using ultrasonic means only

Industry

CPC
G03F7/428

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/428using ultrasonic means only

Industries

Patents Grantslast 30 patents

Information Patent Grant
Cancer cell-trapping metal filter, cancer cell-trapping metal filte...
- Patent number 10,246,684
- Issue date Apr 2, 2019
- Hitachi Chemical Company, Ltd.
- Hisashige Kanbara
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Enhanced stripping of implanted resists
- Patent number 8,772,170
- Issue date Jul 8, 2014
- Arizona Board of Regents on behalf of the University of Arizona
- Srini Raghavan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Removing solution
- Patent number 7,833,957
- Issue date Nov 16, 2010
- Daikin Industries, Ltd.
- Mitsushi Itano
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method of removing ion implanted photoresist
- Patent number 7,410,909
- Issue date Aug 12, 2008
- Hynix Semiconductor Inc.
- Ji Hye Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FRAM capacitor stack clean
- Patent number 7,228,865
- Issue date Jun 12, 2007
- Texas Instruments Incorporated
- Lindsey H. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process sequence for photoresist stripping and/or cleaning of photo...
- Patent number 7,169,253
- Issue date Jan 30, 2007
- Akrion Technologies, Inc.
- Gim-Syang Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for removing photoresist and post-etch residue...
- Patent number 6,848,455
- Issue date Feb 1, 2005
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Apparatus for removing photoresist film
- Patent number 6,715,944
- Issue date Apr 6, 2004
- Mitsubishi Denki Kabushiki Kaisha
- Izumi Oya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonic processing device and electronic parts fabrication metho...
- Patent number 6,619,301
- Issue date Sep 16, 2003
- Sharp Kabushiki Kaisha
- Kazuki Kobayashi
- B08 - CLEANING
Information Patent Grant
Method of removing photoresist film
- Patent number 6,517,999
- Issue date Feb 11, 2003
- Shimada Rika Kougyo Kabushiki Kaisha
- Izumi Oya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of structuring thin layers
- Patent number 4,119,483
- Issue date Oct 10, 1978
- U.S. Philips Corporation
- Hubertus Hubsch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTORESIST REMOVAL METHOD AND PHOTORESIST REMOVAL SYSTEM
- Publication number 20220317573
- Publication date Oct 6, 2022
- TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
- Zhongping ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CANCER CELL-TRAPPING METAL FILTER, CANCER CELL-TRAPPING METAL FILTE...
- Publication number 20170247662
- Publication date Aug 31, 2017
- Hitachi Chemical Company, Ltd.
- Hisashige KANBARA
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
PROCESS FOR REMOVING SUBSTANCES FROM SUBSTRATES
- Publication number 20140137894
- Publication date May 22, 2014
- DYNALOY, LLC
- Richard Dalton Peters
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
ENHANCED STRIPPING OF IMPLANTED RESISTS
- Publication number 20120052687
- Publication date Mar 1, 2012
- Arizona Board of Regents on behalf of The University of Arizona
- SRINI RAGHAVAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ULTRASONIC CLEANING SYSTEM FOR REMOVING HIGH DOSE ION IMPLANTED PHO...
- Publication number 20090288689
- Publication date Nov 26, 2009
- Pukyong National University Industry-University Cooperation Foundation
- Kwon Taek Lim
- B08 - CLEANING
Information Patent Application
Method to remove resist layers from a substrate
- Publication number 20080085480
- Publication date Apr 10, 2008
- Interuniversitair Microelektronica Centrum (IMEC)
- Guy Vereecke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of removing ion implanted photoresist
- Publication number 20070269990
- Publication date Nov 22, 2007
- Hynix Semiconductor Inc.
- Ji Hye Han
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process sequence for photoresist stripping and cleaning of photomas...
- Publication number 20070123052
- Publication date May 31, 2007
- Ismail Kashkoush
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Removing solution
- Publication number 20060138399
- Publication date Jun 29, 2006
- Mitsushi Itano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Megasonic processing system with gasified fluid
- Publication number 20050087209
- Publication date Apr 28, 2005
- Thomas J. Nicolosi
- B08 - CLEANING
Information Patent Application
FRAM capacitor stack clean
- Publication number 20050045590
- Publication date Mar 3, 2005
- Lindsey H. Hall
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process sequence for photoresist stripping and/or cleaning of photo...
- Publication number 20050026435
- Publication date Feb 3, 2005
- Gim-Syang Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of forming thin-film pattern
- Publication number 20040248047
- Publication date Dec 9, 2004
- MINEBEA CO., LTD.
- Hideki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FRAM capacitor stack clean
- Publication number 20040237998
- Publication date Dec 2, 2004
- Lindsey H. Hall
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Single layer resist lift-off process and apparatus for submicron st...
- Publication number 20030015494
- Publication date Jan 23, 2003
- Seagate Technology LLC
- Sethuraman Jayashankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVING PHOTORESIST MATERIAL WITH DIMETHYL SULFOXIDE
- Publication number 20020132491
- Publication date Sep 19, 2002
- JOHN E. LANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for removing photoresist film
- Publication number 20020115024
- Publication date Aug 22, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Izumi Oya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultrasonic processing device and electronic parts fabrication metho...
- Publication number 20010006072
- Publication date Jul 5, 2001
- Kazuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

using ultrasonic means only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cancer cell-trapping metal filter, cancer cell-trapping metal filte...

Enhanced stripping of implanted resists

Removing solution

Method of removing ion implanted photoresist

FRAM capacitor stack clean

Process sequence for photoresist stripping and/or cleaning of photo...

Method and apparatus for removing photoresist and post-etch residue...

Apparatus for removing photoresist film

Ultrasonic processing device and electronic parts fabrication metho...

Method of removing photoresist film

Method of structuring thin layers

Patents Applicationslast 30 patents

PHOTORESIST REMOVAL METHOD AND PHOTORESIST REMOVAL SYSTEM

CANCER CELL-TRAPPING METAL FILTER, CANCER CELL-TRAPPING METAL FILTE...

PROCESS FOR REMOVING SUBSTANCES FROM SUBSTRATES

ENHANCED STRIPPING OF IMPLANTED RESISTS

ULTRASONIC CLEANING SYSTEM FOR REMOVING HIGH DOSE ION IMPLANTED PHO...

Method to remove resist layers from a substrate

Method of removing ion implanted photoresist

Process sequence for photoresist stripping and cleaning of photomas...

Removing solution

Megasonic processing system with gasified fluid

FRAM capacitor stack clean

Process sequence for photoresist stripping and/or cleaning of photo...

Method of forming thin-film pattern

FRAM capacitor stack clean

Single layer resist lift-off process and apparatus for submicron st...

METHOD OF REMOVING PHOTORESIST MATERIAL WITH DIMETHYL SULFOXIDE

Apparatus for removing photoresist film

Ultrasonic processing device and electronic parts fabrication metho...