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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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Vacuum control means
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Patents Grants
last 30 patents
Information
Patent Grant
Pressure-induced temperature modification during atomic scale proce...
Patent number
12,205,803
Issue date
Jan 21, 2025
Kurt J. Lesker Company
Gilbert Bruce Rayner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
12,198,952
Issue date
Jan 14, 2025
Tokyo Electron Limited
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,191,124
Issue date
Jan 7, 2025
Tokyo Electron Limited
Tatsuo Matsudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
12,106,929
Issue date
Oct 1, 2024
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
12,094,711
Issue date
Sep 17, 2024
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
12,087,561
Issue date
Sep 10, 2024
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and prediction method of the condition...
Patent number
12,080,529
Issue date
Sep 3, 2024
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Etching apparatus and methods of cleaning thereof
Patent number
12,080,582
Issue date
Sep 3, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chi Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for substrate support temperature control
Patent number
12,062,567
Issue date
Aug 13, 2024
Applied Materials, Inc.
Zubin Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and apparatuses for contamination-free vacuum transfer of s...
Patent number
12,020,895
Issue date
Jun 25, 2024
FEI Company
Jakub Kuba
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing apparatus, method of controlling the same, and...
Patent number
12,001,194
Issue date
Jun 4, 2024
Semes Co., Ltd.
Seung Yeon Kim
G05 - CONTROLLING REGULATING
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Aperture device and analyzer arrangement
Patent number
11,942,316
Issue date
Mar 26, 2024
SCIENTA OMICRON AB
Peter Amann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam processing apparatus and method for controlling operation...
Patent number
11,929,238
Issue date
Mar 12, 2024
Jeol Ltd.
Tatsuhito Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated multi-grid handling apparatus
Patent number
11,881,377
Issue date
Jan 23, 2024
Richard Joseph Pickreign
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High density carbon films for patterning applications
Patent number
11,842,897
Issue date
Dec 12, 2023
Applied Materials, Inc.
Eswaranand Venkatasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma flood gun for charged particle apparatus
Patent number
11,830,705
Issue date
Nov 28, 2023
Ximan Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for evacuating a chamber
Patent number
11,830,701
Issue date
Nov 28, 2023
ASML Netherlands B.V.
Fangfu Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Transport apparatus and method for transferring a sample between tw...
Patent number
11,753,254
Issue date
Sep 12, 2023
FEI Company
Tomas Kratochvíl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma flood gun for charged particle apparatus
Patent number
11,735,398
Issue date
Aug 22, 2023
Ximan Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,710,623
Issue date
Jul 25, 2023
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Coupling for connecting analytical systems with vibrational isolation
Patent number
11,699,582
Issue date
Jul 11, 2023
FEI Company
Alexander Makarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
11,651,931
Issue date
May 16, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,569,068
Issue date
Jan 31, 2023
Tokyo Electron Limited
Kazushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotary plasma reactor
Patent number
11,545,343
Issue date
Jan 3, 2023
Board of Trustees of Michigan State University
Qi Hua Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply system, substrate processing apparatus, and control meth...
Patent number
11,538,665
Issue date
Dec 27, 2022
Tokyo Electron Limited
Atsushi Sawachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method of workpiece
Patent number
11,538,704
Issue date
Dec 27, 2022
Disco Corporation
Yoshio Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone plasma-enhanced chemical vapor deposition apparatus and...
Patent number
11,538,708
Issue date
Dec 27, 2022
SanDisk Technologies LLC
Shoichi Murakami
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VALVES FOR CHARGED PARTICLE BEAM MICROSCOPE, VALVE MEMBER AND CHARG...
Publication number
20250029808
Publication date
Jan 23, 2025
Carl Zeiss MultiSEM GmbH
Steffen Balling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECTIONAL SELECTIVE FILL OF SILICON OXIDE MATERIALS
Publication number
20250022704
Publication date
Jan 16, 2025
Applied Materials, Inc.
Qiang Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW-PRESSURE OXIDATION TREATMENT METHOD AND DEVICE FOR SEMICONDUCTO...
Publication number
20250014892
Publication date
Jan 9, 2025
Beijing E-Town Semiconductor Technology Co., Ltd.
Jianmin JI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INCREASED ETCH RATES OF SILICON-CONTAINING MATERIALS
Publication number
20240429062
Publication date
Dec 26, 2024
Applied Materials, Inc.
Alok Ranjan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF SELECTIVELY ETCHING SILICON NITRIDE
Publication number
20240420962
Publication date
Dec 19, 2024
Applied Materials, Inc.
Doreen Wei Ying Yong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
Publication number
20240412940
Publication date
Dec 12, 2024
AIRSEM TECHNOLOGIES LTD.
Jenny SHKLOVSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
Publication number
20240404794
Publication date
Dec 5, 2024
TOKYO ELECTRON LIMITED
Derek William Bassett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HALOGEN-FREE ETCHING OF SILICON NITRIDE
Publication number
20240404837
Publication date
Dec 5, 2024
Applied Materials, Inc.
Zhiren Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
Publication number
20240395514
Publication date
Nov 28, 2024
Prashant AGARWAL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING CAPACITOR STRUCTURE
Publication number
20240387606
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Qinghui ZHENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Program, Information Processing Method, Information Processing Devi...
Publication number
20240355653
Publication date
Oct 24, 2024
SPP Technologies Co., Ttd.
Tatsuo Hiramura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR APPLYING VACUUM-PLASMA TREATMENT
Publication number
20240355594
Publication date
Oct 24, 2024
ADDON OPTICS LTD.
Arye Bar Erez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING APPARATUS AND METHODS OF CLEANING THEREOF
Publication number
20240355663
Publication date
Oct 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chi LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DENSIFIED SEAM-FREE SILICON GAP FILL PROCESSES
Publication number
20240331975
Publication date
Oct 3, 2024
Applied Materials, Inc.
Shuchi Sunil Ojha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, SUBSTRATE PROCESSI...
Publication number
20240321597
Publication date
Sep 26, 2024
Kokusai Electric Corporation
Kaoru YAMAMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGHER PRESSURE PURGE FOR IMPURITY REDUCTION IN RADICAL TREATMENT C...
Publication number
20240290585
Publication date
Aug 29, 2024
Applied Materials, Inc.
Pradeep SAMPATH KUMAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHODS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINI...
Publication number
20240290623
Publication date
Aug 29, 2024
Applied Materials, Inc.
Bin Yao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF
Publication number
20240282548
Publication date
Aug 22, 2024
Samsung Electronics Co., Ltd.
Yeoseon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS
Publication number
20240274414
Publication date
Aug 15, 2024
Applied Materials, Inc.
NEELA AYALASOMAYAJULA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
Publication number
20240274399
Publication date
Aug 15, 2024
Ferrovac AG
Urs MAIER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING GROUP III-NITRIDE SEMICONDUCTOR
Publication number
20240266168
Publication date
Aug 8, 2024
SCREEN Holdings Co., Ltd.
Masaki INABA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Ceramic Susceptor
Publication number
20240234194
Publication date
Jul 11, 2024
MICO CERAMICS LTD.
Jusung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDENSATE PRECURSORS AND CONTAMINANT PURGE APPARATUS AND METHODS
Publication number
20240222068
Publication date
Jul 4, 2024
FEI Company
Jing Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Automated Multi-Grid Handling Apparatus
Publication number
20240212972
Publication date
Jun 27, 2024
Richard Joseph Pickreign
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240212999
Publication date
Jun 27, 2024
SEMES CO., LTD.
Sung Hyuk JUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN...
Publication number
20240212971
Publication date
Jun 27, 2024
National Institute for Materials Science
Han ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20240203694
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Takuji SAKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPORIZER, ION SOURCE, ION BEAM IRRADIATION APPARATUS, AND AN OPERA...
Publication number
20240186101
Publication date
Jun 6, 2024
NISSIN ION EQUIPMENT CO., LTD.
Yuya HIRAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...
Publication number
20240178019
Publication date
May 30, 2024
ASM IP HOLDING B.V.
Mandar Deshpande
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240175125
Publication date
May 30, 2024
TOKYO ELECTRON LIMITED
Sung Duk SON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...