using optical methods

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CPC
C23C14/547

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/547using optical methods

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Deposition of non-stoichiometric metal compound layer
- Patent number 12,351,901
- Issue date Jul 8, 2025
- SOLERAS ADVANCED COATINGS BV
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ wafer thickness and gap monitoring using through beam laser...
- Patent number 12,332,042
- Issue date Jun 17, 2025
- Lam Research Corporation
- Goon Heng Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method to map thickness variations of substrates in manu...
- Patent number 12,276,490
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for producing layers with improved uniformity in...
- Patent number 12,258,661
- Issue date Mar 25, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Michael Vergöhl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for in-situ chamber monitoring
- Patent number 12,252,779
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sanitary equipment part
- Patent number 12,221,690
- Issue date Feb 11, 2025
- Toto Ltd.
- Yuya Suzuki
- B32 - LAYERED PRODUCTS
Information Patent Grant
Deposition system and method
- Patent number 12,211,756
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cover with a sensor system for a configurable measuring system for...
- Patent number 12,183,561
- Issue date Dec 31, 2024
- SOLERAS ADVANCED COATINGS BV
- Ivan Van De Putte
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming position misalignment correction method and film formi...
- Patent number 12,180,580
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Digital holography for alignment in layer deposition
- Patent number 12,163,783
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate rotating apparatus
- Patent number 12,152,297
- Issue date Nov 26, 2024
- Santec Holdings Corporation
- Noboru Uehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sanitary equipment part
- Patent number 12,000,035
- Issue date Jun 4, 2024
- Toto Ltd.
- Yui Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film thickness measuring apparatus and film thickness measuring met...
- Patent number 11,939,665
- Issue date Mar 26, 2024
- Tokyo Electron Limted
- Masato Shinada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition system and method
- Patent number 11,823,964
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing coated substrates
- Patent number 11,814,718
- Issue date Nov 14, 2023
- Bühler Alzenau GmbH
- Jürgen Pistner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and a device for automatically determining adjustment values...
- Patent number 11,739,417
- Issue date Aug 29, 2023
- Saint-Gobain Glass France
- Yohan Faucillon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating control using forward parameter correction and adapted reve...
- Patent number 11,692,263
- Issue date Jul 4, 2023
- Viavi Solutions Inc.
- Zhao Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical monitor
- Patent number 11,542,596
- Issue date Jan 3, 2023
- Viavi Solutions Inc.
- Markus K. Tilsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Broadband optical monitoring
- Patent number 11,377,728
- Issue date Jul 5, 2022
- EVATEC AG
- Stephan Waldner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation mask, OLED panel and system, and evaporation monitoring...
- Patent number 11,374,173
- Issue date Jun 28, 2022
- Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Mingxing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing optical film
- Patent number 11,306,392
- Issue date Apr 19, 2022
- Nitto Denko Corporation
- Shunsuke Shuto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Determining temperature dependence of complex refractive indices of...
- Patent number 11,274,365
- Issue date Mar 15, 2022
- Halliburton Energy Services, Inc.
- David L. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method for multilayer film
- Patent number 11,066,741
- Issue date Jul 20, 2021
- Nitto Denko Corporation
- Satoru Saki
- G01 - MEASURING TESTING
Information Patent Grant
Fabrication of integrated computational elements using cylindrical...
- Patent number 11,066,740
- Issue date Jul 20, 2021
- Halliburton Energy Services, Inc.
- David L. Perkins
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for monitoring atomic absorption during a surface...
- Patent number 10,976,242
- Issue date Apr 13, 2021
- Accustrata, Inc.
- George Atanasoff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real-time monitoring of fabrication of integrated computational ele...
- Patent number 10,914,863
- Issue date Feb 9, 2021
- Halliburton Energy Services, Inc.
- James M. Price
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods to improve optical spectrum fidelity in integra...
- Patent number 10,774,418
- Issue date Sep 15, 2020
- Halliburton Energy Services, Inc.
- Aditya B. Nayak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of critical layers of integrated computational elements
- Patent number 10,496,776
- Issue date Dec 3, 2019
- Halliburton Energy Services, Inc.
- David L. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Growth-rate measuring apparatus and growth-rate detection method
- Patent number 10,488,334
- Issue date Nov 26, 2019
- NUFLARE TECHNOLOGY, INC.
- Yasushi Iyechika
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES IN MANU...
- Publication number 20250224228
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- Gyu Chul Yi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION CONTROL DEVICE, FILM FORMATION DEVICE AND FILM FORMA...
- Publication number 20240368751
- Publication date Nov 7, 2024
- Shincron Co., LTD
- Yoshiyuki OHTAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...
- Publication number 20240318302
- Publication date Sep 26, 2024
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Cunding LIU
- G01 - MEASURING TESTING
Information Patent Application
CYLINDRIC DECOMPOSITION FOR EFFICIENT MITIGATION OF SUBSTRATE DEFOR...
- Publication number 20240266231
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Wonjae Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240229228
- Publication date Jul 11, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DAYTIME RADIATIVE DEVICE
- Publication number 20240230972
- Publication date Jul 11, 2024
- Centre National de la Recherche Scientifique
- Julien CARDIN
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
IN-SITU WAFER THICKNESS AND GAP MONITORING USING THROUGH BEAM LASER...
- Publication number 20240210163
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Goon Heng WONG
- G01 - MEASURING TESTING
Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240133025
- Publication date Apr 25, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ROTATING APPARATUS
- Publication number 20240093358
- Publication date Mar 21, 2024
- SANTEC CORPORATION
- Noboru UEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES
- Publication number 20240076774
- Publication date Mar 7, 2024
- CARL ZEISS VISION INTERNATIONAL GMBH
- Daragh Murphy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING POSITION MISALIGNMENT CORRECTION METHOD AND FILM FORMI...
- Publication number 20240011148
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230386942
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230357916
- Publication date Nov 9, 2023
- GLOBALWAFERS CO., LTD.
- PO-JUNG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and device for measuring the thickness of thin films even on...
- Publication number 20230282526
- Publication date Sep 7, 2023
- Fyzikální ústav AV CR, v. v. i.
- MARTIN LEDINSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...
- Publication number 20230137506
- Publication date May 4, 2023
- Applied Materials, Inc.
- Thomas DEPPISCH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...
- Publication number 20230067917
- Publication date Mar 2, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SANITARY EQUIPMENT PART
- Publication number 20230012781
- Publication date Jan 19, 2023
- TOTO LTD.
- Yuya SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SANITARY EQUIPMENT PART
- Publication number 20230017857
- Publication date Jan 19, 2023
- TOTO LTD.
- Yui NODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...
- Publication number 20230011748
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...
- Publication number 20220403504
- Publication date Dec 22, 2022
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Cunding LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR FASTENING OPTICAL COMPONENTS
- Publication number 20220389563
- Publication date Dec 8, 2022
- SAFRAN ELECTRONICS & DEFENSE
- Joël FLEURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20220349088
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20220336297
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING CONTROL USING FORWARD PARAMETER CORRECTION AND ADAPTED REVE...
- Publication number 20210332474
- Publication date Oct 28, 2021
- VIAVI Solutions Inc.
- Zhao YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION MASK, OLED PANEL AND SYSTEM, AND EVAPORATION MONITORING...
- Publication number 20210336146
- Publication date Oct 28, 2021
- KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD.
- Mingxing LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...
- Publication number 20210285096
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for In-Situ Chamber Monitoring
- Publication number 20210164093
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...
- Publication number 20210164092
- Publication date Jun 3, 2021
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using optical methods

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition of non-stoichiometric metal compound layer

In-situ wafer thickness and gap monitoring using through beam laser...

System and method to map thickness variations of substrates in manu...

Device and method for producing layers with improved uniformity in...

Methods for in-situ chamber monitoring

Sanitary equipment part

Deposition system and method

Cover with a sensor system for a configurable measuring system for...

Film forming position misalignment correction method and film formi...

Digital holography for alignment in layer deposition

Substrate rotating apparatus

In-situ film growth rate monitoring apparatus, systems, and methods...

Sanitary equipment part

Film thickness measuring apparatus and film thickness measuring met...

Deposition system and method

Method for producing coated substrates

Method and a device for automatically determining adjustment values...

Coating control using forward parameter correction and adapted reve...

Optical monitor

Broadband optical monitoring

Evaporation mask, OLED panel and system, and evaporation monitoring...

Method for producing optical film

Determining temperature dependence of complex refractive indices of...

Film formation method for multilayer film

Fabrication of integrated computational elements using cylindrical...

System and method for monitoring atomic absorption during a surface...

Real-time monitoring of fabrication of integrated computational ele...

Systems and methods to improve optical spectrum fidelity in integra...

Fabrication of critical layers of integrated computational elements

Growth-rate measuring apparatus and growth-rate detection method

Patents Applicationslast 30 patents

SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES IN MANU...

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

FILM FORMATION CONTROL DEVICE, FILM FORMATION DEVICE AND FILM FORMA...

OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...

CYLINDRIC DECOMPOSITION FOR EFFICIENT MITIGATION OF SUBSTRATE DEFOR...

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

DAYTIME RADIATIVE DEVICE

IN-SITU WAFER THICKNESS AND GAP MONITORING USING THROUGH BEAM LASER...

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

SUBSTRATE ROTATING APPARATUS

METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES

FILM FORMING POSITION MISALIGNMENT CORRECTION METHOD AND FILM FORMI...

DEPOSITION SYSTEM AND METHOD

EPITAXIAL STRUCTURE AND METHOD OF MANUFACTURING THE SAME

Method and device for measuring the thickness of thin films even on...

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...

DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...

SANITARY EQUIPMENT PART

SANITARY EQUIPMENT PART

SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...

OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...

SYSTEM FOR FASTENING OPTICAL COMPONENTS

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

DEPOSITION SYSTEM AND METHOD

COATING CONTROL USING FORWARD PARAMETER CORRECTION AND ADAPTED REVE...

EVAPORATION MASK, OLED PANEL AND SYSTEM, AND EVAPORATION MONITORING...

FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...

Methods for In-Situ Chamber Monitoring

DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...