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with angular orientation of workpieces

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  • H01L21/67796
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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/67796with angular orientation of workpieces
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Transport system
    • Patent number 11,710,652
    • Issue date Jul 25, 2023
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Rotational indexer with additional rotational axes
    • Patent number 11,699,610
    • Issue date Jul 11, 2023
    • Lam Research Corporation
    • Richard M. Blank
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Rotational indexer with additional rotational axes
    • Patent number 11,482,436
    • Issue date Oct 25, 2022
    • Lam Research Corporation
    • Richard M. Blank
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Chip bonding device
    • Patent number 11,081,380
    • Issue date Aug 3, 2021
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Feibiao Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer handling equipment and method thereof
    • Patent number 11,031,266
    • Issue date Jun 8, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Chih-Hung Liao
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Micro device transferring method and micro device transferring appa...
    • Patent number 10,714,369
    • Issue date Jul 14, 2020
    • KAISTAR Lighting (Xiamen) Co., Ltd
    • Steve Mengyuan Hong
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Teaching jig, substrate processing apparatus, and teaching method
    • Patent number 10,535,543
    • Issue date Jan 14, 2020
    • Kokusai Electric Corporation
    • Akihito Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Exchange and flip chamber design for heterojunction solar cell form...
    • Patent number 10,453,728
    • Issue date Oct 22, 2019
    • Applied Materials, Inc.
    • Kyung-Tae Kim
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Grant

    Substrate arrangement apparatus and substrate arrangement method
    • Patent number 10,395,962
    • Issue date Aug 27, 2019
    • SCREEN Holdings Co., Ltd.
    • Yukiteru Miyamoto
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Substrate gripping hand and substrate transfer apparatus
    • Patent number 10,283,395
    • Issue date May 7, 2019
    • Kawasaki Jukogyo Kabushiki Kaisha
    • Takayuki Fukushima
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Rotational indexer with additional rotational axes
    • Patent number 10,109,517
    • Issue date Oct 23, 2018
    • Lam Research Corporation
    • Richard M. Blank
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Table device and conveyance device
    • Patent number 9,933,108
    • Issue date Apr 3, 2018
    • NSK Ltd.
    • Toshinori Satou
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Apparatus for assembly of microelectronic devices
    • Patent number 9,763,370
    • Issue date Sep 12, 2017
    • National Technology & Engineering Solutions of Sandia, LLC
    • Murat Okandan
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Positioning device for glass substrate
    • Patent number 9,741,597
    • Issue date Aug 22, 2017
    • Shenzhen China Star Optoelectronics Technology Co., Ltd.
    • Yunshao Jiang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Exposure apparatus and exposure method
    • Patent number 9,513,567
    • Issue date Dec 6, 2016
    • National Institute of Advanced Industrial Science and Technology
    • Shiro Hara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Plasma processing methods and apparatus
    • Patent number 7,179,397
    • Issue date Feb 20, 2007
    • Tru-Si Technologies, Inc.
    • Oleg Siniaguine
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Conveying device
    • Patent number 6,755,092
    • Issue date Jun 29, 2004
    • Takenori Wakabayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus for loading electronic packages of varying sizes
    • Patent number 6,711,873
    • Issue date Mar 30, 2004
    • ASM Assembly Automation Ltd.
    • Yiu Ming Cheung
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate transportation apparatus
    • Patent number 6,675,666
    • Issue date Jan 13, 2004
    • Olympus Optical Co., Ltd.
    • Norio Maruyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing methods and apparatus
    • Patent number 6,627,039
    • Issue date Sep 30, 2003
    • Tru-Si Technologies, Inc.
    • Oleg Siniaguine
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for determining robot alignment
    • Patent number 6,591,161
    • Issue date Jul 8, 2003
    • WaferMasters, Inc.
    • Woo Sik Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Conveying device
    • Patent number 6,543,306
    • Issue date Apr 8, 2003
    • Daihen Corporation
    • Takenori Wakabayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate transfer system
    • Patent number 6,514,032
    • Issue date Feb 4, 2003
    • Tazmo Co., Ltd.
    • Kousaku Saino
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Transfer system
    • Patent number 6,499,936
    • Issue date Dec 31, 2002
    • Yokogawa Electric Corporation
    • Tooru Ishigame
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Articulated robot
    • Patent number 6,491,491
    • Issue date Dec 10, 2002
    • Sankyo Seiki Mfg. Co., Ltd.
    • Haruhiro Tsuneda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Edge-gripping pre-aligner
    • Patent number 6,468,022
    • Issue date Oct 22, 2002
    • Integrated Dynamics Engineering, Inc.
    • Preston Whitcomb
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Conveying device
    • Patent number 6,363,808
    • Issue date Apr 2, 2002
    • Shinmaywa Industries, Ltd.
    • Takenori Wakabayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing methods and apparatus
    • Patent number 6,323,134
    • Issue date Nov 27, 2001
    • Tru-Si Technologies, Inc.
    • Oleg Siniaguine
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Stage apparatus
    • Patent number 6,281,643
    • Issue date Aug 28, 2001
    • Nikon Corporation
    • Akimitsu Ebihara
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Plasma processing methods and apparatus
    • Patent number 6,139,678
    • Issue date Oct 31, 2000
    • TruSi Technologies, LLC
    • Oleg Siniaguine
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents