with electrostatic means

Industry

CPC
H01J2237/04735

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/04735with electrostatic means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a particle beam microscope
- Patent number 11,915,907
- Issue date Feb 27, 2024
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,823,861
- Issue date Nov 21, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and power supply device
- Patent number 11,810,752
- Issue date Nov 7, 2023
- HITACHI HIGH-TECH CORPORATION
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and electrostatic quadrupole lens device
- Patent number 11,710,618
- Issue date Jul 25, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,757
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-current ion implanter and method for controlling ion beam usin...
- Patent number 11,011,343
- Issue date May 18, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electron-beam imaging apparatus with improved performance
- Patent number 10,971,326
- Issue date Apr 6, 2021
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, method and system for imaging and utilization of SEM cha...
- Patent number 10,770,262
- Issue date Sep 8, 2020
- National Technology & Engineering Solutions of Sandia, LLC
- David W. Chandler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 10,504,681
- Issue date Dec 10, 2019
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron microscope and method of controlling same
- Patent number 10,134,561
- Issue date Nov 20, 2018
- Jeol Ltd.
- Masaki Mukai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer temperature control with consideration to beam power input
- Patent number 10,128,084
- Issue date Nov 13, 2018
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,673,024
- Issue date Jun 6, 2017
- Applied Materials Israel, Ltd.
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Focused ion beam low kV enhancement
- Patent number 9,443,692
- Issue date Sep 13, 2016
- FEI Company
- Mostafa Maazouz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photocathode high-frequency electron-gun cavity apparatus
- Patent number 9,224,571
- Issue date Dec 29, 2015
- INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION
- Junji Urakawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Particle beam device and method for analyzing and/or treating an ob...
- Patent number 8,946,650
- Issue date Feb 3, 2015
- Carl Zeiss Microscopy GmbH
- Michael Schnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle accelerator
- Patent number 8,659,243
- Issue date Feb 25, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Morita
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 8,637,834
- Issue date Jan 28, 2014
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
In-vacuum beam defining aperture cleaning for particle reduction
- Patent number 8,604,418
- Issue date Dec 10, 2013
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerator on a chip having a grid and plate cell
- Patent number 8,564,225
- Issue date Oct 22, 2013
- Transmute, Inc.
- Kim L. Hailey
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning electron microscope
- Patent number 8,487,253
- Issue date Jul 16, 2013
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus
- Patent number 8,471,452
- Issue date Jun 25, 2013
- Nordiko Technical Services Limited
- Mervyn Howard Davis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion source including separate support systems for accelerator grids
- Patent number 8,354,652
- Issue date Jan 15, 2013
- Aviza Technology Limited
- Gary Proudfoot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanotubes as linear accelerators
- Patent number 8,159,157
- Issue date Apr 17, 2012
- Raytheon Company
- Timothy J. Imholt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 8,097,847
- Issue date Jan 17, 2012
- Carl Ziess SMT AG
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning electron microscope
- Patent number 8,080,790
- Issue date Dec 20, 2011
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle accelerator
- Patent number 8,067,907
- Issue date Nov 29, 2011
- Hitachi High-Technologies Corporation
- Hiroshi Morita
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Techniques for reducing an electrical stress in an acceleration/dec...
- Patent number 7,999,239
- Issue date Aug 16, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,977,632
- Issue date Jul 12, 2011
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for ion beam implantation using ribbon and sp...
- Patent number 7,902,527
- Issue date Mar 8, 2011
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240379318
- Publication date Nov 14, 2024
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...
- Publication number 20240312758
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Zheng FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Milling Apparatus
- Publication number 20240258062
- Publication date Aug 1, 2024
- HITACHI HIGH-TECH CORPORATION
- Shota AIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure for Particle Acceleration And Charged Particle Beam Appar...
- Publication number 20240242918
- Publication date Jul 18, 2024
- Hitachi High-Tech Corporation
- RYO SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240242921
- Publication date Jul 18, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242922
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ELECTRON BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
- Publication number 20240036456
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Gilles Tabbone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230386801
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ELECTROSTATIC QUADRUPOLE LENS DEVICE
- Publication number 20220285127
- Publication date Sep 8, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220254597
- Publication date Aug 11, 2022
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
- Publication number 20220246389
- Publication date Aug 4, 2022
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND POWER SUPPLY DEVICE
- Publication number 20220068595
- Publication date Mar 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Wen Li
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Charged Particle Beam Device
- Publication number 20210272768
- Publication date Sep 2, 2021
- Hitachi High-Tech Corporation
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ENHANCING THE ENERGY AND BEAM CURRENT ON RF BASED IMPLANTER
- Publication number 20210057182
- Publication date Feb 25, 2021
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...
- Publication number 20210020399
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON-BEAM IMAGING APPARATUS WITH IMPROVED PERFORMANCE
- Publication number 20200090899
- Publication date Mar 19, 2020
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON EMISSION TUBE, ELECTRON IRRADIATION DEVICE, AND METHOD OF...
- Publication number 20190088441
- Publication date Mar 21, 2019
- HAMAMATSU PHOTONICS K. K.
- Motohiro SUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMP...
- Publication number 20170287674
- Publication date Oct 5, 2017
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused Ion Beam Low kV Enhancement
- Publication number 20140239175
- Publication date Aug 28, 2014
- FEI Company
- Mostafa Maazouz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20140158902
- Publication date Jun 12, 2014
- APPLIED MATERIALS ISRAEL, LTD.
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND LENGTH MEASURING METHOD USING THE...
- Publication number 20130292568
- Publication date Nov 7, 2013
- Daisuke Bizen
- G01 - MEASURING TESTING
Information Patent Application
INSULATING-LAYER-CONTAINING CERAMIC MEMBER, METAL-MEMBER-CONTAINING...
- Publication number 20130284948
- Publication date Oct 31, 2013
- KYOCERA CORPORATION
- Kouichi Iwamoto
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PHOTOCATHODE HIGH-FREQUENCY ELECTRON-GUN CAVITY APPARATUS
- Publication number 20130187541
- Publication date Jul 25, 2013
- Junji Urakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20120104252
- Publication date May 3, 2012
- Applied Materials Israel Ltd.
- Rainer KNIPPELMEYER
- B82 - NANO-TECHNOLOGY
Information Patent Application
PARTICLE BEAM DEVICE AND METHOD FOR ANALYZING AND/OR TREATING AN OB...
- Publication number 20120080594
- Publication date Apr 5, 2012
- Michael SCHNELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20120061566
- Publication date Mar 15, 2012
- Hitachi High-Technologies Corporation
- Minoru YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ACCELERATOR
- Publication number 20120025741
- Publication date Feb 2, 2012
- Hitachi High-Technologies Corporation
- Hiroshi MORITA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
In-Vacuum Beam Defining Aperture Cleaning for Particle Reduction
- Publication number 20110240889
- Publication date Oct 6, 2011
- Acelis Technologies. Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS
- Publication number 20100219740
- Publication date Sep 2, 2010
- NORDIKO TECHNICAL SERVICES LIMITED
- Mervyn Howard Davis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

with electrostatic means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system of image-forming multi-electron beams

Method for operating a particle beam microscope

Charged particle beam device

Charged particle beam device and power supply device

Ion implanter and electrostatic quadrupole lens device

Charged particle beam device

High-current ion implanter and method for controlling ion beam usin...

Multi-electron-beam imaging apparatus with improved performance

Apparatus, method and system for imaging and utilization of SEM cha...

Particle-optical systems and arrangements and particle-optical comp...

Electron microscope and method of controlling same

Wafer temperature control with consideration to beam power input

Particle-optical systems and arrangements and particle-optical comp...

Focused ion beam low kV enhancement

Photocathode high-frequency electron-gun cavity apparatus

Particle beam device and method for analyzing and/or treating an ob...

Charged particle accelerator

Particle-optical systems and arrangements and particle-optical comp...

In-vacuum beam defining aperture cleaning for particle reduction

Accelerator on a chip having a grid and plate cell

Scanning electron microscope

Apparatus

Ion source including separate support systems for accelerator grids

Nanotubes as linear accelerators

Particle-optical systems and arrangements and particle-optical comp...

Scanning electron microscope

Charged particle accelerator

Techniques for reducing an electrical stress in an acceleration/dec...

Scanning electron microscope

Apparatus and methods for ion beam implantation using ribbon and sp...

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...

Ion Milling Apparatus

Structure for Particle Acceleration And Charged Particle Beam Appar...

CHARGED PARTICLE APPARATUS AND METHOD

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

METHOD FOR ELECTRON BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...

PLASMA PROCESSING APPARATUS

ION IMPLANTER AND ELECTROSTATIC QUADRUPOLE LENS DEVICE

CHARGED PARTICLE BEAM DEVICE

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE

CHARGED PARTICLE BEAM DEVICE AND POWER SUPPLY DEVICE

Charged Particle Beam Device

METHOD OF ENHANCING THE ENERGY AND BEAM CURRENT ON RF BASED IMPLANTER

HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...

MULTI-ELECTRON-BEAM IMAGING APPARATUS WITH IMPROVED PERFORMANCE

ELECTRON EMISSION TUBE, ELECTRON IRRADIATION DEVICE, AND METHOD OF...

PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMP...

Focused Ion Beam Low kV Enhancement

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

SCANNING ELECTRON MICROSCOPE AND LENGTH MEASURING METHOD USING THE...

INSULATING-LAYER-CONTAINING CERAMIC MEMBER, METAL-MEMBER-CONTAINING...

PHOTOCATHODE HIGH-FREQUENCY ELECTRON-GUN CAVITY APPARATUS

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

PARTICLE BEAM DEVICE AND METHOD FOR ANALYZING AND/OR TREATING AN OB...

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE ACCELERATOR

In-Vacuum Beam Defining Aperture Cleaning for Particle Reduction

APPARATUS