using radio frequency discharges

Industry

CPC
C23C16/505

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/505using radio frequency discharges

Industries

Patents Grantslast 30 patents

Information Patent Grant
Showerhead assembly with heated showerhead
- Patent number 12,170,186
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support table and RF rod
- Patent number 12,170,190
- Issue date Dec 17, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 12,143,087
- Issue date Nov 12, 2024
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition of carbon hard-mask
- Patent number 12,136,549
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Byung Seok Kwon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition coating system
- Patent number 12,129,549
- Issue date Oct 29, 2024
- Benjamin Lawrence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective processing with etch residue-based inhibitors
- Patent number 12,131,909
- Issue date Oct 29, 2024
- Lam Research Corporation
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
RF pulsing assisted low-k film deposition with high mechanical stre...
- Patent number 12,125,675
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single precursor low-k film deposition and UV cure for advanced tec...
- Patent number 12,119,223
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,112,949
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating substrate support
- Patent number 12,106,944
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 12,106,958
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,094,694
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing interconnect structures
- Patent number 12,091,752
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ting Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microstructure control of conducting materials through surface coat...
- Patent number 12,084,763
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Marc Shull
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing system, and ab...
- Patent number 12,087,562
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Kazushi Hikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of manufacturing semiconductor device
- Patent number 12,074,011
- Issue date Aug 27, 2024
- Samsung Electronics Co., Ltd.
- Jiye Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High etch selectivity, low stress ashable carbon hard mask
- Patent number 12,062,537
- Issue date Aug 13, 2024
- Lam Research Corporation
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film curing using H2 plasma
- Patent number 12,054,827
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Shishi Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arcing protection method, processing tool and fabrication system
- Patent number 12,057,301
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wun-Kai Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing effluent build-up in a pumping exh...
- Patent number 12,049,698
- Issue date Jul 30, 2024
- Lam Research Corporation
- Antonio Xavier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a laminate film by cyclical plasma-enhanced dep...
- Patent number 12,040,177
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma non-uniformity detection
- Patent number 12,027,351
- Issue date Jul 2, 2024
- COMET Technologies USA, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device using plasma-enhanced...
- Patent number 12,027,362
- Issue date Jul 2, 2024
- Taiwan Carbon Nano Technology Corporation
- Tsung-Fu Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,014,927
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,009,217
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Ceramic susceptor
- Patent number 11,990,322
- Issue date May 21, 2024
- MiCo Ceramics Ltd.
- Haneum Bae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ROTATING SUBSTRATE SUPPORT
- Publication number 20240420931
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
- Publication number 20240417854
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Troy GOMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240395615
- Publication date Nov 28, 2024
- Samsung Electronics Co., Ltd.
- Seokwon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH ETCH SELECTIVITY, LOW STRESS ASHABLE CARBON HARD MASK
- Publication number 20240395542
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Jun XUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES
- Publication number 20240384408
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING CAPACITOR STRUCTURE
- Publication number 20240387606
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Qinghui ZHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...
- Publication number 20240376595
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Marc Shull
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...
- Publication number 20240368766
- Publication date Nov 7, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
- Publication number 20240363318
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wun-Kai TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AMORPHOUS CARBON FILM
- Publication number 20240347335
- Publication date Oct 17, 2024
- TES CO., LTD.
- Kwang-Ki Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240321557
- Publication date Sep 26, 2024
- Samsung Electronics Co., Ltd.
- Jiye KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20240309507
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20240304416
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240304436
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING THIN FILM AND APPARATUS FOR PROCESSING SUBSTRATE...
- Publication number 20240290586
- Publication date Aug 29, 2024
- WONIK IPS CO., LTD.
- Jae Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT METHOD AND MEASUREMENT SYSTEM
- Publication number 20240280383
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Hikaru FUJIWARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...
- Publication number 20240282546
- Publication date Aug 22, 2024
- Kayaku Advanced Materials, Inc.
- W. Shannan O'Shaughnessy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20240271284
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Kallol BERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION METHOD AND DEVICE FOR SECONDARY BATTERY, SECONDARY BATTE...
- Publication number 20240258584
- Publication date Aug 1, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Ting LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIO FREQUENCY MATCH STRAP ASSEMBLY
- Publication number 20240258072
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Sze Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM
- Publication number 20240240307
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240240320
- Publication date Jul 18, 2024
- SAMSUNG DISPLAY CO., LTD.
- Yong-Suk LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
New Precursors For Depositing Films With High Elastic Modulus
- Publication number 20240240309
- Publication date Jul 18, 2024
- VERSUM MATERIALS US, LLC
- WILLIAM ROBERT ENTLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
- Publication number 20240229238
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
- Publication number 20240234105
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20240218509
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING GAP-FILLING MATERIALS AND RELATED APPARATUS AND...
- Publication number 20240222190
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD PROCESS WITH PLASMA TREATMENT
- Publication number 20240203706
- Publication date Jun 20, 2024
- TOKYO ELECTRON LIMITED
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION ME...
- Publication number 20240191356
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Eiichi SUGAWARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using radio frequency discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Showerhead assembly with heated showerhead

Wafer support table and RF rod

Combiner and distributor for adjusting impedances or power across m...

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Plasma-enhanced chemical vapor deposition coating system

Selective processing with etch residue-based inhibitors

Integrated epitaxy and preclean system

RF pulsing assisted low-k film deposition with high mechanical stre...

Single precursor low-k film deposition and UV cure for advanced tec...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Highly etch selective amorphous carbon film

Rotating substrate support

Method of using dual frequency RF power in a process chamber

Substrate processing apparatus and substrate processing method

Apparatus and method of manufacturing interconnect structures

Microstructure control of conducting materials through surface coat...

Substrate processing apparatus, substrate processing system, and ab...

High density plasma enhanced process chamber

Apparatus for and method of manufacturing semiconductor device

High etch selectivity, low stress ashable carbon hard mask

Flowable film curing using H2 plasma

Arcing protection method, processing tool and fabrication system

Systems and methods for reducing effluent build-up in a pumping exh...

Methods for forming a laminate film by cyclical plasma-enhanced dep...

Plasma non-uniformity detection

Method for manufacturing semiconductor device using plasma-enhanced...

Highly etch selective amorphous carbon film

Substrate processing method and substrate processing apparatus

Integrated showerhead with thermal control for delivering radical a...

Ceramic susceptor

Patents Applicationslast 30 patents

ROTATING SUBSTRATE SUPPORT

MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

HIGH ETCH SELECTIVITY, LOW STRESS ASHABLE CARBON HARD MASK

APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES

METHOD FOR MANUFACTURING CAPACITOR STRUCTURE

MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...

THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...

ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM

METHOD FOR DEPOSITING AMORPHOUS CARBON FILM

APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

ANTENNA AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR FORMING THIN FILM AND APPARATUS FOR PROCESSING SUBSTRATE...

MEASUREMENT METHOD AND MEASUREMENT SYSTEM

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER

PROTECTION METHOD AND DEVICE FOR SECONDARY BATTERY, SECONDARY BATTE...

RADIO FREQUENCY MATCH STRAP ASSEMBLY

METHOD OF FORMING SILICON NITRIDE FILM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

New Precursors For Depositing Films With High Elastic Modulus

FILM FORMING DEVICE AND FILM FORMING METHOD

IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

METHODS FOR FORMING GAP-FILLING MATERIALS AND RELATED APPARATUS AND...

ALD PROCESS WITH PLASMA TREATMENT

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION ME...