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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/16
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Patents Grants
last 30 patents
Information
Patent Grant
Microwave driven plasma ion source
Patent number
12,207,383
Issue date
Jan 21, 2025
Tofwerk AG
Martin Tanner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
12,106,929
Issue date
Oct 1, 2024
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
Patent number
12,033,828
Issue date
Jul 9, 2024
NHV CORPORATION
Masahiro Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,996,271
Issue date
May 28, 2024
Tokyo Electron Limited
Satoshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
Patent number
11,984,293
Issue date
May 14, 2024
NHV CORPORATION
Masahiro Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum compatible X-ray shield
Patent number
11,972,920
Issue date
Apr 30, 2024
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Ion source cathode
Patent number
11,961,696
Issue date
Apr 16, 2024
Ion Technology Solutions, LLC
Manuel A. Jerez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,830,704
Issue date
Nov 28, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Faraday shield and apparatus for treating substrate
Patent number
11,817,291
Issue date
Nov 14, 2023
PSK Inc.
Mu-Kyeom Mun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for directional processing
Patent number
11,791,126
Issue date
Oct 17, 2023
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Examining, analyzing and/or processing an object using an object re...
Patent number
11,721,518
Issue date
Aug 8, 2023
Carl Zeiss Microscopy GmbH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,705,308
Issue date
Jul 18, 2023
Tokyo Electron Limited
Shintaro Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
High-frequency power circuit, plasma treatment apparatus, and plasm...
Patent number
11,665,809
Issue date
May 30, 2023
ULVAC, INC.
Kenta Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
11,651,931
Issue date
May 16, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,574,798
Issue date
Feb 7, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample attachment device
Patent number
11,521,823
Issue date
Dec 6, 2022
Jeol Ltd.
Takahisa Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,495,439
Issue date
Nov 8, 2022
Tokyo Electron Limited
Kohei Mizota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,380,515
Issue date
Jul 5, 2022
HITACHI HIGH-TECH CORPORATION
Keiichiro Hosobuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mass spectrometer
Patent number
11,270,875
Issue date
Mar 8, 2022
Shimadzu Corporation
Takuro Kishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample exchange device and charged particle beam device
Patent number
11,205,558
Issue date
Dec 21, 2021
Jeol Ltd.
Naoki Fujimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Time-of-flight mass spectrometer
Patent number
11,152,202
Issue date
Oct 19, 2021
Shimadzu Corporation
Tomoya Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus and plasma etching method
Patent number
11,145,493
Issue date
Oct 12, 2021
Tokyo Electron Limited
Satoshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,145,491
Issue date
Oct 12, 2021
Kokusai Electric Corporation
Masaki Murobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed CFE electron source with fast blanker for ultrafast TEM appl...
Patent number
11,114,272
Issue date
Sep 7, 2021
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Vacuum cooling apparatus and ion milling apparatus
Patent number
11,043,355
Issue date
Jun 22, 2021
Jeol Ltd.
Tsutomu Negishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source, ion implantation apparatus, and ion source operating me...
Patent number
10,910,192
Issue date
Feb 2, 2021
ULVAC, Inc.
Akio Higashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with multiple configurations
Patent number
10,896,799
Issue date
Jan 19, 2021
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20250079112
Publication date
Mar 6, 2025
Hitachi High-Tech Corporation
Hiroshi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL SCAN TYPE ION IMPLANT SYSTEM
Publication number
20250062100
Publication date
Feb 20, 2025
Ninebell Co., Ltd
Moon Soo CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL CONDITIONING ENCLOSURE FOR A CHARGED PARTICLE INSTRUMENT
Publication number
20250054723
Publication date
Feb 13, 2025
FEI Company
Rens van Alebeek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optical Apparatus and Charged Particle Beam Apparatus
Publication number
20250046566
Publication date
Feb 6, 2025
HITACHI HIGH-TECH CORPORATION
Masao YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electronic Cleaning Device
Publication number
20250037962
Publication date
Jan 30, 2025
Hitachi High-Tech Corporation
Yuto KUBONAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
Publication number
20240412940
Publication date
Dec 12, 2024
AIRSEM TECHNOLOGIES LTD.
Jenny SHKLOVSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM SYSTEM
Publication number
20240371598
Publication date
Nov 7, 2024
V TECHNOLOGY CO., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Concentrated Solar Irradiation of Targets in Plasmas
Publication number
20240363308
Publication date
Oct 31, 2024
National Technology & Engineering Solutions of Sandia, LLC
Jeffrey Daniel ENGERER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF
Publication number
20240282548
Publication date
Aug 22, 2024
Samsung Electronics Co., Ltd.
Yeoseon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIAL SURFACE REFORMING APPARATUS USING ION IMPLANTATION
Publication number
20240258069
Publication date
Aug 1, 2024
Radpion Inc.
Myung Jin KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM IRRADIATION DEVICE
Publication number
20240186099
Publication date
Jun 6, 2024
NHV CORPORATION
Tomonori SHIRAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
Publication number
20240170260
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Taro IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source Cathode
Publication number
20240145207
Publication date
May 2, 2024
Ion Technology Solutions, LLC
Manuel A. Jerez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLED ELECTRODE TO LIMIT DEPOSITION RATES AND DIST...
Publication number
20240145206
Publication date
May 2, 2024
Applied Materials, Inc.
James P. Buonodono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHLORINE-CONTAINING PRECURSORS FOR ION IMPLANTATION SYSTEMS AND REL...
Publication number
20240062987
Publication date
Feb 22, 2024
Entegris, Inc.
Joseph R. Despres
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS APPARATUS
Publication number
20230395353
Publication date
Dec 7, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
DUAL-WALL MULTI-STRUCTURE QUARTZ CYLINDER DEVICE
Publication number
20230352267
Publication date
Nov 2, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...
Publication number
20230326707
Publication date
Oct 12, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
Publication number
20230282442
Publication date
Sep 7, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20230260738
Publication date
Aug 17, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
Publication number
20230238213
Publication date
Jul 27, 2023
Carl Zeiss SMT GMBH
Ottmar Hoinkis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY
Publication number
20230236070
Publication date
Jul 27, 2023
Edwards Vacuum LLC
Budd Edward Faulkner
G01 - MEASURING TESTING
Information
Patent Application
Physical Package for Optical Lattice Clock
Publication number
20230229115
Publication date
Jul 20, 2023
JEOL Ltd.
Shigenori Tsuji
G04 - HOROLOGY
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD
Publication number
20230162946
Publication date
May 25, 2023
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE DRIVEN PLASMA ION SOURCE
Publication number
20230164903
Publication date
May 25, 2023
TOFWERK AG
Martin TANNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM COMPATIBLE X-RAY SHIELD
Publication number
20230162942
Publication date
May 25, 2023
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20230139507
Publication date
May 4, 2023
HITACHI HIGH-TECH CORPORATION
Shiano ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-FREQUENCY POWER CIRCUIT, PLASMA TREATMENT APPARATUS, AND PLASM...
Publication number
20220377870
Publication date
Nov 24, 2022
ULVAC, Inc.
Kenta Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20220285122
Publication date
Sep 8, 2022
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS