TREA

with compensation for temperature or vibration induced errors

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Industry

  • CPC
  • G01Q70/04
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Parent Industries

GPHYSICS G01Measuring instruments G01QSCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00

Current Industry

G01Q70/04with compensation for temperature or vibration induced errors
Industries