOD AND FILM FORMING APPARATUS

Multi-port Phase Compensation Nested Microwave-plasma Apparatus for...

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

METHOD FOR DEPOSITING A COATING ON A YARN IN A MICROWAVE FIELD

ARTIFICIAL DIAMOND PLASMA PRODUCTION DEVICE

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF GRAPHENE ON OPTICAL FI...

ALTERNATING AND CONTINUOUS MICROWAVE FIBER TOW COATING THERMO-CHEMI...

OPTICALLY-FINISHED THIN DIAMOND SUBSTRATE OR WINDOW OF HIGH ASPECT...