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with phase change by in-plane movement of the patern
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Industry
CPC
G01B11/2527
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Parent Industries
G
PHYSICS
G01
Measuring instruments
G01B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B11/00
Measuring arrangements characterised by the use of optical means
Current Industry
G01B11/2527
with phase change by in-plane movement of the patern
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