using microwave discharges

Industry

CPC
C23C16/511

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/511using microwave discharges

Industries

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 12,338,532
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to create hydrophilic antimicrobial diamond coating
- Patent number 12,325,660
- Issue date Jun 10, 2025
- United States Department of Energy
- Anirudha V. Sumant
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
System for growth of one or more crystalline materials
- Patent number 12,322,574
- Issue date Jun 3, 2025
- Sigma Carbon Technologies
- Tarun Sharda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma treatment device
- Patent number 12,324,085
- Issue date Jun 3, 2025
- National Institute of Advanced Industrial Science and Technology
- Hideaki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor deposition of graphene on optical fi...
- Patent number 12,312,680
- Issue date May 27, 2025
- California Institute of Technology
- Deepan Kishore Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Siloxane compositions and methods for using the compositions to dep...
- Patent number 12,312,684
- Issue date May 27, 2025
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing N-doped carbon nanomesh
- Patent number 12,312,679
- Issue date May 27, 2025
- Joz̃Stefan Institute
- Miran Mozetic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of low temperature plasma enhanced chemical va...
- Patent number 12,300,497
- Issue date May 13, 2025
- Applied Materials, Inc.
- Thai Cheng Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,300,523
- Issue date May 13, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 12,272,547
- Issue date Apr 8, 2025
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optically-finished thin diamond substrate or window of high aspect...
- Patent number 12,209,306
- Issue date Jan 28, 2025
- II-VI DELAWARE, INC.
- Wen-Qing Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming nanocrystalline graphene
- Patent number 12,211,744
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Keunwook Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,205,800
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflection mode dynode
- Patent number 12,198,915
- Issue date Jan 14, 2025
- ADAPTAS SOLUTIONS PTY LTD
- Toby Shanley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 12,191,118
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- James Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling exhaust gas pressure of a plasma reactor for plasma sta...
- Patent number 12,159,768
- Issue date Dec 3, 2024
- Recarbon, Inc.
- George Stephen Leonard
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Artificial diamond plasma production device
- Patent number 12,084,759
- Issue date Sep 10, 2024
- WAVE POWER TECHNOLOGY INC.
- Ming-Hsiung Tsao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and control method
- Patent number 12,068,208
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,060,641
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,046,453
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a diamond film
- Patent number 12,037,679
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Flim forming method of carbon-containing film by microwave plasma
- Patent number 12,018,375
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Singapore diamond preparation method
- Patent number 12,018,362
- Issue date Jun 25, 2024
- Shanghai Zhengshi Technology Co., Ltd.
- Weidong Man
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method of low temperature thin film deposition and in-si...
- Patent number 12,018,374
- Issue date Jun 25, 2024
- DSGI Technologies, Inc.
- Jeffrey Edward Kowalski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for forming graphene structure
- Patent number 12,014,907
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Ryota Ifuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical system for monitoring plasma reactions and reactors
- Patent number 12,014,900
- Issue date Jun 18, 2024
- Recarbon, Inc.
- Curtis Peter Tom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alternating and continuous microwave fiber tow coating thermo-chemi...
- Patent number 12,000,049
- Issue date Jun 4, 2024
- RTX Corporation
- John J. Gangloff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing apparatus
- Patent number 11,996,270
- Issue date May 28, 2024
- Samsung Electronics Co., Ltd.
- Eunhee Jeang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and film forming method
- Patent number 11,972,929
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Makoto Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma chemical vapor deposition apparatus
- Patent number 11,956,884
- Issue date Apr 9, 2024
- Draka Comteq B.V.
- Igor Milicevic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING SYSTEM
- Publication number 20250207261
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20250210344
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Rio SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Treatment Device, Fluid Activation Device, Substrate Trea...
- Publication number 20250179630
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Yusuke KUBOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for Plasma Enhanced Chemical Vapour Deposition
- Publication number 20250179643
- Publication date Jun 5, 2025
- LEYDENJAR TECHNOLOGIES B.V.
- Pavel Kudlacek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING TECHNOLOGY FOR PLASTIC CONTAINERS
- Publication number 20250163231
- Publication date May 22, 2025
- Ionkraft GmbH
- Montgomery JARITZ
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SILICON NITRIDE FILM FORMATION METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250154649
- Publication date May 15, 2025
- TOKYO ELECTRON LIMITED
- Kenichi KOTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE OF ENERGY STORAGE ELEMENT AND MANUFACTURING METHOD THEREOF
- Publication number 20250157746
- Publication date May 15, 2025
- Industrial Technology Research Institute
- Hung-Hsin Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microwave Capillary Nanodiamond Reactor
- Publication number 20250101577
- Publication date Mar 27, 2025
- Board of Trustees of Michigan State University
- Tanvi NIKHAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION OF NANOCRYSTALLINE DIAMO...
- Publication number 20250043413
- Publication date Feb 6, 2025
- Sze Chieh Yvonne Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE APPARATUS AND METHOD FOR PRODUCTION OF CARBON MATERIALS
- Publication number 20250019241
- Publication date Jan 16, 2025
- 6K Inc.
- Jared Majcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PLASMA CLEANING OF FUSED SILICA TUBES
- Publication number 20240363317
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTERNATING AND CONTINUOUS MICROWAVE FIBER TOW COATING THERMO-CHEMI...
- Publication number 20240301556
- Publication date Sep 12, 2024
- RTX Corporation
- John J. Gangloff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240254626
- Publication date Aug 1, 2024
- Tokyo Electron Limited
- Hiroki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCALABLE METHOD FOR ACHIEVING SHAPE CONTROL OF DIAMOND MICRO-NANOPA...
- Publication number 20240240311
- Publication date Jul 18, 2024
- Versitech Limited
- Zhiqin CHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
- Publication number 20240218502
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- TUERXUN AILIHUMAER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...
- Publication number 20240186118
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- JAMES CARDUCCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE
- Publication number 20240158910
- Publication date May 16, 2024
- Wuhan Youmeike Automation Co., Ltd
- Zhiwen KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...
- Publication number 20240162020
- Publication date May 16, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240120183
- Publication date Apr 11, 2024
- Tokyo Electron Limited
- Makoto WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA TREATMENT DEVICE
- Publication number 20240098866
- Publication date Mar 21, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Hideaki YAMADA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240047194
- Publication date Feb 8, 2024
- Tokyo Electron Limited
- Kenichi KOTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP FILL
- Publication number 20230399745
- Publication date Dec 14, 2023
- ASM IP HOLDING B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
- Publication number 20230392255
- Publication date Dec 7, 2023
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230386791
- Publication date Nov 30, 2023
- Tokyo Electron Limited
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR LARGE-SCALE PRODUCTION OF GRAPHENE
- Publication number 20230357017
- Publication date Nov 9, 2023
- Marius Andreassen Jakobsen
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...
- Publication number 20230323529
- Publication date Oct 12, 2023
- RHEINISCH-WESTFÄLISCHE TECHNISCHE HOCHSCHULE (RWTH) AACHEN KÖRPERSCHAFT DES Ö...
- Montgomery JARITZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230317421
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOSILOXANES AND FILMS MADE THEREWITH
- Publication number 20230279030
- Publication date Sep 7, 2023
- VERSUM MATERIALS US, LLC
- FORREST GLENN BROWN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A DIAMOND FILM
- Publication number 20230279540
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using microwave discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing method and plasma processing apparatus

Method to create hydrophilic antimicrobial diamond coating

System for growth of one or more crystalline materials

Microwave plasma treatment device

Plasma enhanced chemical vapor deposition of graphene on optical fi...

Siloxane compositions and methods for using the compositions to dep...

Method for producing N-doped carbon nanomesh

Method and apparatus of low temperature plasma enhanced chemical va...

Substrate processing apparatus and method

Conformal deposition of silicon carbide films

Optically-finished thin diamond substrate or window of high aspect...

Method of forming nanocrystalline graphene

Plasma processing apparatus and plasma processing method

Reflection mode dynode

Monolithic modular microwave source with integrated process gas dis...

Controlling exhaust gas pressure of a plasma reactor for plasma sta...

Artificial diamond plasma production device

Plasma processing apparatus and control method

Film forming method and film forming apparatus

Plasma processing apparatus

Method of forming a diamond film

Flim forming method of carbon-containing film by microwave plasma

Singapore diamond preparation method

System and method of low temperature thin film deposition and in-si...

Method and device for forming graphene structure

Optical system for monitoring plasma reactions and reactors

Alternating and continuous microwave fiber tow coating thermo-chemi...

Wafer processing apparatus

Processing apparatus and film forming method

Plasma chemical vapor deposition apparatus

Patents Applicationslast 30 patents

FILM FORMING METHOD AND FILM FORMING SYSTEM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

Substrate Treatment Device, Fluid Activation Device, Substrate Trea...

Apparatus and Method for Plasma Enhanced Chemical Vapour Deposition

COATING TECHNOLOGY FOR PLASTIC CONTAINERS

SILICON NITRIDE FILM FORMATION METHOD AND PLASMA PROCESSING APPARATUS

ELECTRODE OF ENERGY STORAGE ELEMENT AND MANUFACTURING METHOD THEREOF

Microwave Capillary Nanodiamond Reactor

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION OF NANOCRYSTALLINE DIAMO...

MICROWAVE APPARATUS AND METHOD FOR PRODUCTION OF CARBON MATERIALS

METHOD OF PLASMA CLEANING OF FUSED SILICA TUBES

ALTERNATING AND CONTINUOUS MICROWAVE FIBER TOW COATING THERMO-CHEMI...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SCALABLE METHOD FOR ACHIEVING SHAPE CONTROL OF DIAMOND MICRO-NANOPA...

PLASMA-ENHANCED MOLYBDENUM DEPOSITION

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE

Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MICROWAVE PLASMA TREATMENT DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHODS AND APPARATUSES FOR FLOWABLE GAP FILL

Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...

PLASMA PROCESSING APPARATUS

APPARATUS AND METHOD FOR LARGE-SCALE PRODUCTION OF GRAPHENE

METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...

PLASMA PROCESSING APPARATUS

CYCLOSILOXANES AND FILMS MADE THEREWITH

METHOD OF FORMING A DIAMOND FILM