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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/186
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Patents Grants
last 30 patents
Information
Patent Grant
Ion beam processing apparatus and method for controlling operation...
Patent number
11,929,238
Issue date
Mar 12, 2024
Jeol Ltd.
Tatsuhito Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,710,623
Issue date
Jul 25, 2023
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
11,651,931
Issue date
May 16, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,569,068
Issue date
Jan 31, 2023
Tokyo Electron Limited
Kazushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply system, substrate processing apparatus, and control meth...
Patent number
11,538,665
Issue date
Dec 27, 2022
Tokyo Electron Limited
Atsushi Sawachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method of workpiece
Patent number
11,538,704
Issue date
Dec 27, 2022
Disco Corporation
Yoshio Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,387,083
Issue date
Jul 12, 2022
Shibaura Mechatronics Corporation
Hidehito Azumano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
11,322,351
Issue date
May 3, 2022
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam etching apparatus
Patent number
11,120,975
Issue date
Sep 14, 2021
Research & Business Foundation Sungkyunkwan University
Geun Young Yeom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,031,215
Issue date
Jun 8, 2021
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
10,546,748
Issue date
Jan 28, 2020
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and evacuation method for same
Patent number
10,304,655
Issue date
May 28, 2019
Hitachi High-Technologies Corporation
Yuuta Ebine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for generating a composition-controlled and intensity-contro...
Patent number
10,229,809
Issue date
Mar 12, 2019
Nanotech Analysis S.R.L.
Gianpiero Mensa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection device
Patent number
10,157,722
Issue date
Dec 18, 2018
Ebara Corporation
Masahiro Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope
Patent number
9,773,639
Issue date
Sep 26, 2017
Jeol Ltd.
Kazuya Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-pressure plasma system with sequential control process
Patent number
9,741,547
Issue date
Aug 22, 2017
Christof-Herbert Diener
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for closing an opening in a chamber wall
Patent number
9,383,037
Issue date
Jul 5, 2016
VAT Holding AG
Bernhard Duelli
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Sample observing device and sample observing method
Patent number
8,884,225
Issue date
Nov 11, 2014
Ebara Corporation
Tsutomu Karimata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser ion source
Patent number
8,742,362
Issue date
Jun 3, 2014
Kabushiki Kaisha Toshiba
Kazuo Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam column and methods of using same
Patent number
8,461,526
Issue date
Jun 11, 2013
KLA-Tencor Corporation
Marian Mankos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for introducing gas for analysis device
Patent number
8,276,470
Issue date
Oct 2, 2012
Toyota Jidosha Kabushiki Kaisha
Keisuke Kishita
G01 - MEASURING TESTING
Information
Patent Grant
Focused ION beam apparatus
Patent number
7,667,209
Issue date
Feb 23, 2010
Hitachi High-Technologies Corporation
Hiroyasu Kaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double slit-valve doors for plasma processing
Patent number
7,147,719
Issue date
Dec 12, 2006
Applied Materials, Inc.
Michael D. Welch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam lithography apparatus with self actuated vacuum bypas...
Patent number
6,724,001
Issue date
Apr 20, 2004
International Business Machines Corporation
David J. Pinckney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double slit-valve doors for plasma processing
Patent number
6,647,918
Issue date
Nov 18, 2003
Applied Materials, Inc.
Michael D. Welch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for fabricating a semiconductor device
Patent number
6,524,430
Issue date
Feb 25, 2003
Jusung Engineering Co., Ltd.
Kyung Sik Shim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double slit-valve doors for plasma processing
Patent number
6,192,827
Issue date
Feb 27, 2001
Applied Materials, Inc.
Michael D. Welch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning process end point determination using throttle valve position
Patent number
6,170,492
Issue date
Jan 9, 2001
Applied Materials, Inc.
Hiroyuki Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film forming equipment
Patent number
6,074,538
Issue date
Jun 13, 2000
Ohmi; Tadahiro
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reduced pressure device and method of making
Patent number
5,989,722
Issue date
Nov 23, 1999
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
Publication number
20230402268
Publication date
Dec 14, 2023
Applied Materials, Inc.
Songjae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Publication number
20230352275
Publication date
Nov 2, 2023
SEMES CO., LTD.
Yoon Jong Ju
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20230317437
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20230317480
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Masahiro DOGOME
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20230260738
Publication date
Aug 17, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND APPARATUSES FOR CONTAMINATION-FREE VACUUM TRANSFER OF S...
Publication number
20230253176
Publication date
Aug 10, 2023
FEI Company
Jakub Kuba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DELIVERY OF HIGH CONCENTRATIONS OF MOLECULAR HYDROGEN AND OTHER GAS...
Publication number
20230245862
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Anthony John RICCI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION APPARATUS AND METHOD OF CLEANSING THE SAME
Publication number
20230227971
Publication date
Jul 20, 2023
SAMSUNG DISPLAY CO., LTD.
JONGBUN HAN
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230230818
Publication date
Jul 20, 2023
Kokusai Electric Corporation
Tetsuaki Inada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERMITTENT STAGNANT FLOW
Publication number
20230230820
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Douglas L. KEIL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF
Publication number
20230229133
Publication date
Jul 20, 2023
TENGXI TECHNOLOGY CO. LTD.
WEI-HAN LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20230141911
Publication date
May 11, 2023
TOKYO ELECTRON LIMITED
Dai KITAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20230056750
Publication date
Feb 23, 2023
Tokyo Electron Limited
Katsutoshi ISHIGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-FREQUENCY GROUNDING DEVICE AND VACUUM VALVE HAVING HIGH-FREQUE...
Publication number
20220375732
Publication date
Nov 24, 2022
VAT HOLDING AG
Arthur Büchel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20220285122
Publication date
Sep 8, 2022
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20220270877
Publication date
Aug 25, 2022
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Beam Processing Apparatus and Method for Controlling Operation...
Publication number
20220238310
Publication date
Jul 28, 2022
JEOL Ltd.
Tatsuhito Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220230898
Publication date
Jul 21, 2022
TOKYO ELECTRON LIMITED
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20220165571
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
Publication number
20210320027
Publication date
Oct 14, 2021
Applied Materials, Inc.
Zubin Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20210265163
Publication date
Aug 26, 2021
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20210257195
Publication date
Aug 19, 2021
LAM RESEARCH CORPORATION
John Stephen DREWERY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND CONTROL METH...
Publication number
20210134564
Publication date
May 6, 2021
TOKYO ELECTRON LIMITED
Atsushi SAWACHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD OF WORKPIECE
Publication number
20210090926
Publication date
Mar 25, 2021
Disco Corporation
Yoshio WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING
Publication number
20200411342
Publication date
Dec 31, 2020
Applied Materials, Inc.
Christopher R. Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR FORMING A LAYER ON A SEMICONDUCTOR SUBSTRATE,...
Publication number
20200105516
Publication date
Apr 2, 2020
CENTROTHERM INTERNATIONAL AG
Jens-Uwe Fuchs
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20200105507
Publication date
Apr 2, 2020
SHIBAURA MECHATRONICS CORPORATION
Hidehito Azumano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20200105509
Publication date
Apr 2, 2020
LAM RESEARCH CORPORATION
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ASSEMBLY AND METHOD FOR THE TREATMENT OF OBJECTS
Publication number
20200061679
Publication date
Feb 27, 2020
Reylon Plasma GmbH
Stefan Nettesheim
B08 - CLEANING
Information
Patent Application
MULTIZONE GAS DISTRIBUTION APPARATUS
Publication number
20190311887
Publication date
Oct 10, 2019
Applied Materials, Inc.
Akshay GUNAJI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...