with compensation for temperature or vibration induced errors

Industry

CPC
G01Q70/04

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GPHYSICS G01Measuring instruments G01QSCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00

Current Industry

G01Q70/04with compensation for temperature or vibration induced errors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Scanning probe microscope, scan head and method
- Patent number 11,592,460
- Issue date Feb 28, 2023
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Roelof Willem Herfst
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscopy system for mapping nanostructures on a su...
- Patent number 10,451,650
- Issue date Oct 22, 2019
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Stefan Kuiper
- G01 - MEASURING TESTING
Information Patent Grant
Structure for achieving dimensional stability during temperature ch...
- Patent number 10,168,261
- Issue date Jan 1, 2019
- KLA-Tencor Corporation
- Warren Oliver
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional fine movement device
- Patent number 10,161,958
- Issue date Dec 25, 2018
- Hitachi High-Tech Science Corporation
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Grant
Detection device having attached probe
- Patent number 10,145,861
- Issue date Dec 4, 2018
- STROMLINET NANO LIMITED
- En-Te Hwu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope with a reduced Q-factor
- Patent number 9,897,626
- Issue date Feb 20, 2018
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Femke Chantal Tabak
- G01 - MEASURING TESTING
Information Patent Grant
Low drift scanning probe microscope
- Patent number 9,116,168
- Issue date Aug 25, 2015
- Bruker Nano, Inc.
- Anthonius G. Ruiter
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Low temperature device with low-vibration sample holding device
- Patent number 9,062,905
- Issue date Jun 23, 2015
- HB Patent Unternehmergesellschaft
- Jens Hoehne
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Low drift scanning probe microscope
- Patent number 8,869,310
- Issue date Oct 21, 2014
- Bruker Nano, Inc.
- Anthonius Ruiter
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Active damping of high speed scanning probe microscope components
- Patent number 8,763,475
- Issue date Jul 1, 2014
- Oxford Instruments Asylum Research Corporation
- Roger Proksch
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Alignment and anti-drift mechanism
- Patent number 8,606,426
- Issue date Dec 10, 2013
- Academia Sinica
- Ing-Shouh Hwang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cantilever excitation device and scanning probe microscope
- Patent number 8,505,111
- Issue date Aug 6, 2013
- National University Corporation Kanazawa University
- Hitoshi Asakawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Active scanner bow compensator
- Patent number 8,424,364
- Issue date Apr 23, 2013
- nPoint, Inc.
- Katerina Moloni
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Active damping of high speed scanning probe microscope components
- Patent number 8,302,456
- Issue date Nov 6, 2012
- Asylum Research Corporation
- Roger Proksch
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Athermal atomic force microscope probes
- Patent number 8,239,968
- Issue date Aug 7, 2012
- Georgia Tech Research Corporation
- Hamdi Torun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Vibration compensation in probe microscopy
- Patent number 8,220,066
- Issue date Jul 10, 2012
- Infinitesima Ltd.
- Andrew Humphris
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus of compensating for position shift
- Patent number 8,050,802
- Issue date Nov 1, 2011
- Bruker Nano, Inc.
- James M. Young
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe apparatus
- Patent number 8,035,089
- Issue date Oct 11, 2011
- Canon Kabushiki Kaisha
- Takao Kusaka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 8,011,230
- Issue date Sep 6, 2011
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 7,966,867
- Issue date Jun 28, 2011
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus structure and scanning probe microscope including apparat...
- Patent number 7,945,964
- Issue date May 17, 2011
- SII NanoTechnology Inc.
- Shigeru Wakiyama
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and a device for the positioning of a displaceable component...
- Patent number 7,934,323
- Issue date May 3, 2011
- JPK Instruments AG
- Detlef Knebel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe apparatus
- Patent number 7,765,606
- Issue date Jul 27, 2010
- Canon Kabushiki Kaisha
- Takao Kusaka
- G01 - MEASURING TESTING
Information Patent Grant
Probe position control system and method
- Patent number 7,703,314
- Issue date Apr 27, 2010
- Shimadzu Corporation
- Masayuki Abe
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe apparatus
- Patent number 7,690,047
- Issue date Mar 30, 2010
- Canon Kabushiki Kaisha
- Susumu Yasuda
- G01 - MEASURING TESTING
Information Patent Grant
Drive stage for scanning probe apparatus, and scanning probe apparatus
- Patent number 7,690,046
- Issue date Mar 30, 2010
- Canon Kabushiki Kaisha
- Susumu Yasuda
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe apparatus and drive stage therefor
- Patent number 7,631,547
- Issue date Dec 15, 2009
- Canon Kabushiki Kaisha
- Nobuki Yoshimatsu
- G01 - MEASURING TESTING
Information Patent Grant
Vibration-type cantilever holder and scanning probe microscope
- Patent number 7,605,368
- Issue date Oct 20, 2009
- SII NanoTechnology Inc.
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Grant
System for wide frequency dynamic nanomechanical analysis
- Patent number 7,584,653
- Issue date Sep 8, 2009
- Veeco Instruments, Inc.
- Chanmin Quanmin Su
- G01 - MEASURING TESTING
Information Patent Grant
Surface texture measuring probe and microscope utilizing the same
- Patent number 7,581,438
- Issue date Sep 1, 2009
- Mitutoyo Corporation
- Kazuhiko Hidaka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ACTIVE DITHER BALANCING OF A MOTION STAGE FOR SCANNING PROBE MICROS...
- Publication number 20240393363
- Publication date Nov 28, 2024
- Nearfield Instruments B.V.
- Massoud Hemmasian Ettefagh
- G01 - MEASURING TESTING
Information Patent Application
Arrangement Having a Measuring Apparatus for a Scanning Probe Micro...
- Publication number 20220244287
- Publication date Aug 4, 2022
- BRUKER NANO GMBH
- Torsten Jahnke
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD
- Publication number 20220057430
- Publication date Feb 24, 2022
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Roelof Willem HERFST
- G01 - MEASURING TESTING
Information Patent Application
ACTIVE NOISE ISOLATION FOR TUNNELING APPLICATIONS (ANITA)
- Publication number 20210025919
- Publication date Jan 28, 2021
- The Penn State Research Foundation
- Eric Hudson
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR OPTICAL DRIFT CORRECTION
- Publication number 20200355724
- Publication date Nov 12, 2020
- Molecular Vista, Inc.
- Kyle C. JUEDES
- G01 - MEASURING TESTING
Information Patent Application
SHEATHING FOR FLUID PROBE
- Publication number 20180348255
- Publication date Dec 6, 2018
- GENERAL ELECTRIC COMPANY
- Roberto Jose Manzano
- G01 - MEASURING TESTING
Information Patent Application
DETECTION DEVICE HAVING ATTACHED PROBE
- Publication number 20170363657
- Publication date Dec 21, 2017
- Stromlinet Nano Limited
- En-Te HWU
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING PROBE MICROSCOPE WITH A REDUCED Q-FACTOR
- Publication number 20170307655
- Publication date Oct 26, 2017
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Femke Chantal TABAK
- G01 - MEASURING TESTING
Information Patent Application
Active Damping of High Speed Scanning Probe Microscope Components
- Publication number 20130061356
- Publication date Mar 7, 2013
- ASYLUM RESEARCH CORPORATION
- Roger Proksch
- B82 - NANO-TECHNOLOGY
Information Patent Application
CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE
- Publication number 20120192320
- Publication date Jul 26, 2012
- Hitoshi Asakawa
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Method for Isolating and Measuring Movement in Metrol...
- Publication number 20120079633
- Publication date Mar 29, 2012
- Roger Proksch
- G01 - MEASURING TESTING
Information Patent Application
Low Drift Scanning Probe Microscope
- Publication number 20110239336
- Publication date Sep 29, 2011
- BRUCKER NANO, INC.
- Anthonius Ruiter
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE HAVING SUPPORT STAGE INCORPORATING A KINE...
- Publication number 20110107471
- Publication date May 5, 2011
- Bruker Nano, Inc.
- Carl Masser
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT AND ANTI-DRIFT MECHANISM
- Publication number 20110098926
- Publication date Apr 28, 2011
- ACADEMIA SINICA
- Ing-Shouh Hwang
- G01 - MEASURING TESTING
Information Patent Application
Athermal Atomic Force Microscope Probes
- Publication number 20110055986
- Publication date Mar 3, 2011
- Georgia Tech Research Corporation
- Hamdi Torun
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION COMPENSATION IN PROBE MICROSCOPY
- Publication number 20100235955
- Publication date Sep 16, 2010
- INFINITESIMA LTD
- Andrew Humphris
- G01 - MEASURING TESTING
Information Patent Application
ACTIVE SCANNER BOW COMPENSATOR
- Publication number 20100117565
- Publication date May 13, 2010
- Katerina Moloni
- G01 - MEASURING TESTING
Information Patent Application
Low temperature device
- Publication number 20100089069
- Publication date Apr 15, 2010
- Jens Hoehne
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
CONTROLLED ATOMIC FORCE MICROSCOPE
- Publication number 20100064397
- Publication date Mar 11, 2010
- UNIVERSITE JOSEPH FOURIER
- Michal Hrouzek
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARAT...
- Publication number 20090255016
- Publication date Oct 8, 2009
- Shigeru Wakiyama
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE APPARATUS
- Publication number 20090230320
- Publication date Sep 17, 2009
- Canon Kabushiki Kaisha
- Takao KUSAKA
- G01 - MEASURING TESTING
Information Patent Application
Method and Device for Positioning a Movable Part in a Test System
- Publication number 20090140685
- Publication date Jun 4, 2009
- JPK Instruments AG
- Detlef Knebel
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20080257024
- Publication date Oct 23, 2008
- Masahiro WATANABE
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20080223122
- Publication date Sep 18, 2008
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS OF COMPENSATING FOR POSITION SHIFT
- Publication number 20080121813
- Publication date May 29, 2008
- James M. Young
- G01 - MEASURING TESTING
Information Patent Application
Probe position control system and method
- Publication number 20070272005
- Publication date Nov 29, 2007
- Shimadzu Corporation
- Masayuki Abe
- G01 - MEASURING TESTING
Information Patent Application
DRIVE STAGE FOR SCANNING PROBE APPARATUS, AND SCANNING PROBE APPARATUS
- Publication number 20070267580
- Publication date Nov 22, 2007
- Canon Kabushiki Kaisha
- Susumu YASUDA
- G01 - MEASURING TESTING
Information Patent Application
NANOMETER-PRECISION TIP-TO-SUBSTRATE CONTROL AND PATTERN REGISTRATI...
- Publication number 20070234786
- Publication date Oct 11, 2007
- Euclid E. Moon
- G01 - MEASURING TESTING
Information Patent Application
Optical detection alignment/tracking method and apparatus
- Publication number 20070220958
- Publication date Sep 27, 2007
- Veeco Instruments Inc.
- Doug Gotthard
- G01 - MEASURING TESTING
Information Patent Application
Active Damping of High Speed Scanning Probe Microscope Components
- Publication number 20070214864
- Publication date Sep 20, 2007
- ASYLUM RESEARCH CORPORATION
- Roger Proksch
- G01 - MEASURING TESTING

with compensation for temperature or vibration induced errors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Scanning probe microscope, scan head and method

Scanning probe microscopy system for mapping nanostructures on a su...

Structure for achieving dimensional stability during temperature ch...

Three-dimensional fine movement device

Detection device having attached probe

Scanning probe microscope with a reduced Q-factor

Low drift scanning probe microscope

Low temperature device with low-vibration sample holding device

Low drift scanning probe microscope

Active damping of high speed scanning probe microscope components

Alignment and anti-drift mechanism

Cantilever excitation device and scanning probe microscope

Active scanner bow compensator

Active damping of high speed scanning probe microscope components

Athermal atomic force microscope probes

Vibration compensation in probe microscopy

Method and apparatus of compensating for position shift

Scanning probe apparatus

Scanning probe microscope

Scanning probe microscope

Apparatus structure and scanning probe microscope including apparat...

Method and a device for the positioning of a displaceable component...

Scanning probe apparatus

Probe position control system and method

Scanning probe apparatus

Drive stage for scanning probe apparatus, and scanning probe apparatus

Scanning probe apparatus and drive stage therefor

Vibration-type cantilever holder and scanning probe microscope

System for wide frequency dynamic nanomechanical analysis

Surface texture measuring probe and microscope utilizing the same

Patents Applicationslast 30 patents

ACTIVE DITHER BALANCING OF A MOTION STAGE FOR SCANNING PROBE MICROS...

Arrangement Having a Measuring Apparatus for a Scanning Probe Micro...

SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD

ACTIVE NOISE ISOLATION FOR TUNNELING APPLICATIONS (ANITA)

SYSTEM AND METHOD FOR OPTICAL DRIFT CORRECTION

SHEATHING FOR FLUID PROBE

DETECTION DEVICE HAVING ATTACHED PROBE

SCANNING PROBE MICROSCOPE WITH A REDUCED Q-FACTOR

Active Damping of High Speed Scanning Probe Microscope Components

CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE

Apparatus and Method for Isolating and Measuring Movement in Metrol...

Low Drift Scanning Probe Microscope

SCANNING PROBE MICROSCOPE HAVING SUPPORT STAGE INCORPORATING A KINE...

ALIGNMENT AND ANTI-DRIFT MECHANISM

Athermal Atomic Force Microscope Probes

VIBRATION COMPENSATION IN PROBE MICROSCOPY

ACTIVE SCANNER BOW COMPENSATOR

Low temperature device

CONTROLLED ATOMIC FORCE MICROSCOPE

APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARAT...

SCANNING PROBE APPARATUS

Method and Device for Positioning a Movable Part in a Test System

SCANNING PROBE MICROSCOPE

SCANNING PROBE MICROSCOPE

METHOD AND APPARATUS OF COMPENSATING FOR POSITION SHIFT

Probe position control system and method

DRIVE STAGE FOR SCANNING PROBE APPARATUS, AND SCANNING PROBE APPARATUS

NANOMETER-PRECISION TIP-TO-SUBSTRATE CONTROL AND PATTERN REGISTRATI...

Optical detection alignment/tracking method and apparatus

Active Damping of High Speed Scanning Probe Microscope Components