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H01J37/28
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/28
with scanning beams
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Patents Grants
last 30 patents
Information
Patent Grant
Electron gun and charged particle beam device equipped with electro...
Patent number
11,978,609
Issue date
May 7, 2024
HITACHI HIGH-TECH CORPORATION
Minoru Kaneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope having detachable column, and image ac...
Patent number
11,978,610
Issue date
May 7, 2024
COXEM CO., LTD
Jun Hee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
11,972,923
Issue date
Apr 30, 2024
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for calibrating a scanning charged particle microscope
Patent number
11,972,922
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Hermanus Adrianus Dillen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High resolution imaging apparatus and method
Patent number
11,967,496
Issue date
Apr 23, 2024
Standard BioTools Canada Inc.
Paul Corkum
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and operation method therefor
Patent number
11,961,701
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Tomoharu Nagashima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for examining a beam of charged particles
Patent number
11,961,705
Issue date
Apr 16, 2024
Carl Zeiss SMT GmbH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Height measuring device and beam irradiation device
Patent number
11,959,735
Issue date
Apr 16, 2024
Hitachi High-Technologies Corporation
Naoya Nakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for image enhancement for a multi-beam charged-...
Patent number
11,961,700
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Maikel Robert Goosen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam system
Patent number
11,961,704
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Naoki Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
Patent number
11,948,772
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
Patent number
11,942,303
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Machine learning on wafer defect review
Patent number
11,935,722
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Pin Chou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System comprising a multi-beam particle microscope and method for o...
Patent number
11,935,721
Issue date
Mar 19, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device
Patent number
11,929,231
Issue date
Mar 12, 2024
HITACHI HIGH-TECH CORPORATION
Akito Tanokuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lateral recess measurement in a semiconductor specimen
Patent number
11,921,063
Issue date
Mar 5, 2024
Applied Materials Israel Ltd.
Michael Chemama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam application apparatus
Patent number
11,915,903
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Momoyo Enyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems including pulsed dual-beam charge neutralization
Patent number
11,915,901
Issue date
Feb 27, 2024
ULVAC-PHI, INCORPORATED
Scott R. Bryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of thermal magnetic field noise in TEM corrector systems
Patent number
11,915,904
Issue date
Feb 27, 2024
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring a sample and microscope implementing the method
Patent number
11,915,908
Issue date
Feb 27, 2024
Carl Zeiss SMT GmbH
Eugen Foca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a particle beam microscope
Patent number
11,915,907
Issue date
Feb 27, 2024
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,658
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRA...
Publication number
20240151664
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Kwang-Eun KIM
G01 - MEASURING TESTING
Information
Patent Application
TILT-COLUMN MULTI-BEAM ELECTRON MICROSCOPY SYSTEM AND METHOD
Publication number
20240153737
Publication date
May 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER
Publication number
20240153738
Publication date
May 9, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240145208
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope, Multipole Element for Use Therein, and Control...
Publication number
20240145210
Publication date
May 2, 2024
JEOL Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Adjusting Charged Particle Optical System and Charged Par...
Publication number
20240145211
Publication date
May 2, 2024
JEOL Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS
Publication number
20240145214
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
Publication number
20240136146
Publication date
Apr 25, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
Publication number
20240136462
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Gianpaolo LORITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240136147
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20240128044
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LUMINESCENCE METHOD FOR THE IN-LINE DETECTION OF ATOMIC SCALE DEFEC...
Publication number
20240128129
Publication date
Apr 18, 2024
The University of Hong Kong
Chi Chung Francis Ling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE...
Publication number
20240128045
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE
Publication number
20240128049
Publication date
Apr 18, 2024
HITACHI HIGH-TECH CORPORATION
Katsura TAKAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ANALYSIS SYSTEM
Publication number
20240112881
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jonghyeok PARK
G01 - MEASURING TESTING
Information
Patent Application
ADAPTIVE SPECIMEN IMAGE ACQUISITION USING AN ARTIFICIAL NEURAL NETWORK
Publication number
20240094151
Publication date
Mar 21, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
Publication number
20240096587
Publication date
Mar 21, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240096591
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD IMPLEMENTED BY A DATA PROCESSING APPARATUS, AND CHARGED PART...
Publication number
20240095897
Publication date
Mar 21, 2024
FEI Company
Remco Schoenmakers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC MULTIPOLE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND MET...
Publication number
20240087837
Publication date
Mar 14, 2024
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Benjamin Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope and Map Display Method for Absorption...
Publication number
20240085357
Publication date
Mar 14, 2024
JEOL Ltd.
Hideyuki Takahashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20240087842
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE (SEM) MEASUREMENT METHOD AND APPARATUS
Publication number
20240079206
Publication date
Mar 7, 2024
Samsung Electronics Co., Ltd.
Kihyun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHODS OF 2D PIXELATED DETECTOR FOR AN APPARATUS WITH PL...
Publication number
20240079204
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Yongxin WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Holder, Intermembrane Distance Adjustment Mechanism, and Cha...
Publication number
20240079201
Publication date
Mar 7, 2024
Hitachi High-Tech Corporation
Michio HATANO
H01 - BASIC ELECTRIC ELEMENTS