with angular orientation of the workpieces

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CPC
H01L21/67787

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67787with angular orientation of the workpieces

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Patents Grantslast 30 patents

Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method o...
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Information Patent Grant
Gas cushion apparatus and techniques for substrate coating
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Substrate coating apparatus for floating substrate and method
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- Tokyo Electron Limited
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Gas cushion apparatus and techniques for substrate coating
- Patent number 10,537,911
- Issue date Jan 21, 2020
- Kateeva, Inc.
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Information Patent Grant
Substrate supporting and transferring apparatus, method of supporti...
- Patent number 10,515,844
- Issue date Dec 24, 2019
- Samsung Electronics Co., Ltd.
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Gas cushion apparatus and techniques for substrate coating
- Patent number 9,586,226
- Issue date Mar 7, 2017
- Kateeva, Inc.
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Information Patent Grant
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- Patent number 7,428,959
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- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Wafer carrying device and wafer carrying method
- Patent number 5,921,744
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Wafer carrying device and wafer carrying method
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Information Patent Grant
Device for transporting and positioning semiconductor wafer-type wo...
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- Issue date Apr 28, 1992
- Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
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Information Patent Grant
Method provided for corrective lateral displacement of a longitudin...
- Patent number 4,664,951
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Information Patent Grant
Chip registration mechanism
- Patent number 4,600,936
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Information Patent Grant
Indexing method and apparatus
- Patent number 4,600,359
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Information Patent Grant
Disc orienting device
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- Hugo A. E. Santini
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Wafer probe apparatus with pneumatic wafer orienting mechanism
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Method and apparatus for locating and aligning flimsy sheets
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Automatic wafer orienting apparatus
- Patent number 3,982,627
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- Canon Kabushiki Kaisha
- Junji Isohata
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Information Patent Grant
3890508
- Patent number 3,890,508
- Issue date Jun 17, 1975
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
3797889
- Patent number 3,797,889
- Issue date Mar 19, 1974
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...
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- Takahiro FUJI
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Information Patent Application
GAS CUSHION APPARATUS AND TECHNIQUES FOR SUBSTRATE COATING
- Publication number 20190388928
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- Kateeva, Inc.
- Alexander Sou-Kang KO
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Substrate transferring apparatus
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- Publication date Aug 10, 2006
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- H01 - BASIC ELECTRIC ELEMENTS

with angular orientation of the workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser irradiation apparatus, laser irradiation method, and method o...

Gas cushion apparatus and techniques for substrate coating

Substrate coating apparatus for floating substrate and method

Gas cushion apparatus and techniques for substrate coating

Substrate supporting and transferring apparatus, method of supporti...

Gas cushion apparatus and techniques for substrate coating

Substrate transferring apparatus

Wafer carrying device and wafer carrying method

Wafer carrying device and wafer carrying method

Device for transporting and positioning semiconductor wafer-type wo...

Method provided for corrective lateral displacement of a longitudin...

Chip registration mechanism

Indexing method and apparatus

Disc orienting device

Wafer aligners

Wafer orienting apparatus

Wafer probe apparatus with pneumatic wafer orienting mechanism

Method and apparatus for locating and aligning flimsy sheets

Automatic wafer orienting apparatus

3890508

3797889

Patents Applicationslast 30 patents

CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...

GAS CUSHION APPARATUS AND TECHNIQUES FOR SUBSTRATE COATING

Substrate transferring apparatus