with scanning beams

Industry

CPC
H01J37/28

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/28with scanning beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope and image generation method using scan...
- Patent number 12,255,043
- Issue date Mar 18, 2025
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fiducial guided cross-sectioning and lamella preparation with tomog...
- Patent number 12,255,044
- Issue date Mar 18, 2025
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 12,255,045
- Issue date Mar 18, 2025
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Numerically compensating SEM-induced charging using diffusion-based...
- Patent number 12,255,042
- Issue date Mar 18, 2025
- ASML Netherlands B.V.
- Thomas Jarik Huisman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope and method of correcting aberration
- Patent number 12,255,041
- Issue date Mar 18, 2025
- Jeol Ltd.
- Keito Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle beam system and method for operating same
- Patent number 12,255,040
- Issue date Mar 18, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage anti-fretting mechanism for roller bearing lifetime improvement
- Patent number 12,249,481
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Mark Henricus Wilhelmus Van Gerven
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy feedback for improved milling accuracy
- Patent number 12,249,482
- Issue date Mar 11, 2025
- FEI Company
- Thomas Gary Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system for azimuthal deflection of individual particl...
- Patent number 12,249,478
- Issue date Mar 11, 2025
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lens designs
- Patent number 12,243,714
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Laura Del Tin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus, and program for determining condition related to...
- Patent number 12,243,711
- Issue date Mar 4, 2025
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,237,143
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining a depth of a hidden structural element background
- Patent number 12,237,146
- Issue date Feb 25, 2025
- Applied Materials Israel Ltd.
- Lior Akerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for event modulated electron microscopy
- Patent number 12,237,147
- Issue date Feb 25, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Bryan Walter Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of local control of a charged particle beam
- Patent number 12,230,469
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- Albertus Victor Gerardus Mangnus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controlled surface with a cryo-nanomanipulator for impr...
- Patent number 12,230,473
- Issue date Feb 18, 2025
- Applied Materials Israel Ltd.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron microscope
- Patent number 12,224,153
- Issue date Feb 11, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam manipulation of advanced charge controller module in a charged...
- Patent number 12,217,927
- Issue date Feb 4, 2025
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene based substrates for imaging
- Patent number 12,217,931
- Issue date Feb 4, 2025
- University of Kansas
- Eduardo Rosa-Molinar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detachable column unit of scanning electron microscope, and method...
- Patent number 12,217,933
- Issue date Feb 4, 2025
- COXEM CO., LTD
- Jun Hee Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,668
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,665
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Akito Tanokuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder and charged particle beam apparatus
- Patent number 12,198,892
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Shigeru Haneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system and method of setting parameter of charged parti...
- Patent number 12,198,894
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Hiroshi Oinuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder system with freely settable inclination angles
- Patent number 12,196,941
- Issue date Jan 14, 2025
- Carl Zeiss Microscopy GmbH
- Heiko Stegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ML-enabled assured microelectronics manufacturing: a technique to m...
- Patent number 12,198,325
- Issue date Jan 14, 2025
- University of Southern California
- Ajey Poovannummoottil Jacob
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20250095953
- Publication date Mar 20, 2025
- FEI Company
- Adam STOKES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM INSPECTION SYSTEM AND CHARGED PARTICLE BEAM I...
- Publication number 20250095956
- Publication date Mar 20, 2025
- Hitachi High-Tech Corporation
- Hang DU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
- Publication number 20250095133
- Publication date Mar 20, 2025
- ASML NETHERLANDS B.V.
- Vincent Sylvester KUIPER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
- Publication number 20250095955
- Publication date Mar 20, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Konstantin Chirko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20250087444
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...
- Publication number 20250087443
- Publication date Mar 13, 2025
- Saudi Arabian Oil Company
- Dong Kyu Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE-OPTICAL APPARATUS
- Publication number 20250087445
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Filter
- Publication number 20250087449
- Publication date Mar 13, 2025
- Oxford Instruments Nanotechnology Tools Limited
- Peter Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optics for In-Situ Scanning Electron Microscope Repair
- Publication number 20250087450
- Publication date Mar 13, 2025
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION
- Publication number 20250076038
- Publication date Mar 6, 2025
- FEI Company
- Stefano Vespucci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD F...
- Publication number 20250079111
- Publication date Mar 6, 2025
- Carl Zeiss MultiSEM GmbH
- Joerg Jacobi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detection of Probabilistic Process Windows
- Publication number 20250069843
- Publication date Feb 27, 2025
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...
- Publication number 20250069958
- Publication date Feb 27, 2025
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY
- Publication number 20250069844
- Publication date Feb 27, 2025
- FEI Company
- Petr Hlavenka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...
- Publication number 20250069845
- Publication date Feb 27, 2025
- FEI Company
- Neel Leslie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20250069848
- Publication date Feb 27, 2025
- KIOXIA Corporation
- Kazuya HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, and Beam Deflection Method in Charged...
- Publication number 20250062096
- Publication date Feb 20, 2025
- Hitachi High-Tech Corporation
- Naoto ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION
- Publication number 20250062098
- Publication date Feb 20, 2025
- KLA Corporation
- Xiaoxue Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...
- Publication number 20250054726
- Publication date Feb 13, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Processing Device
- Publication number 20250054724
- Publication date Feb 13, 2025
- Hitachi High-Tech Corporation
- Akito TANOKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20250046564
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
- Publication number 20250046562
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20250046565
- Publication date Feb 6, 2025
- Hitachi High-Tech Corporation
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICAL DEVICE AND METHOD
- Publication number 20250046570
- Publication date Feb 6, 2025
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE...
- Publication number 20250046568
- Publication date Feb 6, 2025
- FEI Company
- Libor Strakoš
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...
- Publication number 20250037967
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG AND SAMPLE PROCESSING METHOD
- Publication number 20250037964
- Publication date Jan 30, 2025
- KIOXIA Corporation
- Takafumi INAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20250037966
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLU...
- Publication number 20250029809
- Publication date Jan 23, 2025
- FEI Company
- Galen GLEDHILL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Camera Image Displaying Method
- Publication number 20250029812
- Publication date Jan 23, 2025
- JEOL Ltd.
- Akira Abe
- H01 - BASIC ELECTRIC ELEMENTS

with scanning beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Scanning electron microscope and image generation method using scan...

Fiducial guided cross-sectioning and lamella preparation with tomog...

Transmission charged particle microscope with an electron energy lo...

Numerically compensating SEM-induced charging using diffusion-based...

Electron microscope and method of correcting aberration

Multi-beam particle beam system and method for operating same

Stage anti-fretting mechanism for roller bearing lifetime improvement

Microscopy feedback for improved milling accuracy

Particle beam system for azimuthal deflection of individual particl...

Lens designs

Method, apparatus, and program for determining condition related to...

Apparatus of plural charged-particle beams

Determining a depth of a hidden structural element background

Methods and systems for event modulated electron microscopy

Apparatus for and method of local control of a charged particle beam

Temperature-controlled surface with a cryo-nanomanipulator for impr...

Electron microscope

Beam manipulation of advanced charge controller module in a charged...

Graphene based substrates for imaging

Detachable column unit of scanning electron microscope, and method...

Multiple charged-particle beam apparatus with low crosstalk

Charged particle beam device

Charged particle beam device

Semiconductor charged particle detector for microscopy

Charged particle beam device

Sample holder and charged particle beam apparatus

Systems and methods for voltage contrast defect detection

Measurement system and method of setting parameter of charged parti...

Sample holder system with freely settable inclination angles

ML-enabled assured microelectronics manufacturing: a technique to m...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

CHARGED PARTICLE BEAM INSPECTION SYSTEM AND CHARGED PARTICLE BEAM I...

METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE

METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

NANOFLUIDIC CELL FOR CHARACTERIZATION OF NANO-BUBBLES IN A SIMULATE...

CHARGED PARTICLE-OPTICAL APPARATUS

Electron Filter

Optics for In-Situ Scanning Electron Microscope Repair

FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED ALIGNMENT AND METHOD F...

Detection of Probabilistic Process Windows

DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...

SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY

TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

Charged Particle Beam Device, and Beam Deflection Method in Charged...

SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION

METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...

Vacuum Processing Device

CHARGED PARTICLE BEAM APPARATUS

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

Charged Particle Beam Device

CHARGED PARTICLE OPTICAL DEVICE AND METHOD

SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE...

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...

JIG AND SAMPLE PROCESSING METHOD

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

FIB AND SEM RESOLUTION ENHANCEMENT USING ASYMMETRIC PROBE DECONVOLU...

Charged Particle Beam Apparatus and Camera Image Displaying Method