Vacuum locks

Industry

CPC
H01J2237/184

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/184Vacuum locks

Industries

Patents Grantslast 30 patents

Information Patent Grant
Systems and apparatuses for contamination-free vacuum transfer of s...
- Patent number 12,020,895
- Issue date Jun 25, 2024
- FEI Company
- Jakub Kuba
- G01 - MEASURING TESTING
Information Patent Grant
Automated multi-grid handling apparatus
- Patent number 11,881,377
- Issue date Jan 23, 2024
- Richard Joseph Pickreign
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma flood gun for charged particle apparatus
- Patent number 11,830,705
- Issue date Nov 28, 2023
- Ximan Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus and method for transferring a sample between tw...
- Patent number 11,753,254
- Issue date Sep 12, 2023
- FEI Company
- Tomas Kratochvíl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma flood gun for charged particle apparatus
- Patent number 11,735,398
- Issue date Aug 22, 2023
- Ximan Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated multi-grid handling apparatus
- Patent number 11,450,507
- Issue date Sep 20, 2022
- Richard Joseph Pickreign
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning samples for microscopy, inspection, or analysis
- Patent number 11,398,365
- Issue date Jul 26, 2022
- Mochii, Inc.
- Christopher Su-Yan Own
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,380,515
- Issue date Jul 5, 2022
- HITACHI HIGH-TECH CORPORATION
- Keiichiro Hosobuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,276,550
- Issue date Mar 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Mari Takabatake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated multi-grid handling apparatus
- Patent number 11,075,055
- Issue date Jul 27, 2021
- Richard Joseph Pickreign
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,024,481
- Issue date Jun 1, 2021
- FEI Company
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,796,879
- Issue date Oct 6, 2020
- Phenom-World Holding B.V.
- Karel Diederick Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for dust emitting of foreign matter and dust emission cause...
- Patent number 10,748,742
- Issue date Aug 18, 2020
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam sample preparation and coating apparatus and methods
- Patent number 10,731,246
- Issue date Aug 4, 2020
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant system having grid assembly
- Patent number 10,636,935
- Issue date Apr 28, 2020
- Intevac, Inc.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion milling device and processing method using the ion milling device
- Patent number 10,515,777
- Issue date Dec 24, 2019
- Hitachi High-Technologies Corporation
- Atsushi Kamino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and method for processing plurality of w...
- Patent number 10,468,283
- Issue date Nov 5, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Tetsuya Kudo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sample preparation apparatus and methods
- Patent number 10,110,854
- Issue date Oct 23, 2018
- Gatan, Inc.
- John Andrew Hunt
- G02 - OPTICS
Information Patent Grant
Charged particle beam device and sample holder for charged particle...
- Patent number 10,068,745
- Issue date Sep 4, 2018
- Hitachi High-Technologies Corporation
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder and analytical vacuum device
- Patent number 9,875,878
- Issue date Jan 23, 2018
- Hitachi, Ltd.
- Takeshi Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant system having grid assembly
- Patent number 9,741,894
- Issue date Aug 22, 2017
- Intevac, Inc.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inert atmospheric pressure pre-chill and post-heat
- Patent number 9,711,324
- Issue date Jul 18, 2017
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen cryo holder and dewar
- Patent number 9,543,112
- Issue date Jan 10, 2017
- Hitachi High-Technologies Corporation
- Yasuhira Nagakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope, an interface and a method for observi...
- Patent number 9,431,213
- Issue date Aug 30, 2016
- B-Nano Ltd.
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample introduction device and charged particle beam instrument
- Patent number 9,349,568
- Issue date May 24, 2016
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample introduction device and charged particle beam instrument
- Patent number 9,318,301
- Issue date Apr 19, 2016
- Jeol Ltd.
- Masaaki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant system having grid assembly
- Patent number 9,303,314
- Issue date Apr 5, 2016
- Intevac, Inc.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sample preparation apparatus and methods
- Patent number 9,196,455
- Issue date Nov 24, 2015
- Gatan, Inc.
- Steven Thomas Coyle
- G01 - MEASURING TESTING
Information Patent Grant
Device for analising a radiating material using a microprobe
- Patent number 9,052,272
- Issue date Jun 9, 2015
- Commisariat A l'Energie Atomique et Aux Energies Alternatives
- Jérôme Lamontagne
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device and sample observation method using a...
- Patent number 8,791,413
- Issue date Jul 29, 2014
- Hitachi High-Technologies Corporation
- Shinya Kitayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, SUBSTRATE PROCESSI...
- Publication number 20240321597
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Kaoru YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS
- Publication number 20240274414
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- NEELA AYALASOMAYAJULA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
- Publication number 20240274399
- Publication date Aug 15, 2024
- Ferrovac AG
- Urs MAIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Multi-Grid Handling Apparatus
- Publication number 20240212972
- Publication date Jun 27, 2024
- Richard Joseph Pickreign
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20240212999
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Sung Hyuk JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...
- Publication number 20240178019
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Mandar Deshpande
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...
- Publication number 20240030046
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Takuya YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE GEOMETRY TRIM COIL
- Publication number 20230274911
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPARATUSES FOR CONTAMINATION-FREE VACUUM TRANSFER OF S...
- Publication number 20230253176
- Publication date Aug 10, 2023
- FEI Company
- Jakub Kuba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20230245871
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- B08 - CLEANING
Information Patent Application
WORKSTATION, PREPARATION STATION AND METHOD FOR MANIPULATING AN ELE...
- Publication number 20230073506
- Publication date Mar 9, 2023
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Sebastian TACKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Multi-Grid Handling Apparatus
- Publication number 20220415607
- Publication date Dec 29, 2022
- RICHARD JOSEPH PICKREIGN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Multi-Grid Handling Apparatus
- Publication number 20210343498
- Publication date Nov 4, 2021
- RICHARD JOSEPH PICKREIGN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210241993
- Publication date Aug 5, 2021
- HITACHI HIGH-TECH CORPORATION
- Mari TAKABATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG, PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20210166960
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED MULTI-GRID HANDLING APPARATUS
- Publication number 20210082657
- Publication date Mar 18, 2021
- RICHARD JOSEPH PICKREIGN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20200402760
- Publication date Dec 24, 2020
- Phenom-World Holding B.V.
- Karel Diederick VAN DER MAST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND METHOD FOR TRANSFERRING A SAMPLE BETWEEN TW...
- Publication number 20200270070
- Publication date Aug 27, 2020
- FEI Company
- Tomas Kratochvíl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT SYSTEM HAVING GRID ASSEMBLY
- Publication number 20170345964
- Publication date Nov 30, 2017
- INTEVAC, INC.
- Babak Adibi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charged Particle Beam Device and Sample Holder for Charged Particle...
- Publication number 20160217971
- Publication date Jul 28, 2016
- Hitachi High-Technologies Corporation
- Toshie YAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Milling Device and Processing Method Using the Ion Milling Device
- Publication number 20160155602
- Publication date Jun 2, 2016
- Hitachi High-Technologies Corporation
- Atsushi KAMINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for Dust Emitting of Foreign Matter and Dust Emission Cause...
- Publication number 20150371817
- Publication date Dec 24, 2015
- Hitachi High-Technologies Corporation
- Hiroyuki ANDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Specimen Cryo Holder and Dewar
- Publication number 20150340199
- Publication date Nov 26, 2015
- Hitachi High-Technologies Corporation
- Yasuhira NAGAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT SYSTEM HAVING GRID ASSEMBLY
- Publication number 20150072461
- Publication date Mar 12, 2015
- INTEVAC, INC.
- Babak Adibi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Sample Preparation Apparatus and Methods
- Publication number 20140332699
- Publication date Nov 13, 2014
- Steven Thomas Coyle
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR ANALISING A RADIATING MATERIAL USING A MICROPROBE
- Publication number 20140326880
- Publication date Nov 6, 2014
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jérôme Lamontagne
- G01 - MEASURING TESTING
Information Patent Application
Sample Introduction Device and Charged Particle Beam Instrument
- Publication number 20140290393
- Publication date Oct 2, 2014
- JEOL Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Instrument
- Publication number 20140209193
- Publication date Jul 31, 2014
- Mitsuhide Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVI...
- Publication number 20140117232
- Publication date May 1, 2014
- B-NANO LTD.
- Dov SHACHAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Sample Preparation Apparatus and Methods
- Publication number 20140091237
- Publication date Apr 3, 2014
- GATAN, INC.
- Steven Thomas Coyle
- G01 - MEASURING TESTING

Vacuum locks

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and apparatuses for contamination-free vacuum transfer of s...

Automated multi-grid handling apparatus

Plasma flood gun for charged particle apparatus

Transport apparatus and method for transferring a sample between tw...

Plasma flood gun for charged particle apparatus

Automated multi-grid handling apparatus

Positioning samples for microscopy, inspection, or analysis

Charged particle beam device

Charged particle beam device

Automated multi-grid handling apparatus

Scanning electron microscope

Scanning electron microscope

Device for dust emitting of foreign matter and dust emission cause...

Ion beam sample preparation and coating apparatus and methods

Ion implant system having grid assembly

Ion milling device and processing method using the ion milling device

Ion implantation apparatus and method for processing plurality of w...

Ion beam sample preparation apparatus and methods

Charged particle beam device and sample holder for charged particle...

Sample holder and analytical vacuum device

Ion implant system having grid assembly

Inert atmospheric pressure pre-chill and post-heat

Specimen cryo holder and dewar

Scanning electron microscope, an interface and a method for observi...

Sample introduction device and charged particle beam instrument

Sample introduction device and charged particle beam instrument

Ion implant system having grid assembly

Ion beam sample preparation apparatus and methods

Device for analising a radiating material using a microprobe

Charged particle beam device and sample observation method using a...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, SUBSTRATE PROCESSI...

CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS

Device For Interfacing A Sample Transfer Device To An Analytic Or S...

Automated Multi-Grid Handling Apparatus

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...

ADJUSTABLE GEOMETRY TRIM COIL

SYSTEMS AND APPARATUSES FOR CONTAMINATION-FREE VACUUM TRANSFER OF S...

SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD

WORKSTATION, PREPARATION STATION AND METHOD FOR MANIPULATING AN ELE...

Automated Multi-Grid Handling Apparatus

Automated Multi-Grid Handling Apparatus

Charged Particle Beam Device

JIG, PROCESSING SYSTEM AND PROCESSING METHOD

AUTOMATED MULTI-GRID HANDLING APPARATUS

SCANNING ELECTRON MICROSCOPE

TRANSPORT APPARATUS AND METHOD FOR TRANSFERRING A SAMPLE BETWEEN TW...

ION IMPLANT SYSTEM HAVING GRID ASSEMBLY

Charged Particle Beam Device and Sample Holder for Charged Particle...

Ion Milling Device and Processing Method Using the Ion Milling Device

Device for Dust Emitting of Foreign Matter and Dust Emission Cause...

Specimen Cryo Holder and Dewar

ION IMPLANT SYSTEM HAVING GRID ASSEMBLY

Ion Beam Sample Preparation Apparatus and Methods

DEVICE FOR ANALISING A RADIATING MATERIAL USING A MICROPROBE

Sample Introduction Device and Charged Particle Beam Instrument

Charged Particle Beam Instrument

SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVI...

Ion Beam Sample Preparation Apparatus and Methods