with auxiliary ionisation

Industry

CPC
H01S3/09713

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/09713with auxiliary ionisation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Laser chamber with metal damper member
- Patent number 10,965,085
- Issue date Mar 30, 2021
- Gigaphoton Inc.
- Hisakazu Katsuumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low pressure wire ion plasma discharge source, and application to e...
- Patent number 10,763,070
- Issue date Sep 1, 2020
- LASER SYSTEMS & SOLUTIONS OF EUROPE
- Paul Ceccato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser oscillator having auxiliary electrodes
- Patent number 9,819,139
- Issue date Nov 14, 2017
- FANUC CORPORATION
- Masahiro Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preliminary ionization discharge device and laser apparatus
- Patent number 9,748,727
- Issue date Aug 29, 2017
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber
- Patent number 9,742,141
- Issue date Aug 22, 2017
- Gigaphoton Inc.
- Hiroaki Tsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing apparatus carrying out control to reduce consumed...
- Patent number 9,407,054
- Issue date Aug 2, 2016
- FANUC CORPORATION
- Ryusuke Miyata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Single cavity dual-electrode discharge cavity and excimer laser
- Patent number 9,252,557
- Issue date Feb 2, 2016
- Academy of Opto-Electronics, Chinese Academy of Sciences
- Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slab gas laser with pre-ionizing cell
- Patent number 9,048,615
- Issue date Jun 2, 2015
- Epilog Corporation
- Roberto Julio Ramírez Zárate
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-flow fan impeller for a transversley excited, pulsed, gas dis...
- Patent number 8,814,522
- Issue date Aug 26, 2014
- Cymer, LLC
- Yoshiho Amada
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Gas laser discharge pre-ionization using a simmer-discharge
- Patent number 8,391,329
- Issue date Mar 5, 2013
- Coherent, Inc.
- Joel Fontanella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-ionization method for CO2 gas-discharge laser
- Patent number 8,369,373
- Issue date Feb 5, 2013
- Coherent, Inc.
- David John Allie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle damage protection for high power CO2 slab laser mirrors
- Patent number 7,889,775
- Issue date Feb 15, 2011
- Coherent, Inc.
- Gongxue Hua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anodes for fluorine gas discharge lasers
- Patent number 7,851,011
- Issue date Dec 14, 2010
- Cymer, Inc.
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal fluoride trap
- Patent number 7,819,945
- Issue date Oct 26, 2010
- Cymer, Inc.
- Richard Morton
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Grant
Pre-ionizer for pulsed gas-discharge laser
- Patent number 7,693,207
- Issue date Apr 6, 2010
- Coherent, Inc.
- Raul Martin Wong Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrically excited gas discharge laser for generating high-repeti...
- Patent number 7,672,354
- Issue date Mar 2, 2010
- LTB-Lasertechnik Berlin GmbH
- Matthias Scholz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-ionizer for pulsed gas-discharge laser
- Patent number 7,545,842
- Issue date Jun 9, 2009
- Coherent, Inc.
- Christian J. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-expansion tolerant, preionizer electrode for a gas discharg...
- Patent number 7,542,502
- Issue date Jun 2, 2009
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer or molecular fluorine laser system with precision timing
- Patent number 7,308,013
- Issue date Dec 11, 2007
- Lambda Physik AG
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen gas discharge laser electrodes
- Patent number 7,301,980
- Issue date Nov 27, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anodes for fluorine gas discharge lasers
- Patent number 7,230,965
- Issue date Jun 12, 2007
- Cymer, Inc.
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods utilizing laser discharge electrodes with ceram...
- Patent number 7,079,565
- Issue date Jul 18, 2006
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer or molecular fluorine laser with several discharge chambers
- Patent number 6,987,790
- Issue date Jan 17, 2006
- Lambda Physik AG
- Sergei V. Govorkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-ionizer for RF-energized gas laser
- Patent number 6,963,596
- Issue date Nov 8, 2005
- Coherent, Inc.
- Christian J. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulser driven, helium free transversely excited atmospheric-pressur...
- Patent number 6,950,453
- Issue date Sep 27, 2005
- Secretary, Department of Atomic Energy Goverment of India
- Dhruba J. Biswas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corona preionization electrode unit for use in gas laser apparatus
- Patent number 6,654,402
- Issue date Nov 25, 2003
- Ushio Denki Kabushiki Kaisya
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge device for pulsed laser
- Patent number 6,535,540
- Issue date Mar 18, 2003
- Komatsu Ltd.
- Yasufumi Kawasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser oscillator apparatus
- Patent number 6,529,538
- Issue date Mar 4, 2003
- Komatsu Ltd.
- Masaki Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 6,507,596
- Issue date Jan 14, 2003
- Komatsu Ltd.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate ArF...
- Patent number 6,330,261
- Issue date Dec 11, 2001
- Cymer, Inc.
- Toshihiko Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PRELIMINARY IONIZATION DISCHARGE DEVICE AND LASER APPARATUS
- Publication number 20160172817
- Publication date Jun 16, 2016
- GIGAPHOTON INC.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING APPARATUS CARRYING OUT CONTROL TO REDUCE CONSUMED...
- Publication number 20140307751
- Publication date Oct 16, 2014
- FANUC CORPORATION
- Ryusuke Miyata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS LASER OSCILLATOR HAVING FUNCTION TO DETERMINE INITIATION OF ELE...
- Publication number 20140307754
- Publication date Oct 16, 2014
- FANUC CORPORATION
- Tooru Nukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE-CAVITY DUAL-ELECTRODE DISCHARGE CAVITY AND EXCIMER LASER
- Publication number 20140023101
- Publication date Jan 23, 2014
- ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-IRRADIATION IN GAS DISCHARGE LASING DEVICES USING MULTIPLE PRE-...
- Publication number 20140003459
- Publication date Jan 2, 2014
- IPG MICROSYSTEMS LLC
- Jeffrey P. Sercel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DISCHARGE PRE-IONIZATION USING A SIMMER-DISCHARGE
- Publication number 20120189031
- Publication date Jul 26, 2012
- Joel Fontanella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-IONIZATION METHOD FOR CO2 GAS-DISCHARGE LASER
- Publication number 20110085580
- Publication date Apr 14, 2011
- COHERENT, INC.
- David J. Allie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE DAMAGE PROTECTION FOR HIGH POWER CO2 SLAB LASER MIRRORS
- Publication number 20100172386
- Publication date Jul 8, 2010
- Coherent, Inc.
- Gongxue Hua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL FLUORIDE TRAP
- Publication number 20100107870
- Publication date May 6, 2010
- Richard Morton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pre-ionizer for pulsed gas-discharge laser
- Publication number 20090067467
- Publication date Mar 12, 2009
- Raul Martin Wong Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cross-flow fan impeller for a transversley excited, pulsed, gas dis...
- Publication number 20080310960
- Publication date Dec 18, 2008
- Cymer, Inc.
- Yoshiho Amada
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Electrically Excited Gas Discharge Laser for Generating High-Repeti...
- Publication number 20080279247
- Publication date Nov 13, 2008
- LTB-Lasertechnik Berlin GmbH
- Matthias Scholz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pre-ionizer for pulsed gas-discharge laser
- Publication number 20080069170
- Publication date Mar 20, 2008
- Christian J. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anodes for fluorine gas discharge lasers
- Publication number 20080002752
- Publication date Jan 3, 2008
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal-expansion tolerant, preionizer electrode for a gas discharg...
- Publication number 20070091972
- Publication date Apr 26, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pre-ionizer for RF-energized gas laser
- Publication number 20050163183
- Publication date Jul 28, 2005
- Christian J. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for segmented electrode with temporal voltage shi...
- Publication number 20050058172
- Publication date Mar 17, 2005
- Rainer Paetzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Halogen gas discharge laser electrodes
- Publication number 20050047471
- Publication date Mar 3, 2005
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Excimer or molecular fluorine laser system with precision timing
- Publication number 20050031004
- Publication date Feb 10, 2005
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pulser driven, helium free transversely excited atmospheric-pressur...
- Publication number 20050002432
- Publication date Jan 6, 2005
- Dhruba J. Biswas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Excimer or molecular fluorine laser with several discharge chambers
- Publication number 20040202219
- Publication date Oct 14, 2004
- Sergei V. Govorkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods utilizing laser discharge electrodes with ceram...
- Publication number 20040131100
- Publication date Jul 8, 2004
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anodes for fluorine gas discharge lasers
- Publication number 20040071178
- Publication date Apr 15, 2004
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS

with auxiliary ionisation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser chamber with metal damper member

Low pressure wire ion plasma discharge source, and application to e...

Gas laser oscillator having auxiliary electrodes

Preliminary ionization discharge device and laser apparatus

Laser chamber

Laser processing apparatus carrying out control to reduce consumed...

Single cavity dual-electrode discharge cavity and excimer laser

Slab gas laser with pre-ionizing cell

Cross-flow fan impeller for a transversley excited, pulsed, gas dis...

Gas laser discharge pre-ionization using a simmer-discharge

Pre-ionization method for CO2 gas-discharge laser

Particle damage protection for high power CO2 slab laser mirrors

Anodes for fluorine gas discharge lasers

Metal fluoride trap

Pre-ionizer for pulsed gas-discharge laser

Electrically excited gas discharge laser for generating high-repeti...

Pre-ionizer for pulsed gas-discharge laser

Thermal-expansion tolerant, preionizer electrode for a gas discharg...

Excimer or molecular fluorine laser system with precision timing

Halogen gas discharge laser electrodes

Anodes for fluorine gas discharge lasers

Systems and methods utilizing laser discharge electrodes with ceram...

Excimer or molecular fluorine laser with several discharge chambers

Pre-ionizer for RF-energized gas laser

Pulser driven, helium free transversely excited atmospheric-pressur...

Corona preionization electrode unit for use in gas laser apparatus

Discharge device for pulsed laser

Gas laser oscillator apparatus

Gas laser apparatus

Reliable, modular, production quality narrow-band high rep rate ArF...

Patents Applicationslast 30 patents

PRELIMINARY IONIZATION DISCHARGE DEVICE AND LASER APPARATUS

LASER PROCESSING APPARATUS CARRYING OUT CONTROL TO REDUCE CONSUMED...

GAS LASER OSCILLATOR HAVING FUNCTION TO DETERMINE INITIATION OF ELE...

SINGLE-CAVITY DUAL-ELECTRODE DISCHARGE CAVITY AND EXCIMER LASER

PRE-IRRADIATION IN GAS DISCHARGE LASING DEVICES USING MULTIPLE PRE-...

GAS LASER DISCHARGE PRE-IONIZATION USING A SIMMER-DISCHARGE

PRE-IONIZATION METHOD FOR CO2 GAS-DISCHARGE LASER

PARTICLE DAMAGE PROTECTION FOR HIGH POWER CO2 SLAB LASER MIRRORS

METAL FLUORIDE TRAP

Pre-ionizer for pulsed gas-discharge laser

Cross-flow fan impeller for a transversley excited, pulsed, gas dis...

Electrically Excited Gas Discharge Laser for Generating High-Repeti...

Pre-ionizer for pulsed gas-discharge laser

Anodes for fluorine gas discharge lasers

Thermal-expansion tolerant, preionizer electrode for a gas discharg...

Pre-ionizer for RF-energized gas laser

System and method for segmented electrode with temporal voltage shi...

Halogen gas discharge laser electrodes

Excimer or molecular fluorine laser system with precision timing

Pulser driven, helium free transversely excited atmospheric-pressur...

Excimer or molecular fluorine laser with several discharge chambers

Systems and methods utilizing laser discharge electrodes with ceram...

Anodes for fluorine gas discharge lasers