with angular orientation of workpieces

Industry

CPC
H01L21/67796

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67796with angular orientation of workpieces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 12,159,800
- Issue date Dec 3, 2024
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus including bonding head
- Patent number 12,136,563
- Issue date Nov 5, 2024
- Samsung Electronics Co., Ltd.
- Mingu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 11,710,652
- Issue date Jul 25, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 11,699,610
- Issue date Jul 11, 2023
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 11,482,436
- Issue date Oct 25, 2022
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip bonding device
- Patent number 11,081,380
- Issue date Aug 3, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Feibiao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling equipment and method thereof
- Patent number 11,031,266
- Issue date Jun 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro device transferring method and micro device transferring appa...
- Patent number 10,714,369
- Issue date Jul 14, 2020
- KAISTAR Lighting (Xiamen) Co., Ltd
- Steve Mengyuan Hong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Teaching jig, substrate processing apparatus, and teaching method
- Patent number 10,535,543
- Issue date Jan 14, 2020
- Kokusai Electric Corporation
- Akihito Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exchange and flip chamber design for heterojunction solar cell form...
- Patent number 10,453,728
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Kyung-Tae Kim
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate arrangement apparatus and substrate arrangement method
- Patent number 10,395,962
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Yukiteru Miyamoto
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate gripping hand and substrate transfer apparatus
- Patent number 10,283,395
- Issue date May 7, 2019
- Kawasaki Jukogyo Kabushiki Kaisha
- Takayuki Fukushima
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 10,109,517
- Issue date Oct 23, 2018
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Table device and conveyance device
- Patent number 9,933,108
- Issue date Apr 3, 2018
- NSK Ltd.
- Toshinori Satou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for assembly of microelectronic devices
- Patent number 9,763,370
- Issue date Sep 12, 2017
- National Technology & Engineering Solutions of Sandia, LLC
- Murat Okandan
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Positioning device for glass substrate
- Patent number 9,741,597
- Issue date Aug 22, 2017
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Yunshao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 9,513,567
- Issue date Dec 6, 2016
- National Institute of Advanced Industrial Science and Technology
- Shiro Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma processing methods and apparatus
- Patent number 7,179,397
- Issue date Feb 20, 2007
- Tru-Si Technologies, Inc.
- Oleg Siniaguine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conveying device
- Patent number 6,755,092
- Issue date Jun 29, 2004
- Takenori Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for loading electronic packages of varying sizes
- Patent number 6,711,873
- Issue date Mar 30, 2004
- ASM Assembly Automation Ltd.
- Yiu Ming Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transportation apparatus
- Patent number 6,675,666
- Issue date Jan 13, 2004
- Olympus Optical Co., Ltd.
- Norio Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing methods and apparatus
- Patent number 6,627,039
- Issue date Sep 30, 2003
- Tru-Si Technologies, Inc.
- Oleg Siniaguine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for determining robot alignment
- Patent number 6,591,161
- Issue date Jul 8, 2003
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying device
- Patent number 6,543,306
- Issue date Apr 8, 2003
- Daihen Corporation
- Takenori Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system
- Patent number 6,514,032
- Issue date Feb 4, 2003
- Tazmo Co., Ltd.
- Kousaku Saino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Transfer system
- Patent number 6,499,936
- Issue date Dec 31, 2002
- Yokogawa Electric Corporation
- Tooru Ishigame
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Articulated robot
- Patent number 6,491,491
- Issue date Dec 10, 2002
- Sankyo Seiki Mfg. Co., Ltd.
- Haruhiro Tsuneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge-gripping pre-aligner
- Patent number 6,468,022
- Issue date Oct 22, 2002
- Integrated Dynamics Engineering, Inc.
- Preston Whitcomb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying device
- Patent number 6,363,808
- Issue date Apr 2, 2002
- Shinmaywa Industries, Ltd.
- Takenori Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing methods and apparatus
- Patent number 6,323,134
- Issue date Nov 27, 2001
- Tru-Si Technologies, Inc.
- Oleg Siniaguine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
WAFER PICKING AND PLACING APPARATUS
- Publication number 20240186165
- Publication date Jun 6, 2024
- HERMES-EPITEK CORPORATION
- Cheng-Huang Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automatic Alignment Of Overhead Transport Vehicles To Load Ports Of...
- Publication number 20240096676
- Publication date Mar 21, 2024
- Skylla Technologies, Inc.
- Kota Weaver
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230420280
- Publication date Dec 28, 2023
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230374663
- Publication date Nov 23, 2023
- JUSUNG ENGINEERING CO., LTD.
- Jong Sik KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20230197475
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
- Publication number 20230063281
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT SYSTEM
- Publication number 20220336245
- Publication date Oct 20, 2022
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING BONDING HEAD
- Publication number 20220102185
- Publication date Mar 31, 2022
- Samsung Electronics Co., Ltd.
- Mingu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
- Publication number 20210118715
- Publication date Apr 22, 2021
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SELF-ASSEMBLING SEMICONDUCTOR LIGHT-EMITTING DIODES
- Publication number 20210090925
- Publication date Mar 25, 2021
- LG ELECTRONICS INC.
- Inbum YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOT Deform Lead-retract Removal Track
- Publication number 20200251364
- Publication date Aug 6, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Sunday Hirro Rey
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
WAFER HANDLING EQUIPMENT AND METHOD THEREOF
- Publication number 20200020558
- Publication date Jan 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO DEVICE TRANSFERRING METHOD AND MICRO DEVICE TRANSFERRING APPA...
- Publication number 20190393066
- Publication date Dec 26, 2019
- KAISTAR Lighting (Xiamen) Co., Ltd
- Steve Mengyuan Hong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CHIP BONDING DEVICE
- Publication number 20190378741
- Publication date Dec 12, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Feibiao CHEN
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARI...
- Publication number 20190311921
- Publication date Oct 10, 2019
- ASML NETHERLANDS B.V.
- Everhardus Cornelis MOS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE INVERTING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUB...
- Publication number 20190096729
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Ryo MURAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20190067075
- Publication date Feb 28, 2019
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Takayuki FUKUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORM...
- Publication number 20180144966
- Publication date May 24, 2018
- Applied Materials, Inc.
- Kyung-Tae KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ARRANGEMENT APPARATUS AND SUBSTRATE ARRANGEMENT METHOD
- Publication number 20180090359
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Yukiteru MIYAMOTO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TEACHING JIG, SUBSTRATE PROCESSING APPARATUS, AND TEACHING METHOD
- Publication number 20180033666
- Publication date Feb 1, 2018
- Hitachi Kokusai Electric Inc.
- Akihito WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING DEVICE FOR GLASS SUBSTRATE
- Publication number 20170186640
- Publication date Jun 29, 2017
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Yunshao JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TABLE DEVICE AND CONVEYANCE DEVICE
- Publication number 20160369938
- Publication date Dec 22, 2016
- NSK Ltd.
- Toshinori SATOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20160329228
- Publication date Nov 10, 2016
- Beijing NMC Co., Ltd.
- Meng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure Apparatus and Exposure Method
- Publication number 20140320840
- Publication date Oct 30, 2014
- National Institute of Advanced Industrial Science and Technology
- Shiro Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED GEARBOX AND ROTARY FEEDTHROUGH SYSTEM FOR A VACUUM CHAM...
- Publication number 20120000426
- Publication date Jan 5, 2012
- PRIMESTAR SOLAR, INC.
- Russell Weldon Black
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing methods and apparatus
- Publication number 20030196754
- Publication date Oct 23, 2003
- Oleg Siniaguine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Conveying device
- Publication number 20030110878
- Publication date Jun 19, 2003
- DAIHEN CORPORATION
- Takenori Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for off-loading electronic packages
- Publication number 20030084642
- Publication date May 8, 2003
- ASM Assembly Automation Ltd
- Yiu Ming Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Edge gripping prealigner
- Publication number 20030077162
- Publication date Apr 24, 2003
- Integrated Dynamics Engineering, Inc., a Massachusetts corporation
- Preston Whitcomb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transportation apparatus
- Publication number 20020134179
- Publication date Sep 26, 2002
- Olympus Optical Co., Ltd.
- Norio Maruyama
- H01 - BASIC ELECTRIC ELEMENTS

with angular orientation of workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device for self-assembling semiconductor light-emitting diodes

Semiconductor manufacturing apparatus including bonding head

Transport system

Rotational indexer with additional rotational axes

Rotational indexer with additional rotational axes

Chip bonding device

Wafer handling equipment and method thereof

Micro device transferring method and micro device transferring appa...

Teaching jig, substrate processing apparatus, and teaching method

Exchange and flip chamber design for heterojunction solar cell form...

Substrate arrangement apparatus and substrate arrangement method

Substrate gripping hand and substrate transfer apparatus

Rotational indexer with additional rotational axes

Table device and conveyance device

Apparatus for assembly of microelectronic devices

Positioning device for glass substrate

Exposure apparatus and exposure method

Plasma processing methods and apparatus

Conveying device

Apparatus for loading electronic packages of varying sizes

Substrate transportation apparatus

Plasma processing methods and apparatus

Method for determining robot alignment

Conveying device

Substrate transfer system

Transfer system

Articulated robot

Edge-gripping pre-aligner

Conveying device

Plasma processing methods and apparatus

Patents Applicationslast 30 patents

WAFER PICKING AND PLACING APPARATUS

Automatic Alignment Of Overhead Transport Vehicles To Load Ports Of...

SUBSTRATE TREATING APPARATUS

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES

TRANSPORT SYSTEM

SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING BONDING HEAD

ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES

DEVICE FOR SELF-ASSEMBLING SEMICONDUCTOR LIGHT-EMITTING DIODES

SOT Deform Lead-retract Removal Track

WAFER HANDLING EQUIPMENT AND METHOD THEREOF

MICRO DEVICE TRANSFERRING METHOD AND MICRO DEVICE TRANSFERRING APPA...

CHIP BONDING DEVICE

A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARI...

SUBSTRATE INVERTING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUB...

SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSFER APPARATUS

EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORM...

SUBSTRATE ARRANGEMENT APPARATUS AND SUBSTRATE ARRANGEMENT METHOD

TEACHING JIG, SUBSTRATE PROCESSING APPARATUS, AND TEACHING METHOD

POSITIONING DEVICE FOR GLASS SUBSTRATE

TABLE DEVICE AND CONVEYANCE DEVICE

CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS

Exposure Apparatus and Exposure Method

INTEGRATED GEARBOX AND ROTARY FEEDTHROUGH SYSTEM FOR A VACUUM CHAM...

Plasma processing methods and apparatus

Conveying device

Apparatus and method for off-loading electronic packages

Edge gripping prealigner

Substrate transportation apparatus