with scanning beams

Industry

CPC
H01J37/28

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/28with scanning beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device and aberration correction method
- Patent number 12,327,708
- Issue date Jun 10, 2025
- HITACHI HIGH-TECH CORPORATION
- Shingo Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-voltage electron beam control of conductive state at a complex-...
- Patent number 12,322,522
- Issue date Jun 3, 2025
- University of Pittsburgh of the Commonwealth System of Higher Education
- Jeremy Levy
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Auto-focus sensor implementation for multi-column microscopes
- Patent number 12,322,568
- Issue date Jun 3, 2025
- KLA Corporation
- Nicholas Petrone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder, intermembrane distance adjustment mechanism, and cha...
- Patent number 12,315,695
- Issue date May 27, 2025
- HITACHI HIGH-TECH CORPORATION
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for observing permeation and diffusion path of observation t...
- Patent number 12,315,696
- Issue date May 27, 2025
- National Institute for Materials Science
- Akiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam system
- Patent number 12,315,694
- Issue date May 27, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting a sample by means of multiple c...
- Patent number 12,306,121
- Issue date May 20, 2025
- DELMIC IP B.V.
- Andries Pieter Johan Effting
- G01 - MEASURING TESTING
Information Patent Grant
Multi-electron beam inspection apparatus, multipole array control m...
- Patent number 12,308,202
- Issue date May 20, 2025
- NuFlare Technology, Inc.
- Yuichi Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical auto-focus unit and a method for auto-focus
- Patent number 12,308,204
- Issue date May 20, 2025
- Applied Materials Israel Ltd.
- Sissi Lachmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System comprising a multi-beam particle microscope and method for o...
- Patent number 12,300,462
- Issue date May 13, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for positioning objects in a particle beam microscope with t...
- Patent number 12,300,459
- Issue date May 13, 2025
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam device, method for operating the particle beam device...
- Patent number 12,300,461
- Issue date May 13, 2025
- Carl Zeiss Microscopy GmbH
- Björn Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, method of operating a charged particl...
- Patent number 12,293,895
- Issue date May 6, 2025
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Live-assisted image acquisition method and system with charged part...
- Patent number 12,288,667
- Issue date Apr 29, 2025
- FEI Company
- Pavel Potocek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample display method
- Patent number 12,288,665
- Issue date Apr 29, 2025
- TESCAN BRNO s.r.o
- Jiri Dluhos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Entropy based image processing for focused ion beam delayer-edge sl...
- Patent number 12,288,668
- Issue date Apr 29, 2025
- Applied Materials Israel Ltd.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,283,458
- Issue date Apr 22, 2025
- HITACHI HIGH-TECH CORPORATION
- Mai Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material processing method and material processing system for perfo...
- Patent number 12,280,445
- Issue date Apr 22, 2025
- Carl Zeiss Microscopy GmbH
- Stephan Hiller
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Creating multiple electron beams with a photocathode film
- Patent number 12,283,453
- Issue date Apr 22, 2025
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid scanning electron microscopy and acousto-optic based metrology
- Patent number 12,278,085
- Issue date Apr 15, 2025
- Applied Materials Israel Ltd.
- Guy Shwartz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 12,278,087
- Issue date Apr 15, 2025
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution imaging apparatus and method
- Patent number 12,278,098
- Issue date Apr 15, 2025
- STANDARD BIOTOOLS CANADA INC.
- Paul Corkum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern height metrology using an e-beam system
- Patent number 12,278,086
- Issue date Apr 15, 2025
- Imec VZW
- Gian Francesco Lorusso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and image generation method
- Patent number 12,278,084
- Issue date Apr 15, 2025
- Jeol Ltd.
- Motohiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
- Patent number 12,272,518
- Issue date Apr 8, 2025
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for area-wise inspecting a sample via a multi-beam particle...
- Patent number 12,272,519
- Issue date Apr 8, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle gun and charged particle beam device
- Patent number 12,266,500
- Issue date Apr 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Tomoyo Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and objective lens
- Patent number 12,261,014
- Issue date Mar 25, 2025
- Jeol Ltd.
- Motohiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D fiducial for precision 3D NAND channel tilt/shift analysis
- Patent number 12,260,583
- Issue date Mar 25, 2025
- FEI Company
- Mark Najarian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron detection device and scanning electron microscope
- Patent number 12,261,016
- Issue date Mar 25, 2025
- CIQTEK CO., LTD.
- Da Yin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE
- Publication number 20250191875
- Publication date Jun 12, 2025
- ASML NETHERLANDS B.V.
- Dongchi YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME,...
- Publication number 20250191873
- Publication date Jun 12, 2025
- FEI Company
- Radovan Vašina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION FLOW DETERMINATION DEVICE, CHARGED PARTICLE BEAM DEVICE,...
- Publication number 20250189462
- Publication date Jun 12, 2025
- HITACHI HIGH-TECH CORPORATION
- Norifumi KAMESHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE
- Publication number 20250183000
- Publication date Jun 5, 2025
- Carl Zeiss SMT GMBH
- David Laemmle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM
- Publication number 20250180600
- Publication date Jun 5, 2025
- Innovatum Instruments Inc.
- Richard E Stallcup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20250182999
- Publication date Jun 5, 2025
- ASML NETHERLANDS B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS
- Publication number 20250183002
- Publication date Jun 5, 2025
- FEI Company
- Gert-Jan de Vos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION
- Publication number 20250174428
- Publication date May 29, 2025
- FEI Company
- Tomáš Onderlicka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING...
- Publication number 20250174426
- Publication date May 29, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECT...
- Publication number 20250174425
- Publication date May 29, 2025
- NuFlare Technology, Inc.
- Takahiro MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DE...
- Publication number 20250167051
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Seonghyeon Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM,...
- Publication number 20250166958
- Publication date May 22, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED...
- Publication number 20250166962
- Publication date May 22, 2025
- Carl Zeiss SMT GMBH
- Dmitry KLOCHKOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC GRID FINGER DETECTION
- Publication number 20250166964
- Publication date May 22, 2025
- FEI Company
- Tomas Onderlicka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM MANIPULATION USING CHARGE REGULATOR IN A CHARGED PARTICLE SYSTEM
- Publication number 20250166955
- Publication date May 22, 2025
- ASML NETHERLANDS B.V.
- Ning YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20250166961
- Publication date May 22, 2025
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Imaging a Sample
- Publication number 20250166963
- Publication date May 22, 2025
- Milos Malínský
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE...
- Publication number 20250157785
- Publication date May 15, 2025
- HITACHI HIGH-TECH CORPORATION
- Hidenori MACHIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PR...
- Publication number 20250157782
- Publication date May 15, 2025
- CARL ZEISS MICROSCOPY GMBH
- Bjoern Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY IMAGING SYSTEM FOR RADIATION THERAPY
- Publication number 20250140515
- Publication date May 1, 2025
- Shanghai United Imaging Healthcare Co., Ltd.
- Buliang SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEA...
- Publication number 20250140511
- Publication date May 1, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Recipe Creating System, Length Measurement System, and Recipe Creat...
- Publication number 20250140516
- Publication date May 1, 2025
- Hitachi High-Tech Corporation
- Hiromi FUJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD...
- Publication number 20250132124
- Publication date Apr 24, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20250132123
- Publication date Apr 24, 2025
- Hitachi High-Tech Corporation
- Hiroyuki YAMAMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...
- Publication number 20250132117
- Publication date Apr 24, 2025
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED...
- Publication number 20250132121
- Publication date Apr 24, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stanislav Bardy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING...
- Publication number 20250125118
- Publication date Apr 17, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Birgit Schabinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LENS DESIGNS
- Publication number 20250125120
- Publication date Apr 17, 2025
- ASML NETHERLANDS B.V.
- Laura DEL TIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE
- Publication number 20250116587
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20250118528
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS

with scanning beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device and aberration correction method

Low-voltage electron beam control of conductive state at a complex-...

Auto-focus sensor implementation for multi-column microscopes

Sample holder, intermembrane distance adjustment mechanism, and cha...

Device for observing permeation and diffusion path of observation t...

Electron beam system

Method and apparatus for inspecting a sample by means of multiple c...

Multi-electron beam inspection apparatus, multipole array control m...

Optical auto-focus unit and a method for auto-focus

System comprising a multi-beam particle microscope and method for o...

Method for positioning objects in a particle beam microscope with t...

Particle beam device, method for operating the particle beam device...

Charged particle beam system, method of operating a charged particl...

Live-assisted image acquisition method and system with charged part...

Sample display method

Entropy based image processing for focused ion beam delayer-edge sl...

Charged particle beam device

Material processing method and material processing system for perfo...

Creating multiple electron beams with a photocathode film

Hybrid scanning electron microscopy and acousto-optic based metrology

Systems and methods for performing sample lift-out for highly react...

High resolution imaging apparatus and method

Pattern height metrology using an e-beam system

Electron microscope and image generation method

3D metrology from 3D datacube created from stack of registered imag...

Method for area-wise inspecting a sample via a multi-beam particle...

Charged particle gun and charged particle beam device

Scanning electron microscope and objective lens

3D fiducial for precision 3D NAND channel tilt/shift analysis

Electron detection device and scanning electron microscope

Patents Applicationslast 30 patents

VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE

OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME,...

INSPECTION FLOW DETERMINATION DEVICE, CHARGED PARTICLE BEAM DEVICE,...

METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE

PROBE TIP X-Y LOCATION IDENTIFICATION USING A CHARGED PARTICLE BEAM

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS

SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION

OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING...

ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECT...

ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DE...

DEFLECTOR FOR A CHARGED PARTICLE BEAM APPARATUS, DEFLECTING SYSTEM,...

METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED...

AUTOMATIC GRID FINGER DETECTION

BEAM MANIPULATION USING CHARGE REGULATOR IN A CHARGED PARTICLE SYSTEM

MICROSCOPY IMAGING METHOD AND SYSTEM

Method and System for Imaging a Sample

CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE...

METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PR...

X-RAY IMAGING SYSTEM FOR RADIATION THERAPY

METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEA...

Recipe Creating System, Length Measurement System, and Recipe Creat...

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD...

Charged Particle Beam Device

METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...

METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED...

DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING...

LENS DESIGNS

METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD