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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/681
using optical controlling means
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Patents Grants
last 30 patents
Information
Patent Grant
Fluxless gang die bonding arrangement
Patent number
11,972,968
Issue date
Apr 30, 2024
SHARPACK TECHNOLOGY PTE. LTD.
Jian Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for substrate transport apparatus position com...
Patent number
11,972,965
Issue date
Apr 30, 2024
BROOKS AUTOMATION US, LLC
Jairo T. Moura
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Laser alignment fixture for a reactor system
Patent number
11,972,969
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Surojit Ganguli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reducing device overlay errors
Patent number
11,971,664
Issue date
Apr 30, 2024
KLA-Tencor Corporation
Liran Yerushalmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bridge apparatus and method for semiconductor die transfer
Patent number
11,967,515
Issue date
Apr 23, 2024
Rohinni, Inc.
Andrew Huska
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for III-v/silicon hybrid integration
Patent number
11,953,728
Issue date
Apr 9, 2024
Rockley Photonics Limited
Guomin Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive focusing and transport system for electroplating
Patent number
11,942,341
Issue date
Mar 26, 2024
ASMPT NEXX, INC.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer notch positioning detection
Patent number
11,942,348
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-An Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration jig and calibration method
Patent number
11,935,773
Issue date
Mar 19, 2024
Applied Materials, Inc.
Andrew Myles
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
Patent number
11,935,775
Issue date
Mar 19, 2024
Kioxia Corporation
Satoshi Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer pre-aligner and method of pre-aligning wafer
Patent number
11,929,277
Issue date
Mar 12, 2024
Kabushiki Kaisha Yaskawa Denki
John Charles Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for mounting components on a substrate
Patent number
11,924,974
Issue date
Mar 5, 2024
Besi Switzerland AG
Norbert Bilewicz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Positioning apparatus, processing system, and positioning method
Patent number
11,923,232
Issue date
Mar 5, 2024
Tokyo Electron Limited
Toshiaki Toyomaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic teaching of substrate handling for production and process...
Patent number
11,908,722
Issue date
Feb 20, 2024
KLA Corporation
Avner Safrani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon handler with laser-release layers
Patent number
11,908,723
Issue date
Feb 20, 2024
International Business Machines Corporation
Akihiro Horibe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for measuring placement of a substrate on a he...
Patent number
11,908,724
Issue date
Feb 20, 2024
Applied Materials, Inc.
Charles G. Potter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate inspection system and method of use thereof
Patent number
11,901,202
Issue date
Feb 13, 2024
JNK TECH
Youngjin Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for substrate alignment
Patent number
11,894,253
Issue date
Feb 6, 2024
BROOKS AUTOMATION US, LLC
Caspar Hansen
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Adaptive focusing and transport system for electroplating
Patent number
11,887,874
Issue date
Jan 30, 2024
ASMPT NEXX, INC.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Component handler
Patent number
11,887,876
Issue date
Jan 30, 2024
Semiconductor Technologies & Instruments Pte Ltd
Chin Fong Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated wafer bow measurements
Patent number
11,885,750
Issue date
Jan 30, 2024
Lam Research Corporation
Rajan Arora
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for manufacturing display device
Patent number
11,881,538
Issue date
Jan 23, 2024
Samsung Display Co., Ltd.
Cheol Ku Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device, apparatus, and method for semiconductor transfer
Patent number
11,862,502
Issue date
Jan 2, 2024
CHONGQING KONKA PHOTOELECTRIC TECHNOLOGY RESEARCH INSTITUTE CO., LTD.
Qiyuan Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiplexing control of multiple positional sensors in device manuf...
Patent number
11,862,499
Issue date
Jan 2, 2024
Applied Materials, Inc.
Kiyki-Shiy Shang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing control method, substrate processing apparatus...
Patent number
11,862,496
Issue date
Jan 2, 2024
Tokyo Electron Limited
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer positioning method and apparatus
Patent number
11,854,853
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Patterning a transparent wafer to form an alignment mark in the tra...
Patent number
11,854,999
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Xin-Hua Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for calibrating alignment of wafer and lithography system
Patent number
11,854,854
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Jen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate inspection system and a method of use thereof
Patent number
11,840,762
Issue date
Dec 12, 2023
JNK TECH
Youngjin Choi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20240145277
Publication date
May 2, 2024
EBARA CORPORATION
Yosuke NAGASAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOAD LOCK CHAMBER AND APPARATUS FOR TREATING SUBSTRATE
Publication number
20240136210
Publication date
Apr 25, 2024
PSK INC.
Jong-Chan LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERHEAD TRANSPORT VEHICLE
Publication number
20240128113
Publication date
Apr 18, 2024
MURATA MACHINERY, LTD.
Yuji SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED OPTICAL SENSOR CONTROLLER FOR DEVICEMANUFACTURING MACHINES
Publication number
20240128114
Publication date
Apr 18, 2024
Applied Materials, Inc.
Kiyki-Shiy Shang
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
OVERLAY MEASUREMENT DEVICE AND METHOD, AND SYSTEM AND PROGRAM THEREFOR
Publication number
20240128112
Publication date
Apr 18, 2024
AUROS TECHNOLOGY, INC.
Sol-Lee HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HANDLING APPARATUS AND METHOD OF HANDLING SUBSTRATE
Publication number
20240120227
Publication date
Apr 11, 2024
KAWASAKI JUKOGYO KABUSHIKI KAISHA
Haruhiko TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD
Publication number
20240120228
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Isamu TAODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING DEVICE
Publication number
20240112929
Publication date
Apr 4, 2024
YAMAHA HATSUDOKI KABUSHIKI KAISHA
Yoshikuni SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ALIGNING WAFER USING LASER SCANNER, SEMICO...
Publication number
20240112938
Publication date
Apr 4, 2024
SEMES CO., LTD.
Hee Jae BYUN
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE INSPECTION SYSTEM AND A METHOD OF USE THEREOF
Publication number
20240102169
Publication date
Mar 28, 2024
JNK TECH
Youngjin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND IMAGE CORRECTION METHOD
Publication number
20240105487
Publication date
Mar 28, 2024
TOKYO ELECTRON LIMITED
Isamu TAODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL DEVICE, DIE BONDING SYSTEM, AND DIE BONDING METHOD
Publication number
20240105524
Publication date
Mar 28, 2024
Samsung Electronics Co., Ltd.
Hyungjin KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Automatic Alignment Of Overhead Transport Vehicles To Load Ports Of...
Publication number
20240096676
Publication date
Mar 21, 2024
Skylla Technologies, Inc.
Kota Weaver
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
Publication number
20240094144
Publication date
Mar 21, 2024
LAM RESEARCH CORPORATION
Rajan Arora
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer Positioning Method and Apparatus
Publication number
20240096677
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Cheng Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
Publication number
20240087928
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Toyohisa TSURUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
Publication number
20240087938
Publication date
Mar 14, 2024
BROOKS AUTOMATION US, LLC
Alexander KRUPYSHEV
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240087937
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Naoki Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
Publication number
20240087936
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Toshiaki KODAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY AND PROCESS CONTROL FOR SEMICONDUCTOR MANUFACTURING
Publication number
20240078450
Publication date
Mar 7, 2024
NOVA LTD
EITAN ROTHSTEIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR PUF GENERATION USING VARIATIONS IN TRANSISTOR THRESHOLD...
Publication number
20240079257
Publication date
Mar 7, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Shih-Lien Linus Lu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
DEVICE AND METHOD FOR IMPROVED FIDUCIAL MARKER DETECTION
Publication number
20240078702
Publication date
Mar 7, 2024
Intel Corporation
Yi LI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR CHIP ALIGNMENT APPARATUS AND METHOD FOR PACKAGING
Publication number
20240079258
Publication date
Mar 7, 2024
Korea Atomic Energy Research Institute
Chang Goo KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
Publication number
20240047254
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING SYSTEM
Publication number
20240047257
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Yoshitaka Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGE SUBSTRATE WITH A SMOOTH GROOVE ABOUT A PERIME...
Publication number
20240047381
Publication date
Feb 8, 2024
TEXAS INSTRUMENTS INCORPORATED
ChienHao Wang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT
Publication number
20240035162
Publication date
Feb 1, 2024
Applied Materials, Inc.
Zhepeng CONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
Publication number
20240021458
Publication date
Jan 18, 2024
Applied Materials, Inc.
Nicholas Michael Bergantz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STACKED SUBSTRATE MANUFACTURING METHOD, STACKED SUBSTRATE MANUFACTU...
Publication number
20240021447
Publication date
Jan 18, 2024
Nikon Corporation
Isao SUGAYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
Publication number
20240014060
Publication date
Jan 11, 2024
Samsung Electronics Co., Ltd.
Daejung Kim
G06 - COMPUTING CALCULATING COUNTING