3847689

Information

• Patent Grant
• 3847689

• References
• Source

• Patent Number

  3,847,689

• Date Filed

  Not available

• Date Issued

  Tuesday, November 12, 1974
  50 years ago

• CPC

  • H01J37/04 - Arrangements of electrodes and associated parts for generating or controlling the discharge
  • H01J2237/0451 - with fixed aperture
  • H01J2237/0453 - multiple apertures

• US Classifications

  • 216 - Etching a substrate: processes
  • 850 - Scanning-probe techniques or apparatus