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Semiconductor Device with Air-Spacer
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Publication number 20230387247
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Co., LTD
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Wei-Yang Lee
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H01 - BASIC ELECTRIC ELEMENTS
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Partial Self-Aligned Contact for MOL
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Publication number 20220108923
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Publication date Apr 7, 2022
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International Business Machines Corporation
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Ruilong Xie
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device with Air-Spacer
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Publication number 20210273071
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Publication date Sep 2, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Wei-Yang Lee
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H01 - BASIC ELECTRIC ELEMENTS
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Partial Self-Aligned Contact for MOL
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Publication number 20210134671
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Publication date May 6, 2021
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International Business Machines Corporation
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Ruilong Xie
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device with Air-Spacer
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Publication number 20200127110
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Publication date Apr 23, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Wei-Yang Lee
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H01 - BASIC ELECTRIC ELEMENTS
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FinFET and Method of Forming Same
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Publication number 20180350926
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Publication date Dec 6, 2018
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Che-Cheng Chang
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device with Air-Spacer
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Publication number 20180166553
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Publication date Jun 14, 2018
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Wei-Yang Lee
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H01 - BASIC ELECTRIC ELEMENTS
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METHOD OF FINFET CONTACT FORMATION
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Publication number 20180144990
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Publication date May 24, 2018
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Semiconductor Manufacturing International (Beijing) Corporation
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QIUHUA HAN
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H01 - BASIC ELECTRIC ELEMENTS
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FinFET and Method of Forming Same
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Publication number 20180040703
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Publication date Feb 8, 2018
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Che-Cheng Chang
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H01 - BASIC ELECTRIC ELEMENTS
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Method of Forming a Contact
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Publication number 20170365691
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Publication date Dec 21, 2017
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Taiwan Semiconductor Manufacturing Co., LTD
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Yu-Lien Huang
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H01 - BASIC ELECTRIC ELEMENTS
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