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G01N21/9503
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PHYSICS
G01
Measuring instruments
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N21/00
Investigating or analysing materials by the use of optical means
Current Industry
G01N21/9503
Wafer edge inspection
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor wafer evaluation method and semiconductor wafer manuf...
Patent number
11,955,390
Issue date
Apr 9, 2024
Sumco Corporation
Takahiro Nagasawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor edge and bevel inspection tool system
Patent number
11,927,545
Issue date
Mar 12, 2024
Camtek Ltd.
Carmel Yehuda Drillman
G01 - MEASURING TESTING
Information
Patent Grant
Cleaved semiconductor wafer camera system
Patent number
11,921,054
Issue date
Mar 5, 2024
GlobalWafers Co., Ltd.
Benjamin Michael Meyer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of monitoring semiconductor process
Patent number
11,887,898
Issue date
Jan 30, 2024
Winbond Electronics Corp.
Chien-Yen Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor inspection tool system and method for wafer edge insp...
Patent number
11,828,713
Issue date
Nov 28, 2023
Camtek Ltd.
Carmel Yehuda Drillman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge position detecting apparatus
Patent number
11,819,950
Issue date
Nov 21, 2023
Disco Corporation
Atsushi Komatsu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Processing apparatus for forming a coating film on a substrate havi...
Patent number
11,791,162
Issue date
Oct 17, 2023
Tokyo Electron Limited
Yasuaki Noda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for monitoring edge bevel removal area in semi...
Patent number
11,781,995
Issue date
Oct 10, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chao-Tung Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Indicating a probing target for a fabricated electronic circuit
Patent number
11,714,121
Issue date
Aug 1, 2023
Tektronix, Inc.
David Everett Burgess
G01 - MEASURING TESTING
Information
Patent Grant
System and method for inspection and metrology of four sides of sem...
Patent number
11,686,690
Issue date
Jun 27, 2023
KLA Corporation
Bert Vangilbergen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography simulation method
Patent number
11,675,958
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Fu An Tien
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for orientator based wafer defect sensing
Patent number
11,664,260
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yan-Hong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic detection method and automatic detection system for detec...
Patent number
11,644,427
Issue date
May 9, 2023
United Microelectronics Corp.
Chia-Feng Hsiao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate edge test apparatus, system, and method
Patent number
11,639,898
Issue date
May 2, 2023
Corning Incorporated
Sung-chan Hwang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate processing method of controlling discharge angle and disc...
Patent number
11,640,911
Issue date
May 2, 2023
Tokyo Electron Limited
Tatsuhiro Ueki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Detecting damaged semiconductor wafers utilizing a semiconductor wa...
Patent number
11,600,504
Issue date
Mar 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chen Min Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for evaluating edge shape of silicon wafer, apparatus for ev...
Patent number
11,486,833
Issue date
Nov 1, 2022
Shin-Etsu Handotai Co., Ltd.
Masahiro Sakurada
B24 - GRINDING POLISHING
Information
Patent Grant
Method for reconstructing an image
Patent number
11,367,178
Issue date
Jun 21, 2022
V5 TECHNOLOGIES CO., LTD.
Sheng-Chih Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate inspection method and substrate inspection apparatus
Patent number
11,268,912
Issue date
Mar 8, 2022
Tokyo Electron Limited
Kazuya Hisano
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for monitoring edge bevel removal area in semi...
Patent number
11,268,913
Issue date
Mar 8, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Chao-Tung Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate processing apparatus and substrate processing method of c...
Patent number
11,244,838
Issue date
Feb 8, 2022
Tokyo Electron Limited
Tatsuhiro Ueki
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Optical reflective edge or contrast sensor
Patent number
11,112,356
Issue date
Sep 7, 2021
Photon Control Inc.
Yuriy Syvenkyy
G01 - MEASURING TESTING
Information
Patent Grant
Methods for polishing semiconductor substrates that adjust for pad-...
Patent number
11,081,359
Issue date
Aug 3, 2021
GlobalWafers Co., Ltd.
Ichiro Yoshimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography simulation method
Patent number
11,080,458
Issue date
Aug 3, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Fu An Tien
G01 - MEASURING TESTING
Information
Patent Grant
Processing apparatus
Patent number
11,031,277
Issue date
Jun 8, 2021
Disco Corporation
Mayumi Kusakawa
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Examination of a semiconductor specimen
Patent number
11,022,566
Issue date
Jun 1, 2021
Applied Materials Israel Ltd.
Dror Alumot
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Design-rule checking for curvilinear device features
Patent number
10,997,355
Issue date
May 4, 2021
GLOBALFOUNDRIES U.S. INC.
Ahmed Hassan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for orientator based wafer defect sensing
Patent number
10,978,331
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Yan-Hong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect observation system and defect observation method for semicon...
Patent number
10,971,325
Issue date
Apr 6, 2021
HITACHI HIGH-TECH CORPORATION
Minoru Harada
G01 - MEASURING TESTING
Information
Patent Grant
Method, computer program product and system for detecting manufactu...
Patent number
10,957,567
Issue date
Mar 23, 2021
Applied Materials Israel Ltd.
Moshe Amzaleg
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR INSPECTION TOOL SYSTEM AND METHOD FOR WAFER EDGE INSP...
Publication number
20240003826
Publication date
Jan 4, 2024
CAMTEK LTD
Carmel Yehuda DRILLMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
Publication number
20230395380
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Yasuaki NODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR MONITORING EDGE BEVEL REMOVAL AREA IN SEMI...
Publication number
20230375482
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHAO-TUNG WU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EDGE INSPECTION OF SILICON WAFERS BY IMAGE STACKING
Publication number
20230349838
Publication date
Nov 2, 2023
Applied Materials, Inc.
Asaf SCHLEZINGER
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGING DEVICE, INSPECTION DEVICE, INSPECTION METHOD AND SUBSTRATE...
Publication number
20230314343
Publication date
Oct 5, 2023
SCREEN Holdings Co., Ltd.
Daisuke Hishitani
G01 - MEASURING TESTING
Information
Patent Application
EDGE PORTION MEASURING APPARATUS AND METHOD FOR MEASURING EDGE PORTION
Publication number
20230258577
Publication date
Aug 17, 2023
Shin-Etsu Handotai Co., Ltd.
Shigeru Oba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT OBSERVATION METHOD, APPARATUS, AND PROGRAM
Publication number
20230238290
Publication date
Jul 27, 2023
HITACHI HIGH-TECH CORPORATION
Naoaki KONDO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETECTING DAMAGED SEMICONDUCTOR WAFERS UTILIZING A SEMICONDUCTOR WA...
Publication number
20230207357
Publication date
Jun 29, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen Min LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECT, DEVICE, AND STORAGE MEDIUM
Publication number
20230011569
Publication date
Jan 12, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
CHEN-HAO CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE EDGE TEST APPARATUS, SYSTEM, AND METHOD
Publication number
20230003661
Publication date
Jan 5, 2023
Corning Incorporated
Sung-chan Hwang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARACTERIZATION OF HIGH-SPEED ELECTRO-OPTIC DEVICES WITHOUT OPTICA...
Publication number
20220291142
Publication date
Sep 15, 2022
The Regents of the University of California
Shayan Mookherjea
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR AUTOMATICALLY DETECTING AND CONTROLLING DEFEC...
Publication number
20220223481
Publication date
Jul 14, 2022
XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY CO., LTD
Jiazhen ZHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUBST...
Publication number
20220199442
Publication date
Jun 23, 2022
TOKYO ELECTRON LIMITED
Hiromitsu SAKAUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MONITORING EDGE BEVEL REMOVAL AREA IN SEMI...
Publication number
20220187216
Publication date
Jun 16, 2022
Taiwan Semiconductor Manufacturing company Ltd.
CHAO-TUNG WU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRONIC SYSTEM AND METHOD OF SPECIMEN QUALIFICATION
Publication number
20220178845
Publication date
Jun 9, 2022
NANYA TECHNOLOGY CORPORATION
Hung-Chih CHANG
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEM...
Publication number
20220146438
Publication date
May 12, 2022
Bert Vangilbergen
G01 - MEASURING TESTING
Information
Patent Application
AUTOMATIC DETECTION METHOD AND AUTOMATIC DETECTION SYSTEM FOR DETEC...
Publication number
20220128485
Publication date
Apr 28, 2022
United Microelectronics Corp.
Chia-Feng HSIAO
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD OF C...
Publication number
20220122853
Publication date
Apr 21, 2022
TOKYO ELECTRON LIMITED
Tatsuhiro Ueki
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CLEAVED SEMICONDUCTOR WAFER CAMERA SYSTEM
Publication number
20220082510
Publication date
Mar 17, 2022
GLOBALWAFERS CO., LTD.
Benjamin Michael Meyer
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR RECONSTRUCTING AN IMAGE
Publication number
20220044377
Publication date
Feb 10, 2022
V5 TECHNOLOGIES CO., LTD.
Sheng-Chih HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INDICATING A PROBING TARGET FOR A FABRICATED ELECTRONIC CIRCUIT
Publication number
20220026483
Publication date
Jan 27, 2022
Tektronix, Inc.
David Everett Burgess
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTING DAMAGED SEMICONDUCTOR WAFERS UTILIZING A SEMICONDUCTOR WA...
Publication number
20210407832
Publication date
Dec 30, 2021
Taiwan Semiconductor Manufacturing Company Limited
Chen Min LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY SIMULATION METHOD
Publication number
20210357571
Publication date
Nov 18, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Fu An TIEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR ORIENTATOR BASED WAFER DEFECT SENSING
Publication number
20210225680
Publication date
Jul 22, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Yan-Hong LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DESIGN-RULE CHECKING FOR CURVILINEAR DEVICE FEATURES
Publication number
20210133293
Publication date
May 6, 2021
GLOBALFOUNDRIES U.S. Inc.
Ahmed Hassan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF MONITORING SEMICONDUCTOR PROCESS
Publication number
20210125880
Publication date
Apr 29, 2021
WINBOND ELECTRONICS CORP.
Chien-Yen Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM, SEMICONDUCTOR DEVICE INS...
Publication number
20210066140
Publication date
Mar 4, 2021
Samsung Electronics Co., Ltd.
Seunghwa Hyun
G01 - MEASURING TESTING
Information
Patent Application
Optical Reflective Edge or Contrast Sensor
Publication number
20210025819
Publication date
Jan 28, 2021
Photon Control Inc.
Yuriy SYVENKYY
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR WAFER EVALUATION METHOD AND SEMICONDUCTOR WAFER MANUF...
Publication number
20200411391
Publication date
Dec 31, 2020
SUMCO CORPORATION
Takahiro NAGASAWA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION METHOD AND APPARATUS
Publication number
20200264111
Publication date
Aug 20, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Pin CHOU
G01 - MEASURING TESTING