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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/16
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum compatible X-ray shield
Patent number
11,972,920
Issue date
Apr 30, 2024
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Ion source cathode
Patent number
11,961,696
Issue date
Apr 16, 2024
Ion Technology Solutions, LLC
Manuel A. Jerez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,830,704
Issue date
Nov 28, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Faraday shield and apparatus for treating substrate
Patent number
11,817,291
Issue date
Nov 14, 2023
PSK Inc.
Mu-Kyeom Mun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for directional processing
Patent number
11,791,126
Issue date
Oct 17, 2023
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Examining, analyzing and/or processing an object using an object re...
Patent number
11,721,518
Issue date
Aug 8, 2023
Carl Zeiss Microscopy GmbH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Plasma processing apparatus
Patent number
11,705,308
Issue date
Jul 18, 2023
Tokyo Electron Limited
Shintaro Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-frequency power circuit, plasma treatment apparatus, and plasm...
Patent number
11,665,809
Issue date
May 30, 2023
ULVAC, INC.
Kenta Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Refillable ion chamber with automated purging system
Patent number
11,651,931
Issue date
May 16, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,574,798
Issue date
Feb 7, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample attachment device
Patent number
11,521,823
Issue date
Dec 6, 2022
Jeol Ltd.
Takahisa Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,495,439
Issue date
Nov 8, 2022
Tokyo Electron Limited
Kohei Mizota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,380,515
Issue date
Jul 5, 2022
HITACHI HIGH-TECH CORPORATION
Keiichiro Hosobuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mass spectrometer
Patent number
11,270,875
Issue date
Mar 8, 2022
Shimadzu Corporation
Takuro Kishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample exchange device and charged particle beam device
Patent number
11,205,558
Issue date
Dec 21, 2021
Jeol Ltd.
Naoki Fujimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Time-of-flight mass spectrometer
Patent number
11,152,202
Issue date
Oct 19, 2021
Shimadzu Corporation
Tomoya Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus and plasma etching method
Patent number
11,145,493
Issue date
Oct 12, 2021
Tokyo Electron Limited
Satoshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,145,491
Issue date
Oct 12, 2021
Kokusai Electric Corporation
Masaki Murobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed CFE electron source with fast blanker for ultrafast TEM appl...
Patent number
11,114,272
Issue date
Sep 7, 2021
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Vacuum cooling apparatus and ion milling apparatus
Patent number
11,043,355
Issue date
Jun 22, 2021
Jeol Ltd.
Tsutomu Negishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source, ion implantation apparatus, and ion source operating me...
Patent number
10,910,192
Issue date
Feb 2, 2021
ULVAC, Inc.
Akio Higashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with multiple configurations
Patent number
10,896,799
Issue date
Jan 19, 2021
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum apparatus and charged particle beam writing apparatus
Patent number
10,867,769
Issue date
Dec 15, 2020
NuFlare Technology, Inc.
Keita Ideno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle radiation device
Patent number
10,840,059
Issue date
Nov 17, 2020
HITACHI HIGH-TECH CORPORATION
Kentaro Shigeoka
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for proactive mitigation of coronal discharge and flash-over...
Patent number
10,842,007
Issue date
Nov 17, 2020
VISURAY INTECH LTD (BVI)
Philip Teague
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
X-ray and particle shield for improved vacuum conductivity
Patent number
10,748,740
Issue date
Aug 18, 2020
FEI Company
Rients Jan De Groot
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Simplified particle emitter and method of operating thereof
Patent number
10,699,867
Issue date
Jun 30, 2020
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Ion Source Cathode
Publication number
20240145207
Publication date
May 2, 2024
Ion Technology Solutions, LLC
Manuel A. Jerez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLED ELECTRODE TO LIMIT DEPOSITION RATES AND DIST...
Publication number
20240145206
Publication date
May 2, 2024
Applied Materials, Inc.
James P. Buonodono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHLORINE-CONTAINING PRECURSORS FOR ION IMPLANTATION SYSTEMS AND REL...
Publication number
20240062987
Publication date
Feb 22, 2024
Entegris, Inc.
Joseph R. Despres
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS APPARATUS
Publication number
20230395353
Publication date
Dec 7, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
DUAL-WALL MULTI-STRUCTURE QUARTZ CYLINDER DEVICE
Publication number
20230352267
Publication date
Nov 2, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...
Publication number
20230326707
Publication date
Oct 12, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
Publication number
20230282442
Publication date
Sep 7, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20230260738
Publication date
Aug 17, 2023
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
Publication number
20230238213
Publication date
Jul 27, 2023
Carl Zeiss SMT GMBH
Ottmar Hoinkis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM APPARATUS TEMPERATURE SENSOR ASSEMBLY
Publication number
20230236070
Publication date
Jul 27, 2023
Edwards Vacuum LLC
Budd Edward Faulkner
G01 - MEASURING TESTING
Information
Patent Application
Physical Package for Optical Lattice Clock
Publication number
20230229115
Publication date
Jul 20, 2023
JEOL Ltd.
Shigenori Tsuji
G04 - HOROLOGY
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD
Publication number
20230162946
Publication date
May 25, 2023
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE DRIVEN PLASMA ION SOURCE
Publication number
20230164903
Publication date
May 25, 2023
TOFWERK AG
Martin TANNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM COMPATIBLE X-RAY SHIELD
Publication number
20230162942
Publication date
May 25, 2023
FEI Company
Pleun Dona
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20230139507
Publication date
May 4, 2023
HITACHI HIGH-TECH CORPORATION
Shiano ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-FREQUENCY POWER CIRCUIT, PLASMA TREATMENT APPARATUS, AND PLASM...
Publication number
20220377870
Publication date
Nov 24, 2022
ULVAC, Inc.
Kenta Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
Publication number
20220285122
Publication date
Sep 8, 2022
Varian Medical Systems, Inc.
Amir Shojaei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FARADAY SHIELD AND APPARATUS FOR TREATING SUBSTRATE
Publication number
20220230839
Publication date
Jul 21, 2022
PSK INC.
Mu-Kyeom MUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCED SUBSTRATE PROCESS CHAMBER CAVITY VOLUME
Publication number
20220223367
Publication date
Jul 14, 2022
Applied Materials, Inc.
Kirankumar Neelasandra SAVANDAIAH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NANOFLUIDIC CELL AND LOADING PLATFORM
Publication number
20220102110
Publication date
Mar 31, 2022
Germán SCIAINI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM
Publication number
20220059311
Publication date
Feb 24, 2022
ASML NETHERLANDS B.V.
Yongxin WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPACT DEVICE FOR PULSED ELECTRIC FIELDS IN A TREATMENT CELL
Publication number
20220028646
Publication date
Jan 27, 2022
Deutsches Institut fur Lebensmitteltechnik e.V.
Tobias Kleemann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20210407767
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Satoshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20210383941
Publication date
Dec 9, 2021
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RE...
Publication number
20210241992
Publication date
Aug 5, 2021
CARL ZEISS MICROSCOPY GMBH
Andreas Schertel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210142983
Publication date
May 13, 2021
TOKYO ELECTRON LIMITED
Shintaro IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Attachment Device
Publication number
20210098225
Publication date
Apr 1, 2021
JEOL Ltd.
Takahisa Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED CFE ELECTRON SOURCE WITH FAST BLANKER FOR ULTRAFAST TEM APPL...
Publication number
20210090846
Publication date
Mar 25, 2021
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus For Directional Processing
Publication number
20210066023
Publication date
Mar 4, 2021
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS