with scanning beams

Industry

CPC
H01J37/28

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/28with scanning beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron microscope
- Patent number 12,224,153
- Issue date Feb 11, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam manipulation of advanced charge controller module in a charged...
- Patent number 12,217,927
- Issue date Feb 4, 2025
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene based substrates for imaging
- Patent number 12,217,931
- Issue date Feb 4, 2025
- University of Kansas
- Eduardo Rosa-Molinar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detachable column unit of scanning electron microscope, and method...
- Patent number 12,217,933
- Issue date Feb 4, 2025
- COXEM CO., LTD
- Jun Hee Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,668
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,665
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Akito Tanokuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder and charged particle beam apparatus
- Patent number 12,198,892
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Shigeru Haneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Sample holder system with freely settable inclination angles
- Patent number 12,196,941
- Issue date Jan 14, 2025
- Carl Zeiss Microscopy GmbH
- Heiko Stegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system and method of setting parameter of charged parti...
- Patent number 12,198,894
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Hiroshi Oinuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ML-enabled assured microelectronics manufacturing: a technique to m...
- Patent number 12,198,325
- Issue date Jan 14, 2025
- University of Southern California
- Ajey Poovannummoottil Jacob
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam system and method for determining observation...
- Patent number 12,191,111
- Issue date Jan 7, 2025
- HITACHI HIGH-TECH CORPORATION
- Fumiya Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for defect inspection using voltage contrast in a...
- Patent number 12,191,112
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology data correction using image quality metric
- Patent number 12,189,307
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Fuming Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 12,191,109
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and overlay misalignment measurement m...
- Patent number 12,183,541
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-modal operations for multi-beam inspection system
- Patent number 12,183,543
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Johannes Maria Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 12,183,537
- Issue date Dec 31, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of determining aberrations in images obtained b...
- Patent number 12,183,540
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Yifeng Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope and imaging method
- Patent number 12,183,542
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device and system for reducing off-axial aberration in elec...
- Patent number 12,176,179
- Issue date Dec 24, 2024
- FEI Company
- Maarten Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated operational control of micro-tooling devices
- Patent number 12,176,182
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method implemented by a data processing apparatus, and charged part...
- Patent number 12,175,648
- Issue date Dec 24, 2024
- FEI Company
- Remco Schoenmakers
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Probe tip X-Y location identification using a charged particle beam
- Patent number 12,169,208
- Issue date Dec 17, 2024
- Innovatum Instruments Inc.
- Richard E Stallcup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle microscope device and method for adjusting field-o...
- Patent number 12,170,183
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Mitsutoshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 12,165,837
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Maassen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...
- Publication number 20250054726
- Publication date Feb 13, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Processing Device
- Publication number 20250054724
- Publication date Feb 13, 2025
- Hitachi High-Tech Corporation
- Akito TANOKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20250046564
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
- Publication number 20250046562
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20250046565
- Publication date Feb 6, 2025
- Hitachi High-Tech Corporation
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICAL DEVICE AND METHOD
- Publication number 20250046570
- Publication date Feb 6, 2025
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE...
- Publication number 20250046568
- Publication date Feb 6, 2025
- FEI Company
- Libor Strakoš
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...
- Publication number 20250037967
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG AND SAMPLE PROCESSING METHOD
- Publication number 20250037964
- Publication date Jan 30, 2025
- KIOXIA Corporation
- Takafumi INAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20250037966
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLU...
- Publication number 20250029809
- Publication date Jan 23, 2025
- FEI Company
- Galen GLEDHILL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Camera Image Displaying Method
- Publication number 20250029812
- Publication date Jan 23, 2025
- JEOL Ltd.
- Akira Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND...
- Publication number 20250027990
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Datong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
- Publication number 20250029811
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Arthur Eduard OVERLACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ANALYSING A SAMPLE BY MEANS OF ELECTRICALL...
- Publication number 20250029807
- Publication date Jan 23, 2025
- INTEGRATED DYNAMICS ENGINEERING GMBH
- Steve Jackson DJEMPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE
- Publication number 20250022677
- Publication date Jan 16, 2025
- FEI Company
- Joseph M. Lebow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS
- Publication number 20250022681
- Publication date Jan 16, 2025
- INFINEON TECHNOLOGIES AG
- Maximilian Alexander MOSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM MICROSCOPE IMAGE PROCESSING SYSTEM AND CONTRO...
- Publication number 20250022679
- Publication date Jan 16, 2025
- HITACHI HIGH-TECH CORPORATION
- Takashi AMANO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER, PROGRAM, AND CHARGED PARTICLE BEAM PROCESSING SYSTEM
- Publication number 20250014859
- Publication date Jan 9, 2025
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Ayana MURAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Correction Method and Correction Device
- Publication number 20250014858
- Publication date Jan 9, 2025
- Hitachi High-Tech Corporation
- Tomoaki YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20250006454
- Publication date Jan 2, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
- Publication number 20250006455
- Publication date Jan 2, 2025
- CARL ZEISS MICROSCOPY GMBH
- Bjoern Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...
- Publication number 20250006459
- Publication date Jan 2, 2025
- Carl Zeiss MultiSEM GmbH
- Daniel Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...
- Publication number 20250005739
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Shengcheng JIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20250006456
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE...
- Publication number 20250006453
- Publication date Jan 2, 2025
- FEI Company
- Jan Stopka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIO...
- Publication number 20240429107
- Publication date Dec 26, 2024
- Shanghai Huali Integrated Circuit Corporation
- Guanbo Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY MEASUREMENT USING BALANCED CAPACITY TARGETS
- Publication number 20240427253
- Publication date Dec 26, 2024
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM POSITION DETECTION AND REPOSITIONING
- Publication number 20240429017
- Publication date Dec 26, 2024
- KLA Corporation
- Henning Stoschus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240420915
- Publication date Dec 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Mihiro TAKASAKI
- H01 - BASIC ELECTRIC ELEMENTS

with scanning beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron microscope

Beam manipulation of advanced charge controller module in a charged...

Graphene based substrates for imaging

Detachable column unit of scanning electron microscope, and method...

Multiple charged-particle beam apparatus with low crosstalk

Charged particle beam device

Charged particle beam device

Semiconductor charged particle detector for microscopy

Charged particle beam device

Sample holder and charged particle beam apparatus

Systems and methods for voltage contrast defect detection

Sample holder system with freely settable inclination angles

Measurement system and method of setting parameter of charged parti...

ML-enabled assured microelectronics manufacturing: a technique to m...

Charged particle beam system and method for determining observation...

System and method for defect inspection using voltage contrast in a...

Metrology data correction using image quality metric

Sample pre-charging methods and apparatuses for charged particle be...

Charged particle beam system and overlay misalignment measurement m...

Multi-modal operations for multi-beam inspection system

Systems and methods of hysteresis compensation

Systems and methods of determining aberrations in images obtained b...

Transmission electron microscope and imaging method

Method, device and system for reducing off-axial aberration in elec...

Pattern inspecting device

Automated operational control of micro-tooling devices

Method implemented by a data processing apparatus, and charged part...

Probe tip X-Y location identification using a charged particle beam

Charged particle microscope device and method for adjusting field-o...

System and method for scanning a sample using multi-beam inspection...

Patents Applicationslast 30 patents

METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...

Vacuum Processing Device

CHARGED PARTICLE BEAM APPARATUS

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

Charged Particle Beam Device

CHARGED PARTICLE OPTICAL DEVICE AND METHOD

SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE...

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...

JIG AND SAMPLE PROCESSING METHOD

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLU...

Charged Particle Beam Apparatus and Camera Image Displaying Method

CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND...

SENSOR SUBSTRATE, APPARATUS, AND METHOD

APPARATUS AND METHOD FOR ANALYSING A SAMPLE BY MEANS OF ELECTRICALL...

APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE

SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS

CHARGED PARTICLE BEAM MICROSCOPE IMAGE PROCESSING SYSTEM AND CONTRO...

COMPUTER, PROGRAM, AND CHARGED PARTICLE BEAM PROCESSING SYSTEM

Correction Method and Correction Device

CHARGED PARTICLE BEAM DEVICE

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...

SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

MAGNETIC LENSES, CHARGED PARTICLE MICROSCOPE SYSTEMS INCLUDING THE...

METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIO...

OVERLAY MEASUREMENT USING BALANCED CAPACITY TARGETS

ELECTRON BEAM POSITION DETECTION AND REPOSITIONING

CHARGED PARTICLE BEAM DEVICE