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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/32136
using plasmas
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Patents Grants
last 30 patents
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Patent Grant
Wafer bonding method
Patent number
11,973,055
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Chi Lin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dry etching method, method for manufacturing semiconductor element,...
Patent number
11,972,955
Issue date
Apr 30, 2024
Resonac Corporation
Kazuma Matsui
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method of manufacturing semiconductor device and semiconductor devices
Patent number
11,955,430
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hsuan Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Combined RF generator and RF solid-state matching network
Patent number
11,948,775
Issue date
Apr 2, 2024
ASM AMERICA, INC.
Imran Ahmed Bhutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Backside metal patterning die singulation systems and related methods
Patent number
11,942,366
Issue date
Mar 26, 2024
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Michael J. Seddon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of etching metal-containing layers
Patent number
11,942,332
Issue date
Mar 26, 2024
Applied Materials, Inc.
Akhil Mehrotra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including buried gate structure and method for...
Patent number
11,943,912
Issue date
Mar 26, 2024
SK Hynix Inc.
Dong-Soo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory and method of manufacturing the same
Patent number
11,937,437
Issue date
Mar 19, 2024
Kioxia Corporation
Masahiro Kiyotoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer etching for subtractive metal etch
Patent number
11,935,758
Issue date
Mar 19, 2024
Lam Research Corporation
Wenbing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for forming the same
Patent number
11,929,424
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of etching metals in semiconductor devices
Patent number
11,915,943
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Hao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for selectively forming a target film on a substrate compri...
Patent number
11,915,929
Issue date
Feb 27, 2024
ASM IP Holding B.V.
Delphine Longrie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor arrangement and method of manufacture
Patent number
11,894,425
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company Limited
Yun-Chi Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor storage device and manufacturing method thereof
Patent number
11,871,577
Issue date
Jan 9, 2024
Kioxia Corporation
Takayuki Kashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas mixer to enable RPS purging
Patent number
11,862,475
Issue date
Jan 2, 2024
Applied Materials, Inc.
Fang Ruan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustable fastening device for plasma gas injectors
Patent number
11,854,769
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Shun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure cutting process and structures formed thereby
Patent number
11,855,085
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Chang Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Footing removal in cut-metal process
Patent number
11,854,903
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ming-Chi Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate etch back with reduced loading effect
Patent number
11,843,041
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching techniques
Patent number
11,837,467
Issue date
Dec 5, 2023
Toyko Electron Limited
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shaping nanomaterials by short electrical pulses
Patent number
11,830,743
Issue date
Nov 28, 2023
Board of Regents, The University of Texas System
Ali E. Aliev
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
In-situ etch material selectivity detection system
Patent number
11,830,779
Issue date
Nov 28, 2023
Applied Materials, Inc.
Keith Berding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Faceplate having blocked center hole
Patent number
11,814,716
Issue date
Nov 14, 2023
Applied Materials, Inc.
Fang Ruan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method, substrate processing apparatus, and substrate proce...
Patent number
11,810,791
Issue date
Nov 7, 2023
Tokyo Electron Limited
Hironari Sasagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective removal of ruthenium-containing materials
Patent number
11,798,813
Issue date
Oct 24, 2023
Applied Materials, Inc.
Baiwei Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device having an air gap and method for fabricating t...
Patent number
11,791,390
Issue date
Oct 17, 2023
SK Hynix Inc.
Se-Han Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of dry etching copper thin film and semiconductor device
Patent number
11,791,165
Issue date
Oct 17, 2023
Samsung Electronics Co., Ltd.
Cheewon Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective etch process using hydrofluoric acid and ozone gases
Patent number
11,791,166
Issue date
Oct 17, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Qi Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for atomic layer etching
Patent number
11,784,029
Issue date
Oct 10, 2023
Wonik IPS Co., Ltd.
Kwang Seon Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor arrangement and method of making
Patent number
11,776,845
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company Limited
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR...
Publication number
20240145366
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
Dongjoon Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240128092
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuta NAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING A CAPACITOR
Publication number
20240128311
Publication date
Apr 18, 2024
STMicroelectronics (Tours) SAS
Mohamed Boufnichel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ISOTROPIC SILICON NITRIDE REMOVAL
Publication number
20240120210
Publication date
Apr 11, 2024
Applied Materials, Inc.
Mikhail Korolik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20240112922
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Ryo MATSUBARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Structure Cutting Process and Structures Formed Thereby
Publication number
20240113113
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Chang Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING PATTERN OF METAL OXIDE AND METHOD FOR PRODUCING...
Publication number
20240105466
Publication date
Mar 28, 2024
Resonac Corporation
Kazuma MATSUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Footing Removal in Cut-Metal Process
Publication number
20240096707
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Chi Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANU...
Publication number
20240096607
Publication date
Mar 21, 2024
KIOXIA Corporation
Shohei ARAKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM
Publication number
20240096715
Publication date
Mar 21, 2024
Applied Materials, Inc.
Keith Berding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240087890
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Lien HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIRING FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240071774
Publication date
Feb 29, 2024
SCREEN Holdings Co., Ltd.
Masaki INABA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DRY ETCHING
Publication number
20240071803
Publication date
Feb 29, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Fu-Yi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE ETCH BACK WITH REDUCED LOADING EFFECT
Publication number
20240063288
Publication date
Feb 22, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Chen LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA POST-PROCESSING APPARATUS AND PLASMA POST-PROCESSING METHOD...
Publication number
20240062992
Publication date
Feb 22, 2024
SAMSUNG DISPLAY CO., LTD.
DAESOO KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING CONDUCTIVE LAYER OF SEMICONDUCTOR DEVICE
Publication number
20240038545
Publication date
Feb 1, 2024
NANYA TECHNOLOGY CORPORATION
Yu Shu LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR EL...
Publication number
20240038546
Publication date
Feb 1, 2024
SHOWA DENKO K.K.
Kazuma MATSUI
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
DIGITAL PEN WITH ENHANCED EDUCATIONAL AND THERAPEUTIC FEEDBACK
Publication number
20240030042
Publication date
Jan 25, 2024
Lauren Michelle Neubauer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROTECTIVE INSULATOR FOR HFET DEVICES
Publication number
20240030337
Publication date
Jan 25, 2024
Power Integrations, Inc.
Alexey Kudymov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...
Publication number
20240021430
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming Chyi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ETCH
Publication number
20240021435
Publication date
Jan 18, 2024
LAM RESEARCH CORPORATION
Yiwen FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240021710
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jung-Hao CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DRY ETCHING
Publication number
20240006157
Publication date
Jan 4, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chien-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND PLASMA PROCESSING METHOD
Publication number
20230411167
Publication date
Dec 21, 2023
Hitachi High-Tech Corporation
Mamoru Yakushiji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Parasitic Capacitance Reduction
Publication number
20230402531
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Jia-Heng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Fabricating Metal Gate Devices and Resulting Structures
Publication number
20230395689
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Chi Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING TOOLS AND SYSTEMS
Publication number
20230395385
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Minjoon Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FERROELECTRIC MFM CAPACITOR ARRAY AND METHODS OF MAKING THE SAME
Publication number
20230387186
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company Limited
Chun-Chieh LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING GAS, ETCHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR...
Publication number
20230386851
Publication date
Nov 30, 2023
Resonac Corporation
Atsushi SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING GAS, ETCHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR...
Publication number
20230386850
Publication date
Nov 30, 2023
Resonac Corporation
Atsushi SUZUKI
H01 - BASIC ELECTRIC ELEMENTS