using radio frequency discharges

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CPC
C23C16/505

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/505using radio frequency discharges

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioning of a processing chamber
- Patent number 12,221,694
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Pramit Manna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming nanocrystalline graphene
- Patent number 12,211,744
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Keunwook Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber deposition confinement
- Patent number 12,211,673
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
- Patent number 12,211,694
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,195,854
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning chamber of substrate processing apparatus
- Patent number 12,198,901
- Issue date Jan 14, 2025
- Jusung Engineering Co., Ltd.
- Yong Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin layer deposition with plasma pulsing
- Patent number 12,195,851
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically coupled RF filter for substrate processing chambers
- Patent number 12,198,908
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Edward P. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of iodine-containing carbon films
- Patent number 12,188,123
- Issue date Jan 7, 2025
- American Air Liquide, Inc.
- Phong Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for faceplate temperature control
- Patent number 12,191,169
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protection method and device for secondary battery, secondary batte...
- Patent number 12,191,458
- Issue date Jan 7, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,191,124
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Tatsuo Matsudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon oxynitride based encapsulation layer for magnetic tunnel ju...
- Patent number 12,185,641
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Vignesh Sundar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,183,546
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- KiChul Um
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead assembly with heated showerhead
- Patent number 12,170,186
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support table and RF rod
- Patent number 12,170,190
- Issue date Dec 17, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 12,143,087
- Issue date Nov 12, 2024
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition of carbon hard-mask
- Patent number 12,136,549
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Byung Seok Kwon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition coating system
- Patent number 12,129,549
- Issue date Oct 29, 2024
- Benjamin Lawrence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective processing with etch residue-based inhibitors
- Patent number 12,131,909
- Issue date Oct 29, 2024
- Lam Research Corporation
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
RF pulsing assisted low-k film deposition with high mechanical stre...
- Patent number 12,125,675
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single precursor low-k film deposition and UV cure for advanced tec...
- Patent number 12,119,223
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,112,949
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating substrate support
- Patent number 12,106,944
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 12,106,958
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,094,694
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing interconnect structures
- Patent number 12,091,752
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ting Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CARBON MASK DEPOSITION
- Publication number 20250054760
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Daniela ANJOS RIGSBY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250051915
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yuta NAKANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
- Publication number 20250054749
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Kent Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DEPOSITING MATERIALS ONTO 2-DIMENSIONAL LAYERED MATERIALS
- Publication number 20250051923
- Publication date Feb 13, 2025
- Oxford Instruments Nanotechnology Tools Limited
- Sarah RIAZIMEHR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250054753
- Publication date Feb 13, 2025
- ASM IP HOLDING B.V.
- KiHun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING APPARATUS WITH AUXILIARY GROUND PATHS
- Publication number 20250043427
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Songwhe Herr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD Method and Apparatus
- Publication number 20250046604
- Publication date Feb 6, 2025
- SPTS TECHNOLOGIES LIMITED
- Giorgos ANTONIOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma-Enhanced Chemical Vapor Deposition Coating System
- Publication number 20250043426
- Publication date Feb 6, 2025
- HZO, Inc.
- Daniel Pulsipher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...
- Publication number 20250046645
- Publication date Feb 6, 2025
- Tokyo Electron Limited
- Tamihiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quantum Printing Nanostructures Within Carbon Nanopores
- Publication number 20250034702
- Publication date Jan 30, 2025
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESS AND APPARATUS FOR RADICAL ENHANCED VAPOR DEPOSITION
- Publication number 20250029831
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- Tommi Tynell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING FRAME FOR DIFFUSER
- Publication number 20250019824
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Jong Yun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
- Publication number 20250022709
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
- Publication number 20250014904
- Publication date Jan 9, 2025
- LAM RESEARCH CORPORATION
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20250010331
- Publication date Jan 9, 2025
- VERSUM MATERIALS US, LLC
- MATTHEW R. MACDONALD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003064
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SICN THIN FILM
- Publication number 20250003060
- Publication date Jan 2, 2025
- ISTE
- Geun-ho KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003063
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240429042
- Publication date Dec 26, 2024
- CXMT Corporation
- Yihang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATING SUBSTRATE SUPPORT
- Publication number 20240420931
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
- Publication number 20240417854
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Troy GOMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240395615
- Publication date Nov 28, 2024
- Samsung Electronics Co., Ltd.
- Seokwon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH ETCH SELECTIVITY, LOW STRESS ASHABLE CARBON HARD MASK
- Publication number 20240395542
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Jun XUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES
- Publication number 20240384408
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING CAPACITOR STRUCTURE
- Publication number 20240387606
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Qinghui ZHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...
- Publication number 20240376595
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Marc Shull
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...
- Publication number 20240368766
- Publication date Nov 7, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
- Publication number 20240363318
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wun-Kai TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using radio frequency discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate support with varying depths of areas between mesas and co...

Conditioning of a processing chamber

Method of forming nanocrystalline graphene

Processing chamber deposition confinement

Ultra-high modulus and etch selectivity boron-carbon hardmask films

Substrate processing apparatus, method of processing substrate, met...

Method for cleaning chamber of substrate processing apparatus

Thin layer deposition with plasma pulsing

Magnetically coupled RF filter for substrate processing chambers

Deposition of iodine-containing carbon films

Systems and methods for faceplate temperature control

Protection method and device for secondary battery, secondary batte...

Plasma processing apparatus and plasma processing method

Silicon oxynitride based encapsulation layer for magnetic tunnel ju...

Substrate processing apparatus

Showerhead assembly with heated showerhead

Wafer support table and RF rod

Combiner and distributor for adjusting impedances or power across m...

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Plasma-enhanced chemical vapor deposition coating system

Selective processing with etch residue-based inhibitors

Integrated epitaxy and preclean system

RF pulsing assisted low-k film deposition with high mechanical stre...

Single precursor low-k film deposition and UV cure for advanced tec...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Highly etch selective amorphous carbon film

Rotating substrate support

Method of using dual frequency RF power in a process chamber

Substrate processing apparatus and substrate processing method

Apparatus and method of manufacturing interconnect structures

Patents Applicationslast 30 patents

CARBON MASK DEPOSITION

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...

METHODS OF DEPOSITING MATERIALS ONTO 2-DIMENSIONAL LAYERED MATERIALS

SUBSTRATE PROCESSING METHOD

WAFER PROCESSING APPARATUS WITH AUXILIARY GROUND PATHS

PECVD Method and Apparatus

Plasma-Enhanced Chemical Vapor Deposition Coating System

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...

Quantum Printing Nanostructures Within Carbon Nanopores

PROCESS AND APPARATUS FOR RADICAL ENHANCED VAPOR DEPOSITION

COOLING FRAME FOR DIFFUSER

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...

SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS

ALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

Particle Coating Apparatus And Method Of Coating Particle

METHOD FOR FORMING SICN THIN FILM

Particle Coating Apparatus And Method Of Coating Particle

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME

ROTATING SUBSTRATE SUPPORT

MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

HIGH ETCH SELECTIVITY, LOW STRESS ASHABLE CARBON HARD MASK

APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES

METHOD FOR MANUFACTURING CAPACITOR STRUCTURE

MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...

THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...

ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM