with scanning beams

Industry

CPC
H01J37/28

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/28with scanning beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam applicator, and electron beam emission method in elec...
- Patent number 12,362,128
- Issue date Jul 15, 2025
- Photo electron Soul Inc.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a specimen and charged particle beam device
- Patent number 12,362,131
- Issue date Jul 15, 2025
- Applied Materials Israel Ltd.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for automatic zone axis alignment
- Patent number 12,362,135
- Issue date Jul 15, 2025
- FEI Company
- John J. Flanagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and image adjustment method
- Patent number 12,362,134
- Issue date Jul 15, 2025
- Jeol Ltd.
- Tomohiro Mihira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam column
- Patent number 12,362,129
- Issue date Jul 15, 2025
- Carl Zeiss Microscopy GmbH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating scanning electron microscope (SEM) and method o...
- Patent number 12,362,138
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Jaehyung Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor inspection apparatus and semiconductor inspection met...
- Patent number 12,362,139
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Yujin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 12,354,831
- Issue date Jul 8, 2025
- NuFlare Technology, Inc.
- Masataka Shiratsuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple landing energy scanning electron microscopy systems and me...
- Patent number 12,354,833
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correcting device and electron microscope
- Patent number 12,354,827
- Issue date Jul 8, 2025
- Jeol Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay measurement system and overlay measurement device for overl...
- Patent number 12,354,829
- Issue date Jul 8, 2025
- HITACHI HIGH-TECH CORPORATION
- Masaki Sugie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 12,354,826
- Issue date Jul 8, 2025
- HITACHI HIGH-TECH CORPORATION
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor analysis system
- Patent number 12,347,707
- Issue date Jul 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Yudai Kubo
- G05 - CONTROLLING REGULATING
Information Patent Grant
Scanning electron microscope
- Patent number 12,347,642
- Issue date Jul 1, 2025
- TASMIT, INC.
- Naoya Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam pattern forming device and charged particle b...
- Patent number 12,347,641
- Issue date Jul 1, 2025
- Kabushiki Kaisha Toshiba
- Hiroko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus
- Patent number 12,347,640
- Issue date Jul 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Yu Yamazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus and methods of operating t...
- Patent number 12,347,643
- Issue date Jul 1, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscope stage fixture for horizontal rotation
- Patent number 12,340,971
- Issue date Jun 24, 2025
- Gabriel Demeneghi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus match detection method, detection system, prewarning meth...
- Patent number 12,341,070
- Issue date Jun 24, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Weigang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron microscope
- Patent number 12,340,969
- Issue date Jun 24, 2025
- KLA Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor detector and method of fabricating same
- Patent number 12,342,635
- Issue date Jun 24, 2025
- ASML Netherlands B.V.
- Gianpaolo Lorito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, and method for controlling charged pa...
- Patent number 12,340,970
- Issue date Jun 24, 2025
- HITACHI HIGH-TECH CORPORATION
- Shingo Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system including a multi-beam deflection device and a...
- Patent number 12,340,973
- Issue date Jun 24, 2025
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,334,299
- Issue date Jun 17, 2025
- HITACHI HIGH-TECH CORPORATION
- U Oh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device and aberration correction method
- Patent number 12,327,708
- Issue date Jun 10, 2025
- HITACHI HIGH-TECH CORPORATION
- Shingo Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-voltage electron beam control of conductive state at a complex-...
- Patent number 12,322,522
- Issue date Jun 3, 2025
- University of Pittsburgh of the Commonwealth System of Higher Education
- Jeremy Levy
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Auto-focus sensor implementation for multi-column microscopes
- Patent number 12,322,568
- Issue date Jun 3, 2025
- KLA Corporation
- Nicholas Petrone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder, intermembrane distance adjustment mechanism, and cha...
- Patent number 12,315,695
- Issue date May 27, 2025
- HITACHI HIGH-TECH CORPORATION
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for observing permeation and diffusion path of observation t...
- Patent number 12,315,696
- Issue date May 27, 2025
- National Institute for Materials Science
- Akiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam system
- Patent number 12,315,694
- Issue date May 27, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20250239430
- Publication date Jul 24, 2025
- HITACHI HIGH-TECH CORPORATION
- Takafumi MIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS
- Publication number 20250239431
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jian-Ming Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED SCANNING ELECTRON MICROSCOPE AND METHOD OF USING THE SAME
- Publication number 20250231130
- Publication date Jul 17, 2025
- FEI Company
- Jan Trojek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20250232945
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD
- Publication number 20250232946
- Publication date Jul 17, 2025
- Hitachi High-Tech Corporation
- Minami UCHIHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES
- Publication number 20250231129
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20250232947
- Publication date Jul 17, 2025
- Hitachi High-Tech Corporation
- Naoto ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
- Publication number 20250226173
- Publication date Jul 10, 2025
- DELONG INSTRUMENTS A.S.
- Tomas Bejdak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...
- Publication number 20250226174
- Publication date Jul 10, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PART...
- Publication number 20250226175
- Publication date Jul 10, 2025
- ASML NETHERLANDS B.V.
- Zhong-wei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE
- Publication number 20250218719
- Publication date Jul 3, 2025
- Carl Zeiss MultiSEM GmbH
- Michael Kelp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE
- Publication number 20250218721
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20250208074
- Publication date Jun 26, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
- Publication number 20250210301
- Publication date Jun 26, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...
- Publication number 20250210302
- Publication date Jun 26, 2025
- Carl Zeiss MultiSEM GmbH
- Gregor Frank Dellemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PART...
- Publication number 20250201512
- Publication date Jun 19, 2025
- FEI Company
- Pavel Potocek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Gas Phase Sample Preparation for Cryo-Electron Microscopy
- Publication number 20250198891
- Publication date Jun 19, 2025
- Wisconsin Alumni Research Foundation
- Joshua COON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE
- Publication number 20250191875
- Publication date Jun 12, 2025
- ASML NETHERLANDS B.V.
- Dongchi YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME,...
- Publication number 20250191873
- Publication date Jun 12, 2025
- FEI Company
- Radovan Vašina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION FLOW DETERMINATION DEVICE, CHARGED PARTICLE BEAM DEVICE,...
- Publication number 20250189462
- Publication date Jun 12, 2025
- HITACHI HIGH-TECH CORPORATION
- Norifumi KAMESHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE
- Publication number 20250183000
- Publication date Jun 5, 2025
- Carl Zeiss SMT GMBH
- David Laemmle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM
- Publication number 20250180600
- Publication date Jun 5, 2025
- Innovatum Instruments Inc.
- Richard E Stallcup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20250182999
- Publication date Jun 5, 2025
- ASML NETHERLANDS B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS
- Publication number 20250183002
- Publication date Jun 5, 2025
- FEI Company
- Gert-Jan de Vos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION
- Publication number 20250174428
- Publication date May 29, 2025
- FEI Company
- Tomáš Onderlicka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING...
- Publication number 20250174426
- Publication date May 29, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECT...
- Publication number 20250174425
- Publication date May 29, 2025
- NuFlare Technology, Inc.
- Takahiro MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM,...
- Publication number 20250166958
- Publication date May 22, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED...
- Publication number 20250166962
- Publication date May 22, 2025
- Carl Zeiss SMT GMBH
- Dmitry KLOCHKOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC GRID FINGER DETECTION
- Publication number 20250166964
- Publication date May 22, 2025
- FEI Company
- Tomas Onderlicka
- H01 - BASIC ELECTRIC ELEMENTS

with scanning beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron beam applicator, and electron beam emission method in elec...

Method for inspecting a specimen and charged particle beam device

Method and system for automatic zone axis alignment

Charged particle beam apparatus and image adjustment method

Particle beam column

Method of operating scanning electron microscope (SEM) and method o...

Semiconductor inspection apparatus and semiconductor inspection met...

Pattern inspection apparatus and pattern inspection method

Multiple landing energy scanning electron microscopy systems and me...

Aberration correcting device and electron microscope

Overlay measurement system and overlay measurement device for overl...

Charged particle beam apparatus

Semiconductor analysis system

Scanning electron microscope

Charged particle beam pattern forming device and charged particle b...

Electron beam apparatus

Multiple charged-particle beam apparatus and methods of operating t...

Microscope stage fixture for horizontal rotation

Apparatus match detection method, detection system, prewarning meth...

Electron gun and electron microscope

Semiconductor detector and method of fabricating same

Charged particle beam device, and method for controlling charged pa...

Particle beam system including a multi-beam deflection device and a...

Charged particle beam device

Charged particle beam device and aberration correction method

Low-voltage electron beam control of conductive state at a complex-...

Auto-focus sensor implementation for multi-column microscopes

Sample holder, intermembrane distance adjustment mechanism, and cha...

Device for observing permeation and diffusion path of observation t...

Electron beam system

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS

IMPROVED SCANNING ELECTRON MICROSCOPE AND METHOD OF USING THE SAME

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD

E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES

Charged Particle Beam System

A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE

SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...

DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PART...

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE

SCANNING ELECTRON MICROSCOPE DEVICE

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...

METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...

LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PART...

Gas Phase Sample Preparation for Cryo-Electron Microscopy

VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE

OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME,...

INSPECTION FLOW DETERMINATION DEVICE, CHARGED PARTICLE BEAM DEVICE,...

METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE

PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS

SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION

OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING...

ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECT...

DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM,...

METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED...

AUTOMATIC GRID FINGER DETECTION