using planar vibrating masses driven in a translation vibration along an axis

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G01C19/5719

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GPHYSICS G01Measuring instruments G01CMEASURING DISTANCES, LEVELS OR BEARINGS SURVEYING NAVIGATION GYROSCOPIC INSTRUMENTS PHOTOGRAMMETRY OR VIDEOGRAMMETRY G01C19/00Gyroscopes Turn-sensitive devices using vibrating masses Turn-sensitive devices without moving masses Measuring angular rate using gyroscopic effects

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G01C19/5719using planar vibrating masses driven in a translation vibration along an axis

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Three-axis rotation rate sensor including a substrate and a double...
- Patent number 11,846,509
- Issue date Dec 19, 2023
- Robert Bosch GmbH
- Jochen Reinmuth
- G01 - MEASURING TESTING
Information Patent Grant
Vibration rectification error correction circuit, physical quantity...
- Patent number 11,808,572
- Issue date Nov 7, 2023
- Seiko Epson Corporation
- Masayoshi Todorokihara
- G01 - MEASURING TESTING
Information Patent Grant
3-axis gyroscope with rotational vibration rejection
- Patent number 11,774,244
- Issue date Oct 3, 2023
- Analog Devices, Inc.
- Jeffrey A. Gregory
- G01 - MEASURING TESTING
Information Patent Grant
MEMS gyroscope self-test using a technique for deflection of the se...
- Patent number 11,719,540
- Issue date Aug 8, 2023
- STMicroelectronics, Inc.
- Yamu Hu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Inertial sensor, electronic apparatus, and vehicle
- Patent number 11,714,101
- Issue date Aug 1, 2023
- Seiko Epson Corporation
- Teruo Takizawa
- G01 - MEASURING TESTING
Information Patent Grant
Fused quartz dual shell resonator and method of fabrication
- Patent number 11,703,330
- Issue date Jul 18, 2023
- The Regents of the University of California
- Andrei M. Shkel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-mass MEMS motion sensor
- Patent number 11,674,803
- Issue date Jun 13, 2023
- Motion Engine, Inc.
- Robert Mark Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Demodulation phase calibration using external input
- Patent number 11,650,078
- Issue date May 16, 2023
- Invensense, Inc.
- Doruk Senkal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for sensor configuration
- Patent number 11,566,899
- Issue date Jan 31, 2023
- Karthik Katingari
- G01 - MEASURING TESTING
Information Patent Grant
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...
- Patent number 11,566,898
- Issue date Jan 31, 2023
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial navigation system
- Patent number 11,561,098
- Issue date Jan 24, 2023
- ATLANTIC INERTIAL SYSTEMS, LIMITED
- Geoffrey Thomas Henderson
- G01 - MEASURING TESTING
Information Patent Grant
Angular rate sensor
- Patent number 11,512,958
- Issue date Nov 29, 2022
- Sumitomo Precision Products Co., Ltd.
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration gyroscope
- Patent number 11,397,084
- Issue date Jul 26, 2022
- Denso Corporation
- Motohiro Fujiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for bias suppression in a non-degenerate MEMS s...
- Patent number 11,390,517
- Issue date Jul 19, 2022
- Honeywell International Inc.
- Daniel Endean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Demodulation phase calibration using external input
- Patent number 11,365,983
- Issue date Jun 21, 2022
- Invensense, Inc.
- Doruk Senkal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing thereof
- Patent number 11,358,858
- Issue date Jun 14, 2022
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Amir Rahafrooz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrator device, electronic apparatus, and vehicle
- Patent number 11,340,070
- Issue date May 24, 2022
- Seiko Epson Corporation
- Ryuta Nishizawa
- G01 - MEASURING TESTING
Information Patent Grant
MEMS gyroscope self-test using a technique for deflection of the se...
- Patent number 11,255,670
- Issue date Feb 22, 2022
- STMicroelectronics, Inc.
- Yamu Hu
- G01 - MEASURING TESTING
Information Patent Grant
Rotation-rate sensor, method for manufacturing a rotation-rate sensor
- Patent number 11,248,909
- Issue date Feb 15, 2022
- Robert Bosch GmbH
- Robert Ramsperger
- G01 - MEASURING TESTING
Information Patent Grant
Noise performance for vibrating structure gyroscopes
- Patent number 11,221,218
- Issue date Jan 11, 2022
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- G01 - MEASURING TESTING
Information Patent Grant
Resonator configured to be integrated into an inertial angular sensor
- Patent number 11,215,456
- Issue date Jan 4, 2022
- SAFRAN
- Philippe Onfroy
- G01 - MEASURING TESTING
Information Patent Grant
3-axis gyroscope with rotational vibration rejection
- Patent number 11,193,771
- Issue date Dec 7, 2021
- Analog Devices, Inc.
- Jeffrey A. Gregory
- G01 - MEASURING TESTING
Information Patent Grant
Inertial sensor, electronic device, and vehicle
- Patent number 11,181,547
- Issue date Nov 23, 2021
- Seiko Epson Corporation
- Makoto Furuhata
- G01 - MEASURING TESTING
Information Patent Grant
MEMS gyroscope start-up process and circuit
- Patent number 11,162,790
- Issue date Nov 2, 2021
- STMicroelectronics, Inc.
- Deyou Fang
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring a behavior of a MEMS device
- Patent number 11,137,253
- Issue date Oct 5, 2021
- TDK Corporation
- Andreas Barbul
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, composite sensor, inertial measurement un...
- Patent number 11,105,629
- Issue date Aug 31, 2021
- Seiko Epson Corporation
- Tatsuro Torimoto
- G01 - MEASURING TESTING
Information Patent Grant
Vibration device and method for controlling the same
- Patent number 11,092,440
- Issue date Aug 17, 2021
- Kabushikikaisha Toshiba
- Ryunosuke Gando
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical gyroscope with rejection of disturbances and...
- Patent number 11,085,769
- Issue date Aug 10, 2021
- STMicroelectronics S.r.l.
- Carlo Valzasina
- G01 - MEASURING TESTING
Information Patent Grant
Proof mass offset compensation
- Patent number 11,009,350
- Issue date May 18, 2021
- Invensense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating micro-mechanical sensor of angular velocity
- Patent number 10,996,056
- Issue date May 4, 2021
- Murata Manufacturing Co., Ltd.
- Yoshitaka Kato
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MULTI-MASS MEMS MOTION SENSOR
- Publication number 20240230332
- Publication date Jul 11, 2024
- Motion Engine, Inc.
- Robert Mark Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
- Publication number 20240125599
- Publication date Apr 18, 2024
- The Regents of the University of California
- Andrei M. SHKEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEMODULATION PHASE CALIBRATION USING EXTERNAL INPUT
- Publication number 20220326045
- Publication date Oct 13, 2022
- InvenSense, Inc.
- Doruk Senkal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibrator Device, Electronic Apparatus, And Vehicle
- Publication number 20220236058
- Publication date Jul 28, 2022
- SEIKO EPSON CORPORATION
- Ryuta Nishizawa
- G01 - MEASURING TESTING
Information Patent Application
THREE-AXIS ROTATION RATE SENSOR INCLUDING A SUBSTRATE AND A DOUBLE...
- Publication number 20220228864
- Publication date Jul 21, 2022
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- G01 - MEASURING TESTING
Information Patent Application
MEMS GYROSCOPE SELF-TEST USING A TECHNIQUE FOR DEFLECTION OF THE SE...
- Publication number 20220128360
- Publication date Apr 28, 2022
- STMicroelectronics, Inc.
- Yamu HU
- G01 - MEASURING TESTING
Information Patent Application
3-AXIS GYROSCOPE WITH ROTATIONAL VIBRATION REJECTION
- Publication number 20220057210
- Publication date Feb 24, 2022
- Analog Devices, Inc.
- Jeffrey A. Gregory
- G01 - MEASURING TESTING
Information Patent Application
INERTIAL MEASUREMENT UNITS AS VIBROACOUSTIC DATA RECEIVERS
- Publication number 20220011113
- Publication date Jan 13, 2022
- Carnegie Mellon University
- Christopher Harrison
- G01 - MEASURING TESTING
Information Patent Application
CIRCUIT BOARD SYSTEM, PHOTOGRAPHING DEVICE, GIMBAL ASSEMBLY, AND MO...
- Publication number 20210251078
- Publication date Aug 12, 2021
- SZ DJI Technology Co., Ltd.
- Jun DU
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
NOISE PERFORMANCE FOR VIBRATING STRUCTURE GYROSCOPES
- Publication number 20210048296
- Publication date Feb 18, 2021
- ATLANTIC INERTIAL SYSTEMS LIMITED
- Christopher Paul Fell
- G01 - MEASURING TESTING
Information Patent Application
VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE
- Publication number 20210033398
- Publication date Feb 4, 2021
- SEIKO EPSON CORPORATION
- Ryuta Nishizawa
- G01 - MEASURING TESTING
Information Patent Application
MEMS GYROSCOPE START-UP PROCESS AND CIRCUIT
- Publication number 20200408523
- Publication date Dec 31, 2020
- STMicroelectronics, Inc.
- Deyou FANG
- G01 - MEASURING TESTING
Information Patent Application
MEMS GYROSCOPE SELF-TEST USING A TECHNIQUE FOR DEFLECTION OF THE SE...
- Publication number 20200408524
- Publication date Dec 31, 2020
- STMicroelectronics, Inc.
- Yamu HU
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
ROTATION-RATE SENSOR, METHOD FOR MANUFACTURING A ROTATION-RATE SENSOR
- Publication number 20200386550
- Publication date Dec 10, 2020
- ROBERT BOSCH GmbH
- Robert Ramsperger
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR BIAS SUPPRESSION IN A NON-DEGENERATE MEMS S...
- Publication number 20200346920
- Publication date Nov 5, 2020
- HONEYWELL INTERNATIONAL INC.
- Daniel Endean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR SENSOR CONFIGURATION
- Publication number 20200348134
- Publication date Nov 5, 2020
- InvenSense, Inc.
- Karthik Katingari
- G01 - MEASURING TESTING
Information Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
- Publication number 20200309527
- Publication date Oct 1, 2020
- The Regents of the University of California
- Andrei M. SHKEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Angular Rate Sensor
- Publication number 20200300628
- Publication date Sep 24, 2020
- Sumitomo Precision Products Co., Ltd.
- Ryohei UCHINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR, ELECTRONIC APPARATUS, AND VEHICLE
- Publication number 20200278377
- Publication date Sep 3, 2020
- SEIKO EPSON CORPORATION
- Teruo TAKIZAWA
- G01 - MEASURING TESTING
Information Patent Application
RESONATOR CONFIGURED TO BE INTEGRATED INTO AN INERTIAL ANGULAR SENSOR
- Publication number 20200149890
- Publication date May 14, 2020
- SAFRAN
- Philippe Serge Claude ONFROY
- G01 - MEASURING TESTING
Information Patent Application
Method for Measuring a Behavior of a MEMS Device
- Publication number 20200124419
- Publication date Apr 23, 2020
- TDK Electronics AG
- Andreas Barbul
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL NAVIGATION SYSTEM
- Publication number 20200064136
- Publication date Feb 27, 2020
- Atlantic Inertial Systems Limited
- Geoffrey Thomas HENDERSON
- G01 - MEASURING TESTING
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH REJECTION OF DISTURBANCES AND...
- Publication number 20200025567
- Publication date Jan 23, 2020
- STMicroelectronics S.r.l.
- Carlo Valzasina
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT, PHYSICAL QUANTITY...
- Publication number 20190331491
- Publication date Oct 31, 2019
- SEIKO EPSON CORPORATION
- Masayoshi TODOROKIHARA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM OF DUAL-MODE ACTUATION AND SENSING FOR REAL-TIME...
- Publication number 20190271718
- Publication date Sep 5, 2019
- Georgia Tech Research Corporation
- Arashk Norouz Pour Shirazi
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION DEVICE AND METHOD FOR CONTROLLING THE SAME
- Publication number 20190204081
- Publication date Jul 4, 2019
- Kabushiki Kaisha Toshiba
- Ryunosuke Gando
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FM INERTIAL SENSOR AND METHOD FOR OPERATING THE FM INERTIAL SENSOR
- Publication number 20190064205
- Publication date Feb 28, 2019
- STMicroelectronics S.r.l.
- Alessandro TOCCHIO
- G01 - MEASURING TESTING
Information Patent Application
COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...
- Publication number 20180321037
- Publication date Nov 8, 2018
- Georgia Tech Research Corporation
- Haoran Wen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
INFERRING AMBIENT ATMOSPHERIC TEMPERATURE
- Publication number 20180273374
- Publication date Sep 27, 2018
- InvenSense, Inc.
- William Kerry Keal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HEMISPHERICAL RESONANCE MICROMECHANICAL GYROSCOPE AND PROCESSING ME...
- Publication number 20180164098
- Publication date Jun 14, 2018
- SUZHOU WENZHIXIN MICRO SYSTEM TECHNOLOGY CO., LTD
- Shuwen Guo
- G01 - MEASURING TESTING

using planar vibrating masses driven in a translation vibration along an axis

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Three-axis rotation rate sensor including a substrate and a double...

Vibration rectification error correction circuit, physical quantity...

3-axis gyroscope with rotational vibration rejection

MEMS gyroscope self-test using a technique for deflection of the se...

Inertial sensor, electronic apparatus, and vehicle

Fused quartz dual shell resonator and method of fabrication

Multi-mass MEMS motion sensor

Demodulation phase calibration using external input

Method and system for sensor configuration

Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...

Inertial navigation system

Angular rate sensor

Vibration gyroscope

Systems and methods for bias suppression in a non-degenerate MEMS s...

Demodulation phase calibration using external input

Semiconductor device and method of manufacturing thereof

Vibrator device, electronic apparatus, and vehicle

MEMS gyroscope self-test using a technique for deflection of the se...

Rotation-rate sensor, method for manufacturing a rotation-rate sensor

Noise performance for vibrating structure gyroscopes

Resonator configured to be integrated into an inertial angular sensor

3-axis gyroscope with rotational vibration rejection

Inertial sensor, electronic device, and vehicle

MEMS gyroscope start-up process and circuit

Method for measuring a behavior of a MEMS device

Physical quantity sensor, composite sensor, inertial measurement un...

Vibration device and method for controlling the same

Microelectromechanical gyroscope with rejection of disturbances and...

Proof mass offset compensation

Vibrating micro-mechanical sensor of angular velocity

Patents Applicationslast 30 patents

MULTI-MASS MEMS MOTION SENSOR

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

DEMODULATION PHASE CALIBRATION USING EXTERNAL INPUT

Vibrator Device, Electronic Apparatus, And Vehicle

THREE-AXIS ROTATION RATE SENSOR INCLUDING A SUBSTRATE AND A DOUBLE...

MEMS GYROSCOPE SELF-TEST USING A TECHNIQUE FOR DEFLECTION OF THE SE...

3-AXIS GYROSCOPE WITH ROTATIONAL VIBRATION REJECTION

INERTIAL MEASUREMENT UNITS AS VIBROACOUSTIC DATA RECEIVERS

CIRCUIT BOARD SYSTEM, PHOTOGRAPHING DEVICE, GIMBAL ASSEMBLY, AND MO...

NOISE PERFORMANCE FOR VIBRATING STRUCTURE GYROSCOPES

VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

MEMS GYROSCOPE START-UP PROCESS AND CIRCUIT

MEMS GYROSCOPE SELF-TEST USING A TECHNIQUE FOR DEFLECTION OF THE SE...

ROTATION-RATE SENSOR, METHOD FOR MANUFACTURING A ROTATION-RATE SENSOR

SYSTEMS AND METHODS FOR BIAS SUPPRESSION IN A NON-DEGENERATE MEMS S...

METHOD AND SYSTEM FOR SENSOR CONFIGURATION

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

Angular Rate Sensor

INERTIAL SENSOR, ELECTRONIC APPARATUS, AND VEHICLE

RESONATOR CONFIGURED TO BE INTEGRATED INTO AN INERTIAL ANGULAR SENSOR

Method for Measuring a Behavior of a MEMS Device

INERTIAL NAVIGATION SYSTEM

MICROELECTROMECHANICAL GYROSCOPE WITH REJECTION OF DISTURBANCES AND...

VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT, PHYSICAL QUANTITY...

METHOD AND SYSTEM OF DUAL-MODE ACTUATION AND SENSING FOR REAL-TIME...

VIBRATION DEVICE AND METHOD FOR CONTROLLING THE SAME

FM INERTIAL SENSOR AND METHOD FOR OPERATING THE FM INERTIAL SENSOR

COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...

INFERRING AMBIENT ATMOSPHERIC TEMPERATURE

HEMISPHERICAL RESONANCE MICROMECHANICAL GYROSCOPE AND PROCESSING ME...