Vertical carrier comprising wall type elements whereby the substrates are horizontally supported

Industry

CPC
H01L21/6732

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6732Vertical carrier comprising wall type elements whereby the substrates are horizontally supported

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor apparatus and method of collecting residues
- Patent number 12,217,989
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for moving an object into a processing station, c...
- Patent number 12,205,838
- Issue date Jan 21, 2025
- Atotech Deutschland GmbH
- Rüdiger Pretscher
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Fume-removing device
- Patent number 12,176,230
- Issue date Dec 24, 2024
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for inserting a fastener into a wafer carrier
- Patent number 12,151,324
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Separators for handling, transporting, or storing semiconductor wafers
- Patent number 12,106,988
- Issue date Oct 1, 2024
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bearing assembly for accommodating device for semiconductor apparatus
- Patent number 12,085,124
- Issue date Sep 10, 2024
- ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD.
- Bin Hua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning device
- Patent number 12,051,598
- Issue date Jul 30, 2024
- SK SILTRON CO., LTD.
- Se Geun Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device of mass transferring chips
- Patent number 12,046,496
- Issue date Jul 23, 2024
- AU OPTRONICS CORPORATION
- Wei-Chieh Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer boats for supporting semiconductor wafers in a furnace
- Patent number 12,046,495
- Issue date Jul 23, 2024
- GlobalWafers Co., Ltd.
- Sumeet S. Bhagavat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mapping apparatus and method therefor
- Patent number 12,002,696
- Issue date Jun 4, 2024
- BROOKS AUTOMATION US, LLC
- Radik Sunugatov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Loading cassette for substrate including glass and substrate loadin...
- Patent number 11,981,501
- Issue date May 14, 2024
- ABSOLICS INC.
- Sungjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage container
- Patent number 11,984,336
- Issue date May 14, 2024
- Pico & Tera Co., Ltd.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable device and an adjustable storage box
- Patent number 11,972,962
- Issue date Apr 30, 2024
- DLY Technologies Inc.
- Shih Feng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magazine supporting equipment and semiconductor manufacturing appar...
- Patent number 11,955,359
- Issue date Apr 9, 2024
- Samsung Electronics Co., Ltd.
- Jun Young Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier positioning member and carrier placement platform
- Patent number 11,923,224
- Issue date Mar 5, 2024
- Mitsubishi Electric Corporation
- Koichiro Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,915,947
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing system and method
- Patent number 11,901,207
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Hung Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming device
- Patent number 11,891,692
- Issue date Feb 6, 2024
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate container valve assemblies
- Patent number 11,869,787
- Issue date Jan 9, 2024
- Entegris, Inc.
- Matthew A Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,862,483
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Stacking apparatus and stacking method
- Patent number 11,823,935
- Issue date Nov 21, 2023
- Nikon Corporation
- Hajime Mitsuishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,823,929
- Issue date Nov 21, 2023
- SCREEN Holdings Co., Ltd.
- Yuzo Uchida
- B08 - CLEANING
Information Patent Grant
Open-ended type substrate receiving cassette and system thereof
- Patent number 11,798,829
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Yoon Su Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing chamber with annealing mini-environment
- Patent number 11,791,176
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Michael Honan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor wafer storage device
- Patent number 11,764,089
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for removing a fastener from a wafer carrier
- Patent number 11,752,582
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Container, container partition plate, substrate processing system,...
- Patent number 11,735,448
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container
- Patent number 11,735,449
- Issue date Aug 22, 2023
- Shin-Etsu Polymer Co., Ltd.
- Kazumasa Onuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for conducting plasma surface treatment, board treatment...
- Patent number 11,728,142
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250038028
- Publication date Jan 30, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-TEMPERATURE TUBE FURNACE
- Publication number 20250029848
- Publication date Jan 23, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
- Publication number 20240429080
- Publication date Dec 26, 2024
- Daewon Semiconductor Packaging Industrial Company
- Sunna Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HANDLING ASSEMBLY
- Publication number 20240395586
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Adriaan Garssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES
- Publication number 20240387215
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INSERTING A FASTENER INTO A WAFER CARRIER
- Publication number 20240383082
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME
- Publication number 20240379394
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Huang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS
- Publication number 20240339349
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Joseph Sommers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING THIN FILM DEVICES
- Publication number 20240339553
- Publication date Oct 10, 2024
- Solaires Entreprises Inc.
- Alfonso Fabian de la Fuente Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE OF MASS TRANSFERRING CHIPS
- Publication number 20240332049
- Publication date Oct 3, 2024
- AU OPTRONICS CORPORATION
- Wei-Chieh CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOATS FOR SUPPORTING SEMICONDUCTOR WAFERS IN A FURNACE
- Publication number 20240304482
- Publication date Sep 12, 2024
- GLOBALWAFERS CO., LTD.
- Sumeet S. Bhagavat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Mapping Apparatus And Method Therefor
- Publication number 20240290642
- Publication date Aug 29, 2024
- BROOKS AUTOMATION US, LLC
- Radik SUNUGATOV
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR WAFER PROCESSING SYSTEM AND METHOD
- Publication number 20240258145
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Hung HSIAO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20240242992
- Publication date Jul 18, 2024
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...
- Publication number 20240234187
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20240213059
- Publication date Jun 27, 2024
- Semes Co., Ltd.
- Hee Man AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEARING ASSEMBLY FOR ACCOMMODATING DEVICE FOR SEMICONDUCTOR APPARATUS
- Publication number 20240209893
- Publication date Jun 27, 2024
- ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD.
- Bin HUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED...
- Publication number 20240162068
- Publication date May 16, 2024
- Entegris, Inc.
- Jack Dunlope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240141484
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Yasuaki KOMAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT MEMBER AND METHOD OF MANUFACTURING A WAFER SUPPORT ME...
- Publication number 20240145282
- Publication date May 2, 2024
- Intel Corporation
- Peter DAVISON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105483
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SHIFT DETECTION
- Publication number 20240105480
- Publication date Mar 28, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Ming-Sze Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT METHOD AND APPARATUS
- Publication number 20240079263
- Publication date Mar 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Hung HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20240011154
- Publication date Jan 11, 2024
- Samsung Electronics Co., Ltd.
- HYUNJU LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH ANNEALING MINI-ENVIRONMENT
- Publication number 20230420275
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Michael Honan
- C30 - CRYSTAL GROWTH
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230377925
- Publication date Nov 23, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER STORAGE DEVICE
- Publication number 20230377922
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Ju- CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER FILM FRAME CARRIER
- Publication number 20230360940
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jason A. Rye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230343609
- Publication date Oct 26, 2023
- WONIK IPS CO., LTD.
- Min Su KIM
- H01 - BASIC ELECTRIC ELEMENTS

Vertical carrier comprising wall type elements whereby the substrates are horizontally supported

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor apparatus and method of collecting residues

Device and method for moving an object into a processing station, c...

Fume-removing device

Methods for inserting a fastener into a wafer carrier

Separators for handling, transporting, or storing semiconductor wafers

Bearing assembly for accommodating device for semiconductor apparatus

Wafer cleaning device

Device of mass transferring chips

Wafer boats for supporting semiconductor wafers in a furnace

Substrate mapping apparatus and method therefor

Loading cassette for substrate including glass and substrate loadin...

Wafer storage container

Adjustable device and an adjustable storage box

Magazine supporting equipment and semiconductor manufacturing appar...

Carrier positioning member and carrier placement platform

Substrate processing apparatus and substrate processing method

Semiconductor wafer processing system and method

Film-forming device

Substrate container valve assemblies

Substrate processing method and substrate processing apparatus

Thermal processing susceptor

Stacking apparatus and stacking method

Substrate treating apparatus

Open-ended type substrate receiving cassette and system thereof

Processing chamber with annealing mini-environment

Semiconductor wafer storage device

Methods for removing a fastener from a wafer carrier

Container, container partition plate, substrate processing system,...

Substrate storage container

Apparatus for conducting plasma surface treatment, board treatment...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

HIGH-TEMPERATURE TUBE FURNACE

SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS

WAFER HANDLING ASSEMBLY

SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES

SYSTEMS FOR INSERTING A FASTENER INTO A WAFER CARRIER

SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME

ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS

APPARATUS FOR MANUFACTURING THIN FILM DEVICES

DEVICE OF MASS TRANSFERRING CHIPS

WAFER BOATS FOR SUPPORTING SEMICONDUCTOR WAFERS IN A FURNACE

Substrate Mapping Apparatus And Method Therefor

SEMICONDUCTOR WAFER PROCESSING SYSTEM AND METHOD

WAFER STORAGE CONTAINER

SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...

SUBSTRATE PROCESSING APPARATUS AND METHOD

BEARING ASSEMBLY FOR ACCOMMODATING DEVICE FOR SEMICONDUCTOR APPARATUS

SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

WAFER SUPPORT MEMBER AND METHOD OF MANUFACTURING A WAFER SUPPORT ME...

THERMAL PROCESSING SUSCEPTOR

SUBSTRATE TREATING APPARATUS

WAFER SHIFT DETECTION

WAFER TRANSPORT METHOD AND APPARATUS

SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING...

PROCESSING CHAMBER WITH ANNEALING MINI-ENVIRONMENT

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

SEMICONDUCTOR WAFER STORAGE DEVICE

WAFER FILM FRAME CARRIER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD