Utilizing cluster apparatus

Industry

CPC
Y10S438/908

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/908Utilizing cluster apparatus

Industries

Patents Grantslast 30 patents

Information Patent Grant
Device for processing a substrate, method of processing a substrate...
- Patent number 8,448,599
- Issue date May 28, 2013
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Advanced mixing system for integrated tool having site-isolated rea...
- Patent number 8,414,703
- Issue date Apr 9, 2013
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suitably short wavelength light for laser annealing of silicon in D...
- Patent number 8,405,175
- Issue date Mar 26, 2013
- Applied Materials, Inc.
- Stephen Moffatt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,304,350
- Issue date Nov 6, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced mixing method for integrated tool having site-isolated rea...
- Patent number 8,207,069
- Issue date Jun 26, 2012
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating light emitting devices
- Patent number 8,110,509
- Issue date Feb 7, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced mixing system for integrated tool having site-isolated rea...
- Patent number 8,011,317
- Issue date Sep 6, 2011
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for processing a substrate, method of processing a substrate...
- Patent number 8,003,411
- Issue date Aug 23, 2011
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern manufacturing equipments, organic thin-film transistors and...
- Patent number 7,993,820
- Issue date Aug 9, 2011
- Hitachi, Ltd.
- Tomohiro Inoue
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Suitably short wavelength light for laser annealing of silicon in D...
- Patent number 7,947,584
- Issue date May 24, 2011
- Applied Materials, Inc.
- Stephen Moffatt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for fabricating a gate dielectric of a field effect transistor
- Patent number 7,888,217
- Issue date Feb 15, 2011
- Applied Materials, Inc.
- Thai Cheng Chua
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System for thin film deposition utilizing compensating forces
- Patent number 7,850,780
- Issue date Dec 14, 2010
- Eastman Kodak Company
- David H. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Circulation system for high refractive index liquid in pattern form...
- Patent number 7,826,032
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Thin film semiconductor device and method of manufacturing the same
- Patent number 7,763,503
- Issue date Jul 27, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and a manufacturing method of a thin...
- Patent number 7,691,692
- Issue date Apr 6, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for processing substrate and method of manufacturing semicon...
- Patent number 7,682,987
- Issue date Mar 23, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,603,194
- Issue date Oct 13, 2009
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for thin film deposition utilizing compensating forces
- Patent number 7,572,686
- Issue date Aug 11, 2009
- Eastman Kodak Company
- David H. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for thermally processing microelectronic workp...
- Patent number 7,541,299
- Issue date Jun 2, 2009
- Semitool, Inc.
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing gate insulated field effect transistors
- Patent number 7,507,615
- Issue date Mar 24, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of a thin film semiconductor device
- Patent number 7,452,794
- Issue date Nov 18, 2008
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,392,106
- Issue date Jun 24, 2008
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Serial thermal processor arrangement
- Patent number 7,358,175
- Issue date Apr 15, 2008
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for configuring a plasma cluster tool
- Patent number 7,353,379
- Issue date Apr 1, 2008
- Lam Research Corporation
- Chung-Ho Huang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer controlling apparatus and substrate transferring...
- Patent number 7,313,452
- Issue date Dec 25, 2007
- Ebara Corporation
- Yoichi Kobayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,310,563
- Issue date Dec 18, 2007
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 7,271,082
- Issue date Sep 18, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for thermally processing microelectronic workp...
- Patent number 7,144,813
- Issue date Dec 5, 2006
- Semitool, Inc.
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for and method of manufacturing a large-area backplane by us...
- Patent number 7,132,016
- Issue date Nov 7, 2006
- Advantech Global, Ltd
- Thomas Peter Brody
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a semiconductor
- Patent number 7,097,712
- Issue date Aug 29, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Advanced Mixing System for Integrated Tool Having Site-Isolated Rea...
- Publication number 20130065796
- Publication date Mar 14, 2013
- Intermolecular, Inc.
- Aaron T. Francis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...
- Publication number 20120231975
- Publication date Sep 13, 2012
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...
- Publication number 20110281773
- Publication date Nov 17, 2011
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for processing a substrate, method of processing a substrate...
- Publication number 20110271907
- Publication date Nov 10, 2011
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUITABLY SHORT WAVELENGTH LIGHT FOR LASER ANNEALING OF SILICON IN D...
- Publication number 20110204045
- Publication date Aug 25, 2011
- APPLIED MATERIALS, INC.
- STEPHEN MOFFATT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MANUFACTURING APPARATUS
- Publication number 20110132260
- Publication date Jun 9, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD AND A MANUFACTURING METHO...
- Publication number 20100144077
- Publication date Jun 10, 2010
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for processing substrate and method of manufacturing semicon...
- Publication number 20100136714
- Publication date Jun 3, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION SYSTEM AND FABRICATION METHOD
- Publication number 20100131093
- Publication date May 27, 2010
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUITABLY SHORT WAVELENGTH LIGHT FOR LASER ANNEALING OF SILICON IN D...
- Publication number 20090275215
- Publication date Nov 5, 2009
- STEPHEN MOFFATT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM FOR THIN FILM DEPOSITION UTILIZING COMPENSATING FORCES
- Publication number 20090217878
- Publication date Sep 3, 2009
- David H. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for Processing Substrate and Method of Manufacturing Semicon...
- Publication number 20090170337
- Publication date Jul 2, 2009
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR THIN FILM DEPOSITION UTILIZING COMPENSATING FORCES
- Publication number 20090081886
- Publication date Mar 26, 2009
- David H. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING APPARATUS
- Publication number 20090075411
- Publication date Mar 19, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method and a manufacturing metho...
- Publication number 20090029509
- Publication date Jan 29, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication system and fabrication method
- Publication number 20080243293
- Publication date Oct 2, 2008
- RENESAS TECHNOLOGY CORP.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Advanced mixing system for integrated tool having site-isolated rea...
- Publication number 20080156769
- Publication date Jul 3, 2008
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CIRCULATION SYSTEM FOR HIGH REFRACTIVE INDEX LIQUID IN PATTERN FORM...
- Publication number 20080018868
- Publication date Jan 24, 2008
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND...
- Publication number 20080012013
- Publication date Jan 17, 2008
- Tomohiro Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method and a manufacturing metho...
- Publication number 20070173046
- Publication date Jul 26, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fabricating a gate dielectric of a field effect transistor
- Publication number 20070093012
- Publication date Apr 26, 2007
- APPLIED MATERIALS, INC.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR THERMALLY PROCESSING MICROELECTRONIC WORKP...
- Publication number 20070084832
- Publication date Apr 19, 2007
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR THERMALLY PROCESSING MICROELECTRONIC WORKP...
- Publication number 20070057352
- Publication date Mar 15, 2007
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Secure universal configuration software for cluster tools
- Publication number 20060206223
- Publication date Sep 14, 2006
- Chung-Ho Huang
- G05 - CONTROLLING REGULATING
Information Patent Application
Vapor phase growth method by controlling the heat output in the gas...
- Publication number 20060185596
- Publication date Aug 24, 2006
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Kashino
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate transfer controlling apparatus and substrate transferring...
- Publication number 20060161286
- Publication date Jul 20, 2006
- Yoichi Kobayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Fabrication system and fabrication method
- Publication number 20060111802
- Publication date May 25, 2006
- RENESAS TECHNOLOGY CORP.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication system and fabrication method
- Publication number 20060111805
- Publication date May 25, 2006
- RENESAS TECHNOLOGY CORP.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for thermally processing microelectronic workp...
- Publication number 20060105580
- Publication date May 18, 2006
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20060105514
- Publication date May 18, 2006
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS

Utilizing cluster apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device for processing a substrate, method of processing a substrate...

Advanced mixing system for integrated tool having site-isolated rea...

Suitably short wavelength light for laser annealing of silicon in D...

Method of manufacturing a semiconductor device

Advanced mixing method for integrated tool having site-isolated rea...

Method of fabricating light emitting devices

Advanced mixing system for integrated tool having site-isolated rea...

Device for processing a substrate, method of processing a substrate...

Pattern manufacturing equipments, organic thin-film transistors and...

Suitably short wavelength light for laser annealing of silicon in D...

Method for fabricating a gate dielectric of a field effect transistor

System for thin film deposition utilizing compensating forces

Circulation system for high refractive index liquid in pattern form...

Thin film semiconductor device and method of manufacturing the same

Substrate processing apparatus and a manufacturing method of a thin...

Device for processing substrate and method of manufacturing semicon...

Fabrication system and fabrication method

System for thin film deposition utilizing compensating forces

Method and apparatus for thermally processing microelectronic workp...

Method of manufacturing gate insulated field effect transistors

Manufacturing method of a thin film semiconductor device

Fabrication system and fabrication method

Serial thermal processor arrangement

Methods for configuring a plasma cluster tool

Substrate transfer controlling apparatus and substrate transferring...

Fabrication system and fabrication method

Method of manufacturing a semiconductor device

Method and apparatus for thermally processing microelectronic workp...

System for and method of manufacturing a large-area backplane by us...

Apparatus for processing a semiconductor

Patents Applicationslast 30 patents

Advanced Mixing System for Integrated Tool Having Site-Isolated Rea...

ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...

ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...

Device for processing a substrate, method of processing a substrate...

SUITABLY SHORT WAVELENGTH LIGHT FOR LASER ANNEALING OF SILICON IN D...

MANUFACTURING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD AND A MANUFACTURING METHO...

Device for processing substrate and method of manufacturing semicon...

FABRICATION SYSTEM AND FABRICATION METHOD

SUITABLY SHORT WAVELENGTH LIGHT FOR LASER ANNEALING OF SILICON IN D...

SYSTEM FOR THIN FILM DEPOSITION UTILIZING COMPENSATING FORCES

Device for Processing Substrate and Method of Manufacturing Semicon...

SYSTEM FOR THIN FILM DEPOSITION UTILIZING COMPENSATING FORCES

MANUFACTURING APPARATUS

Substrate processing apparatus and method and a manufacturing metho...

Fabrication system and fabrication method

Advanced mixing system for integrated tool having site-isolated rea...

CIRCULATION SYSTEM FOR HIGH REFRACTIVE INDEX LIQUID IN PATTERN FORM...

PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND...

Substrate processing apparatus and method and a manufacturing metho...

Method for fabricating a gate dielectric of a field effect transistor

METHOD AND APPARATUS FOR THERMALLY PROCESSING MICROELECTRONIC WORKP...

METHOD AND APPARATUS FOR THERMALLY PROCESSING MICROELECTRONIC WORKP...

Secure universal configuration software for cluster tools

Vapor phase growth method by controlling the heat output in the gas...

Substrate transfer controlling apparatus and substrate transferring...

Fabrication system and fabrication method

Fabrication system and fabrication method

Method and apparatus for thermally processing microelectronic workp...

THIN FILM SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME