using substrate bias

Industry

CPC
C23C14/345

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/345using substrate bias

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus to control a waveform
- Patent number 12,154,759
- Issue date Nov 26, 2024
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion resistant and low embrittlement aluminum alloy coatings o...
- Patent number 12,134,817
- Issue date Nov 5, 2024
- The Boeing Company
- Stephen P. Gaydos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving deposition process
- Patent number 12,112,930
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jung-Tang Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiCN having reduced growth defects by means of HiPIMS
- Patent number 12,110,580
- Issue date Oct 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Brake disk and method of making same
- Patent number 12,025,195
- Issue date Jul 2, 2024
- Tech M3, Inc.
- Nathan K. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cubic Al-rich AlTiN coatings deposited from ceramic targets
- Patent number 12,006,564
- Issue date Jun 11, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siva Phani Kumar Yalamanchili
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus with switches to produce a waveform
- Patent number 11,978,611
- Issue date May 7, 2024
- Advanced Energy Industries, Inc.
- Daniel Carter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Al-rich AlTin-based films
- Patent number 11,965,234
- Issue date Apr 23, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device comprising oxide semiconductor film
- Patent number 11,959,165
- Issue date Apr 16, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnet pulsing effect on PVD step coverage
- Patent number 11,952,655
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kevin Kashefi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
- Patent number 11,913,109
- Issue date Feb 27, 2024
- SPTS Technologies Limited
- Tony Wilby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,898,236
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Zhiyong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 11,875,980
- Issue date Jan 16, 2024
- Stephen R Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,821,068
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
- Patent number 11,823,859
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vanadium aluminium nitride (VAlN) micro alloyed with Ti and/or Si
- Patent number 11,821,073
- Issue date Nov 21, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siva Phani Kumar Yalamanchili
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,784,033
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Mengxue Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable electrochromic device including tungsten oxide film prepare...
- Patent number 11,753,712
- Issue date Sep 12, 2023
- Essilor International
- Francis Blanchard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
DC magnetron sputtering
- Patent number 11,718,908
- Issue date Aug 8, 2023
- SPTS Technologies Limited
- Scott Haymore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable, high performance wire grid polarizer having barrier layer
- Patent number 11,714,221
- Issue date Aug 1, 2023
- Moxtek, Inc.
- R. Stewart Nielson
- G02 - OPTICS
Information Patent Grant
Tantalum-doped molybdenum disulfide/tungsten disulfide multi-layer...
- Patent number 11,685,986
- Issue date Jun 27, 2023
- Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sc...
- Jibin Pu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-corrosion conductive film and pulse bias alternation-based mag...
- Patent number 11,634,808
- Issue date Apr 25, 2023
- Shanghai Jiaotong University
- Peiyun Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support and thin-film deposition apparatus using the same
- Patent number 11,598,006
- Issue date Mar 7, 2023
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiCN having reduced growth defects by means of HiPIMS
- Patent number 11,542,587
- Issue date Jan 3, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,512,388
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,482,404
- Issue date Oct 25, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for Improving Deposition Process
- Publication number 20240387155
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jung-Tang Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED TOOL
- Publication number 20240352572
- Publication date Oct 24, 2024
- MOLDINO Tool Engineering, Ltd.
- Tomoya Sasaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA BASED FILM MODIFICATION FOR SEMICONDUCTOR DEVICES
- Publication number 20240352575
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Timothy J. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Brake Disk and Method of Making Same
- Publication number 20240309921
- Publication date Sep 19, 2024
- Tech M3, Inc.
- Nathan K. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Air Gap Formation by Physical Vapor Deposition
- Publication number 20240271266
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Chengyu LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...
- Publication number 20240254616
- Publication date Aug 1, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for Processing a Substrate
- Publication number 20240218498
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Goichi YOSHIDOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE
- Publication number 20240209493
- Publication date Jun 27, 2024
- HYDROMECANIQUE ET FROTTEMENT
- Christophe Heau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL
- Publication number 20240207944
- Publication date Jun 27, 2024
- WALTER AG
- Jan Philipp LIEBIG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Method of Operating a PVD Apparatus
- Publication number 20240177997
- Publication date May 30, 2024
- SPTS TECHNOLOGIES LIMITED
- Scott Haymore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON-BASED ANODE MATERIAL WITH HIGH STABILITY AND CONDUCTIVITY F...
- Publication number 20240178371
- Publication date May 30, 2024
- Lanzhou Institute of Chemical Physics, CAS
- Bin ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Al-RICH AlTiN-BASED FILMS
- Publication number 20240043985
- Publication date Feb 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis KURAPOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
- Publication number 20240014018
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Tony WILBY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC FILM, AND MANUFACTURING METHOD...
- Publication number 20230416108
- Publication date Dec 28, 2023
- FUJIFILM CORPORATION
- Seigo NAKAMURA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
- Publication number 20230313364
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Kevin KASHEFI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A CATHODE LAYER, METHOD OF FORMING A BATTERY HALF...
- Publication number 20230304141
- Publication date Sep 28, 2023
- Dyson Technology Limited
- Samuel John ALEXANDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Brake Disk and Method of Making Same
- Publication number 20230220893
- Publication date Jul 13, 2023
- Tech M3, Inc.
- Nathan K. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230212735
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Nagabhushana NANJUNDAPPA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TICN Having Reduced Growth Defects by Means of HIPIMS
- Publication number 20230135238
- Publication date May 4, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230122956
- Publication date Apr 20, 2023
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PVD COATED CEMENTED CARBIDE CUTTING TOOL WITH IMPROVED COATING ADHE...
- Publication number 20230063115
- Publication date Mar 2, 2023
- WALTER AG
- Veit SCHIER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Forming Nanotwinned Regions in a Ceramic Coating at a Tunable Volum...
- Publication number 20230015174
- Publication date Jan 19, 2023
- UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING
- Xiaolu Pang
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS
- Publication number 20230009085
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Lizhong SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
- Publication number 20230005724
- Publication date Jan 5, 2023
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM-DOPED MOLYBDENUM DISULFIDE/TUNGSTEN DISULFIDE MULTI-LAYER...
- Publication number 20220341023
- Publication date Oct 27, 2022
- Ningbo Institute of Materials Technology and Engineering, Chinese Academy of...
- Liping WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER COATING
- Publication number 20220307123
- Publication date Sep 29, 2022
- CemeCon AG
- Werner Kölker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION
- Publication number 20220299688
- Publication date Sep 22, 2022
- MATERION CORPORATION
- Robert Sprague
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using substrate bias

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus to control a waveform

Corrosion resistant and low embrittlement aluminum alloy coatings o...

Method for improving deposition process

TiCN having reduced growth defects by means of HiPIMS

Methods and apparatus for controlling ion fraction in physical vapo...

Brake disk and method of making same

Cubic Al-rich AlTiN coatings deposited from ceramic targets

Apparatus with switches to produce a waveform

Al-rich AlTin-based films

Semiconductor device comprising oxide semiconductor film

Method and apparatus for controlling stress variation in a material...

Electromagnet pulsing effect on PVD step coverage

Apparatus and a method of controlling thickness variation in a mate...

Methods and apparatus for processing a substrate

Method and apparatus for depositing a material

Magnetically enhanced high density plasma-chemical vapor deposition...

Sputtering a layer on a substrate using a high-energy density plasm...

Vanadium aluminium nitride (VAlN) micro alloyed with Ti and/or Si

Methods and apparatus for controlling ion fraction in physical vapo...

Methods and apparatus for processing a substrate

Durable electrochromic device including tungsten oxide film prepare...

DC magnetron sputtering

Durable, high performance wire grid polarizer having barrier layer

Tantalum-doped molybdenum disulfide/tungsten disulfide multi-layer...

Anti-corrosion conductive film and pulse bias alternation-based mag...

Wafer support and thin-film deposition apparatus using the same

TiCN having reduced growth defects by means of HiPIMS

Method and apparatus for controlling stress variation in a material...

Film forming apparatus and film forming method

Electrically and magnetically enhanced ionized physical vapor depos...

Patents Applicationslast 30 patents

Method for Improving Deposition Process

COATED TOOL

PLASMA BASED FILM MODIFICATION FOR SEMICONDUCTOR DEVICES

Brake Disk and Method of Making Same

Air Gap Formation by Physical Vapor Deposition

SPUTTERING TARGET, METHOD FOR MANUFACTURING SPUTTERING TARGET, AND...

Methods and Apparatus for Processing a Substrate

METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE

COATED CUTTING TOOL

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

Method of Operating a PVD Apparatus

SILICON-BASED ANODE MATERIAL WITH HIGH STABILITY AND CONDUCTIVITY F...

Al-RICH AlTiN-BASED FILMS

Apparatus and a Method of Controlling Thickness Variation in a Mate...

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC FILM, AND MANUFACTURING METHOD...

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE

METHOD OF FORMING A CATHODE LAYER, METHOD OF FORMING A BATTERY HALF...

Brake Disk and Method of Making Same

SUBSTRATE PROCESSING SYSTEM

TICN Having Reduced Growth Defects by Means of HIPIMS

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Method and Apparatus for Controlling Stress Variation in a Material...

PVD COATED CEMENTED CARBIDE CUTTING TOOL WITH IMPROVED COATING ADHE...

Forming Nanotwinned Regions in a Ceramic Coating at a Tunable Volum...

METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS

Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...

TANTALUM-DOPED MOLYBDENUM DISULFIDE/TUNGSTEN DISULFIDE MULTI-LAYER...

MULTI-LAYER COATING

NEAR INFRARED OPTICAL INTERFERENCE FILTERS WITH IMPROVED TRANSMISSION