with fixed aperture

Industry

CPC
H01J2237/0451

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0451with fixed aperture

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for unidirectional hole elongation using a...
- Patent number 11,640,909
- Issue date May 2, 2023
- Applied Materials, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and sample observation method using the same
- Patent number 11,551,907
- Issue date Jan 10, 2023
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Transmission electron microscope and adjustment method of objective...
- Patent number 11,495,431
- Issue date Nov 8, 2022
- Jeol Ltd.
- Hitoshi Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method of operating the same
- Patent number 11,467,488
- Issue date Oct 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Illumination apertures for extended sample lifetimes in helical tom...
- Patent number 11,430,633
- Issue date Aug 30, 2022
- FEI Company
- Ondrej L. Shanel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope and method of controlling same
- Patent number 11,133,151
- Issue date Sep 28, 2021
- Jeol Ltd.
- Hirofumi Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 10,957,512
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aperture system of electron beam apparatus, electron beam exposure...
- Patent number 10,497,534
- Issue date Dec 3, 2019
- Samsung Electronics Co., Ltd.
- Hyun Ho Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compressive transmission microscopy
- Patent number 10,224,175
- Issue date Mar 5, 2019
- Battelle Memorial Institute
- Andrew J. Stevens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam masks for compressive sensors
- Patent number 10,109,453
- Issue date Oct 23, 2018
- Battelle Memorial Institute
- Andrew J. Stevens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heat-spreading blanking system for high throughput electron beam ap...
- Patent number 9,881,764
- Issue date Jan 30, 2018
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle microscope with astigmatism compensation and energ...
- Patent number 9,741,525
- Issue date Aug 22, 2017
- FEI Company
- Bohuslav Sed'a
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,673,018
- Issue date Jun 6, 2017
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, aperture unit, and charged...
- Patent number 9,449,792
- Issue date Sep 20, 2016
- NuFlare Technology, Inc.
- Tetsuro Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,208,995
- Issue date Dec 8, 2015
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning transmission electron microscope and axial adjustment meth...
- Patent number 8,710,438
- Issue date Apr 29, 2014
- Hitachi High-Technologies Corporation
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 8,389,953
- Issue date Mar 5, 2013
- SII NanoTechnology Inc.
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for multi-pass correction of substrate defects
- Patent number 8,293,126
- Issue date Oct 23, 2012
- TEL Epion Inc.
- Ruairidh MacCrimmon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope
- Patent number 7,923,686
- Issue date Apr 12, 2011
- Jeol Ltd.
- Kurio Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanting apparatus for forming ion beam shape
- Patent number 7,791,040
- Issue date Sep 7, 2010
- NEC Electronics Corporation
- Minoru Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source
- Patent number 7,767,977
- Issue date Aug 3, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for blanking a charged particle beam
- Patent number 7,728,308
- Issue date Jun 1, 2010
- Nanobeam Limited
- Tao Zhang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged-particle exposure apparatus
- Patent number 7,598,499
- Issue date Oct 6, 2009
- IMS Nanofabrications AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure system having the capability of checking the...
- Patent number 5,180,919
- Issue date Jan 19, 1993
- Fujitsu Limited
- Yoshihisa Oae
- B82 - NANO-TECHNOLOGY
Information Patent Grant
3847689
- Patent number 3,847,689
- Issue date Nov 12, 1974
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD
- Publication number 20240387151
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- BENJAMIN ALEXANDROVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...
- Publication number 20240258065
- Publication date Aug 1, 2024
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
- Publication number 20240234083
- Publication date Jul 11, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
- Publication number 20240136148
- Publication date Apr 25, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL
- Publication number 20230005699
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20220382145
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen LO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT
- Publication number 20220367142
- Publication date Nov 17, 2022
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE LANDING ENERGY SCANNING ELECTRON MICROSCOPY SYSTEMS AND ME...
- Publication number 20220254599
- Publication date Aug 11, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ILLUMINATION APERTURES FOR EXTENDED SAMPLE LIFETIMES IN HELICAL TOM...
- Publication number 20220208511
- Publication date Jun 30, 2022
- FEI Company
- Ondrej L. Shanel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Electron Microscope and Adjustment Method of Objective...
- Publication number 20220020560
- Publication date Jan 20, 2022
- JEOL Ltd.
- Hitoshi Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM
- Publication number 20210398772
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING THE SAME
- Publication number 20210233741
- Publication date Jul 29, 2021
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Application
Transmission Electron Microscope and Method of Controlling Same
- Publication number 20210151286
- Publication date May 20, 2021
- JEOL Ltd.
- Hirofumi Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK
- Publication number 20210090843
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20200393752
- Publication date Dec 17, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen LO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...
- Publication number 20200194271
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE SYSTEM OF ELECTRON BEAM APPARATUS, ELECTRON BEAM EXPOSURE...
- Publication number 20190180972
- Publication date Jun 13, 2019
- Samsung Electronics Co., Ltd.
- Hyun Ho LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSIVE SCANNING SPECTROSCOPY
- Publication number 20170316916
- Publication date Nov 2, 2017
- Battelle Memorial Institute
- Andrew J. Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE MICROSCOPE WITH ASTIGMATISM COMPENSATION AND ENERG...
- Publication number 20170221673
- Publication date Aug 3, 2017
- FEI Company
- Bohuslav Sed'a
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT-SPREADING BLANKING SYSTEM FOR HIGH THROUGHPUT ELECTRON BEAM AP...
- Publication number 20170200581
- Publication date Jul 13, 2017
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20160336141
- Publication date Nov 17, 2016
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSIVE TRANSMISSION MICROSCOPY
- Publication number 20160276129
- Publication date Sep 22, 2016
- Battelle Memorial Institute
- Andrew J. Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150014530
- Publication date Jan 15, 2015
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, APERTURE UNIT, AND CHARGED...
- Publication number 20140273536
- Publication date Sep 18, 2014
- NuFlare Technology, Inc.
- Tetsuro NISHIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METH...
- Publication number 20130112875
- Publication date May 9, 2013
- Hitachi High-Technologies Corporation
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused ion beam apparatus
- Publication number 20110204252
- Publication date Aug 25, 2011
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern forming method
- Publication number 20100266959
- Publication date Oct 21, 2010
- Sang-Hee Lee
- B82 - NANO-TECHNOLOGY
Information Patent Application
Transmission Electron Microscope
- Publication number 20090159797
- Publication date Jun 25, 2009
- JEOL Ltd.
- Kurio Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MULTI-PASS CORRECTION OF SUBSTRATE DEFECTS
- Publication number 20090084759
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Ruairidh MacCRIMMON
- H01 - BASIC ELECTRIC ELEMENTS

with fixed aperture

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system of image-forming multi-electron beams

Techniques and apparatus for unidirectional hole elongation using a...

Electron microscope and sample observation method using the same

Transmission electron microscope and adjustment method of objective...

Semiconductor apparatus and method of operating the same

Illumination apertures for extended sample lifetimes in helical tom...

Transmission electron microscope and method of controlling same

Method and device for a carrier proximity mask

Aperture system of electron beam apparatus, electron beam exposure...

Compressive transmission microscopy

Electron beam masks for compressive sensors

Heat-spreading blanking system for high throughput electron beam ap...

Charged-particle microscope with astigmatism compensation and energ...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus, aperture unit, and charged...

Charged particle beam apparatus

Scanning transmission electron microscope and axial adjustment meth...

Focused ion beam apparatus

Method and system for multi-pass correction of substrate defects

Transmission electron microscope

Ion implanting apparatus for forming ion beam shape

Ion source

Apparatus for blanking a charged particle beam

Charged-particle exposure apparatus

Electron beam exposure system having the capability of checking the...

3847689

Patents Applicationslast 30 patents

INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...

BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...

BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL

SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME

PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT

MULTIPLE LANDING ENERGY SCANNING ELECTRON MICROSCOPY SYSTEMS AND ME...

ILLUMINATION APERTURES FOR EXTENDED SAMPLE LIFETIMES IN HELICAL TOM...

Transmission Electron Microscope and Adjustment Method of Objective...

TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM

ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING THE SAME

Transmission Electron Microscope and Method of Controlling Same

METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK

SEMICONDUCTOR APPARATUS AND METHOD OF OPERATING THE SAME

TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...

APERTURE SYSTEM OF ELECTRON BEAM APPARATUS, ELECTRON BEAM EXPOSURE...

COMPRESSIVE SCANNING SPECTROSCOPY

CHARGED-PARTICLE MICROSCOPE WITH ASTIGMATISM COMPENSATION AND ENERG...

HEAT-SPREADING BLANKING SYSTEM FOR HIGH THROUGHPUT ELECTRON BEAM AP...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

COMPRESSIVE TRANSMISSION MICROSCOPY

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM WRITING APPARATUS, APERTURE UNIT, AND CHARGED...

SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METH...

Focused ion beam apparatus

Pattern forming method

Transmission Electron Microscope

METHOD AND SYSTEM FOR MULTI-PASS CORRECTION OF SUBSTRATE DEFECTS