using pulsed discharges

Industry

CPC
C23C16/515

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/515using pulsed discharges

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Coating apparatus and coating method
- Patent number 12,170,189
- Issue date Dec 17, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming device
- Patent number 12,123,093
- Issue date Oct 22, 2024
- FUJIFILM Corporation
- Yoshihiko Mochizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming patterned structures including silico...
- Patent number 12,100,597
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,820,654
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,699,584
- Issue date Jul 11, 2023
- L'Air Liquide, Société Anonyme pour l'Edute ed l'Exploitation des Procédés Ge...
- Jean-Marc Girard
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Techniques for reducing surface adhesion during demolding in nanoim...
- Patent number 11,667,059
- Issue date Jun 6, 2023
- Meta Platforms Technologies, LLC
- Giuseppe Calafiore
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods for depositing dielectric material
- Patent number 11,631,591
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmospheric cold plasma jet coating and surface treatment
- Patent number 11,560,627
- Issue date Jan 24, 2023
- Starfire Industries LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation via pulsed RF plasma
- Patent number 11,443,919
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Krishna Nittala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating highly repetitive pulsed plasmas
- Patent number 11,427,913
- Issue date Aug 30, 2022
- PlasmaNano Corporation
- Jaeyoung Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma polymerization coating apparatus and process
- Patent number 11,339,477
- Issue date May 24, 2022
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Diamond-like coating for piston ring surfaces, piston ring and proc...
- Patent number 11,215,283
- Issue date Jan 4, 2022
- ASIMCO Shuanghuan Piston Ring(YIZheng) Co., Ltd.
- Yingxue Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
- Patent number 11,186,911
- Issue date Nov 30, 2021
- International Business Machines Corporation
- Alfred Grill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating temperature-sensitive substrates with polycrysta...
- Patent number 11,162,172
- Issue date Nov 2, 2021
- Guehring KG
- Immo Garrn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating substrate for culturing stem cell
- Patent number 11,130,941
- Issue date Sep 28, 2021
- Research & Business Foundation Sungkyunkwan University
- Donggeun Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,124,876
- Issue date Sep 21, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing dielectric material
- Patent number 11,114,306
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Bhargav Citla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pharmaceutical and other packaging with low oxygen transmission rate
- Patent number 11,077,233
- Issue date Aug 3, 2021
- SIO2 Medical Products, Inc.
- Matthew Wills
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
- Patent number 11,066,748
- Issue date Jul 20, 2021
- International Business Machines Corporation
- Alfred Grill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid distributing device for a thin-film deposition apparatus, rel...
- Patent number 10,982,325
- Issue date Apr 20, 2021
- Picosun Oy
- Juhana Kostamo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus including metallized-ceramic tubes for radio-frequency an...
- Patent number 10,964,545
- Issue date Mar 30, 2021
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films including a water-soluble layer and a vapor-deposited coating
- Patent number 10,959,918
- Issue date Mar 30, 2021
- The Procter & Gamble Company
- Emily Charlotte Boswell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of encapsulation
- Patent number 10,763,107
- Issue date Sep 1, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cost-efficient high power PECVD deposition for solar cells
- Patent number 10,727,367
- Issue date Jul 28, 2020
- International Business Machines Corporation
- Tze-Chiang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cost-efficient high power PECVD deposition for solar cells
- Patent number 10,672,932
- Issue date Jun 2, 2020
- International Business Machines Corporation
- Tze-Chiang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming coating film having high heat resistance, high h...
- Patent number 10,597,781
- Issue date Mar 24, 2020
- Pusan National University Industry-University Cooperation Foundation
- Hee Soo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of encapsulation
- Patent number 10,566,186
- Issue date Feb 18, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite material for a pharmaceutical packaging, method for the p...
- Patent number 10,525,655
- Issue date Jan 7, 2020
- Schott AG
- Matthias Bicker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 10,431,450
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Kenji Ouchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Module including metallized ceramic tubes for RF and gas delivery
- Patent number 10,431,467
- Issue date Oct 1, 2019
- Lam Research Corporation
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REDUCING INCUBATION PERIOD OF SILICON NITRIDE LAYER DEPO...
- Publication number 20240318311
- Publication date Sep 26, 2024
- ASM IP HOLDING B.V.
- Agung Setiadi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20240258086
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE COATING, PREPARATION METHOD, AND DEVICE
- Publication number 20240158645
- Publication date May 16, 2024
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gapfill methods and processing assemblies
- Publication number 20240117494
- Publication date Apr 11, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC COMPOSITION, CAPACITIVE ELEMENT, VISIBLE-LIGHT PHOTOCATA...
- Publication number 20240011152
- Publication date Jan 11, 2024
- TDK Corporation
- Kumiko YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20230335379
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Takahiro SHINDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
- Publication number 20230160067
- Publication date May 25, 2023
- Starfire Industires, LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING EQUIPMENT
- Publication number 20230011958
- Publication date Jan 12, 2023
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING NANOCLUSTERS OF SILICON AND/OR GERMANIUM EXHI...
- Publication number 20230009716
- Publication date Jan 12, 2023
- Centre National de la Recherche Scientifique
- Holger VACH
- C01 - INORGANIC CHEMISTRY
Information Patent Application
VANADIUM SILICON CARBIDE FILM, VANADIUM SILICON CARBIDE FILM COATED...
- Publication number 20220411271
- Publication date Dec 29, 2022
- DOWA THERMOTECH CO., LTD.
- Satoru HABUKA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
DLC PREPARATION APPARATUS AND PREPARATION METHOD
- Publication number 20220380902
- Publication date Dec 1, 2022
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING PATTERNED STRUCTURES INCLUDING SILICO...
- Publication number 20220319858
- Publication date Oct 6, 2022
- ASM IP HOLDING B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220298636
- Publication date Sep 22, 2022
- Soham Sunjay ASRANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES
- Publication number 20220246428
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS...
- Publication number 20220170157
- Publication date Jun 2, 2022
- AGM CONTAINER CONTROLS, INC.
- Andrew Tudhope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING DEVICE
- Publication number 20220170158
- Publication date Jun 2, 2022
- FUJIFILM CORPORATION
- Yoshihiko MOCHIZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SI-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
- Publication number 20210395890
- Publication date Dec 23, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc GIRARD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING DIELECTRIC MATERIAL
- Publication number 20210384040
- Publication date Dec 9, 2021
- Bhargav S. CITLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
- Publication number 20210225635
- Publication date Jul 22, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc GIRARD
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Coating Apparatus and Coating Method
- Publication number 20210193441
- Publication date Jun 24, 2021
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...
- Publication number 20210087682
- Publication date Mar 25, 2021
- Picosun Oy
- Juhana KOSTAMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING TEMPERATURE-SENSITIVE SUBSTRATES WITH POLYCRYSTA...
- Publication number 20200283891
- Publication date Sep 10, 2020
- Guehring KG
- Immo Garrn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION VIA PULSED RF PLASMA
- Publication number 20200258720
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Krishna NITTALA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR REDUCING SURFACE ADHESION DURING DEMOLDING IN NANOIM...
- Publication number 20200247016
- Publication date Aug 6, 2020
- Giuseppe Calafiore
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20200152452
- Publication date May 14, 2020
- LAM RESEARCH CORPORATION
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY
- Publication number 20200051822
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Ramkishan Rao Lingampalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS...
- Publication number 20200017960
- Publication date Jan 16, 2020
- DURALAR TECHNOLOGIES, LLC
- Andrew Tudhope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA AND ULTRAVIOLET ASSISTED DEPOSITION APPARATUS AND...
- Publication number 20190368045
- Publication date Dec 5, 2019
- International Business Machines Corporation
- Alfred Grill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA AND ULTRAVIOLET ASSISTED DEPOSITION APPARATUS AND...
- Publication number 20190368044
- Publication date Dec 5, 2019
- International Business Machines Corporation
- Alfred Grill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
- Publication number 20190362961
- Publication date Nov 28, 2019
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc GIRARD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using pulsed discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Coating apparatus and coating method

Film forming device

Method and system for forming patterned structures including silico...

Si-containing film forming precursors and methods of using the same

Si-containing film forming precursors and methods of using the same

Techniques for reducing surface adhesion during demolding in nanoim...

Methods for depositing dielectric material

Atmospheric cold plasma jet coating and surface treatment

Film formation via pulsed RF plasma

Method and apparatus for generating highly repetitive pulsed plasmas

Plasma polymerization coating apparatus and process

Diamond-like coating for piston ring surfaces, piston ring and proc...

Microwave plasma and ultraviolet assisted deposition apparatus and...

Method for coating temperature-sensitive substrates with polycrysta...

Method of fabricating substrate for culturing stem cell

Si-containing film forming precursors and methods of using the same

Methods for depositing dielectric material

Pharmaceutical and other packaging with low oxygen transmission rate

Microwave plasma and ultraviolet assisted deposition apparatus and...

Fluid distributing device for a thin-film deposition apparatus, rel...

Apparatus including metallized-ceramic tubes for radio-frequency an...

Films including a water-soluble layer and a vapor-deposited coating

Methods of encapsulation

Cost-efficient high power PECVD deposition for solar cells

Cost-efficient high power PECVD deposition for solar cells

Method for forming coating film having high heat resistance, high h...

Methods of encapsulation

Composite material for a pharmaceutical packaging, method for the p...

Film forming method

Module including metallized ceramic tubes for RF and gas delivery

Patents Applicationslast 30 patents

METHOD FOR REDUCING INCUBATION PERIOD OF SILICON NITRIDE LAYER DEPO...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

COMPOSITE COATING, PREPARATION METHOD, AND DEVICE

Gapfill methods and processing assemblies

DIELECTRIC COMPOSITION, CAPACITIVE ELEMENT, VISIBLE-LIGHT PHOTOCATA...

PLASMA PROCESSING DEVICE

ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT

COATING EQUIPMENT

PROCESS FOR PRODUCING NANOCLUSTERS OF SILICON AND/OR GERMANIUM EXHI...

VANADIUM SILICON CARBIDE FILM, VANADIUM SILICON CARBIDE FILM COATED...

DLC PREPARATION APPARATUS AND PREPARATION METHOD

METHOD AND SYSTEM FOR FORMING PATTERNED STRUCTURES INCLUDING SILICO...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS...

FILM FORMING DEVICE

SI-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME

METHODS FOR DEPOSITING DIELECTRIC MATERIAL

Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME

Coating Apparatus and Coating Method

FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...

METHOD FOR COATING TEMPERATURE-SENSITIVE SUBSTRATES WITH POLYCRYSTA...

FILM FORMATION VIA PULSED RF PLASMA

TECHNIQUES FOR REDUCING SURFACE ADHESION DURING DEMOLDING IN NANOIM...

METHODS OF ENCAPSULATION

MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS...

MICROWAVE PLASMA AND ULTRAVIOLET ASSISTED DEPOSITION APPARATUS AND...

MICROWAVE PLASMA AND ULTRAVIOLET ASSISTED DEPOSITION APPARATUS AND...

Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME