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with angular orientation of the workpieces
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H01L21/67787
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67787
with angular orientation of the workpieces
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Patents Grants
last 30 patents
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Patent Grant
Laser irradiation apparatus, laser irradiation method, and method o...
Patent number
11,355,343
Issue date
Jun 7, 2022
JSW AKTINA SYSTEM CO., LTD.
Takahiro Mikami
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas cushion apparatus and techniques for substrate coating
Patent number
11,338,319
Issue date
May 24, 2022
Kateeva, Inc.
Alexander Sou-Kang Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate coating apparatus for floating substrate and method
Patent number
10,991,608
Issue date
Apr 27, 2021
Tokyo Electron Limited
Yousuke Mine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas cushion apparatus and techniques for substrate coating
Patent number
10,537,911
Issue date
Jan 21, 2020
Kateeva, Inc.
Alexander Sou-Kang Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate supporting and transferring apparatus, method of supporti...
Patent number
10,515,844
Issue date
Dec 24, 2019
Samsung Electronics Co., Ltd.
Sang-Joon Hong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas cushion apparatus and techniques for substrate coating
Patent number
9,586,226
Issue date
Mar 7, 2017
Kateeva, Inc.
Alexander Sou-Kang Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate transferring apparatus
Patent number
7,428,959
Issue date
Sep 30, 2008
SFA Engineering Corp.
Jun-Mo Jung
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Wafer carrying device and wafer carrying method
Patent number
5,921,744
Issue date
Jul 13, 1999
Kabushiki-Kaisha Watanabe Shoko
Masayuki Toda
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Wafer carrying device and wafer carrying method
Patent number
5,518,360
Issue date
May 21, 1996
Kabushiki-Kaisha Watanabe Shoko
Masayuki Toda
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Device for transporting and positioning semiconductor wafer-type wo...
Patent number
5,108,513
Issue date
Apr 28, 1992
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
Alois Muller
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Method provided for corrective lateral displacement of a longitudin...
Patent number
4,664,951
Issue date
May 12, 1987
Energy Conversion Devices, Inc.
Joachim Doehler
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chip registration mechanism
Patent number
4,600,936
Issue date
Jul 15, 1986
International Business Machines Corporation
Henri A. Khoury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Indexing method and apparatus
Patent number
4,600,359
Issue date
Jul 15, 1986
United Technologies Corporation
Thomas G. Zemek
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Disc orienting device
Patent number
4,441,853
Issue date
Apr 10, 1984
Canon Kabushiki Kaisha
Masao Kosugi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer aligners
Patent number
4,425,075
Issue date
Jan 10, 1984
The Perkin-Elmer Corporation
Peter W. Quinn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer orienting apparatus
Patent number
4,242,038
Issue date
Dec 30, 1980
International Business Machines Corporation
Hugo A. E. Santini
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer probe apparatus with pneumatic wafer orienting mechanism
Patent number
4,219,110
Issue date
Aug 26, 1980
Hirohiko Ubukata
B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information
Patent Grant
Method and apparatus for locating and aligning flimsy sheets
Patent number
4,186,918
Issue date
Feb 5, 1980
International Business Machines Corporation
Walter W. Ficker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic wafer orienting apparatus
Patent number
3,982,627
Issue date
Sep 28, 1976
Canon Kabushiki Kaisha
Junji Isohata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3890508
Patent number
3,890,508
Issue date
Jun 17, 1975
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Grant
3797889
Patent number
3,797,889
Issue date
Mar 19, 1974
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Patents Applications
last 30 patents
Information
Patent Application
GAS CUSHION APPARATUS AND TECHNIQUES FOR SUBSTRATE COATING
Publication number
20190388928
Publication date
Dec 26, 2019
Kateeva, Inc.
Alexander Sou-Kang KO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate transferring apparatus
Publication number
20060177297
Publication date
Aug 10, 2006
Jun-Mo Jung
H01 - BASIC ELECTRIC ELEMENTS