with the production of a chemical active agent from a fluid

Industry

CPC
G03F7/2043

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/2043with the production of a chemical active agent from a fluid

Industries

Patents Grantslast 30 patents

Information Patent Grant
Inorganic-infiltrated polymer hybrid thin film resists for advanced...
- Patent number 12,140,865
- Issue date Nov 12, 2024
- Brookhaven Science Associates, LLC
- Chang-Yong Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanoimprint and etch fabrication of optical devices
- Patent number 12,092,956
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Jing Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Task completion in a tracking device environment
- Patent number 11,968,321
- Issue date Apr 23, 2024
- Tile, Inc.
- Felipe Knorr Kuhn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fabricating method of reducing photoresist footing
- Patent number 11,762,293
- Issue date Sep 19, 2023
- United Microelectronics Corp.
- Hao-Hsuan Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system to monitor a process apparatus
- Patent number 11,733,610
- Issue date Aug 22, 2023
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching curved substrate
- Patent number 11,724,962
- Issue date Aug 15, 2023
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Task completion in a tracking device environment
- Patent number 11,683,410
- Issue date Jun 20, 2023
- Tile, Inc.
- Felipe Knorr Kuhn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for metrology
- Patent number 11,525,668
- Issue date Dec 13, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ji-Feng Ying
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Salt compound, chemically amplified resist composition, and pattern...
- Patent number 11,435,666
- Issue date Sep 6, 2022
- Shin-Etsu Chemical Co., Ltd.
- Emiko Ono
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Chemical supply structure and a developing apparatus having the same
- Patent number 11,415,889
- Issue date Aug 16, 2022
- Samsung Electronics Co., Ltd.
- Jong-Keun Oh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for selective delamination and transfer of thin film using l...
- Patent number 11,397,382
- Issue date Jul 26, 2022
- Korea Advanced Institute of Science and Technology
- Taek-Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming material and pattern forming method
- Patent number 11,320,736
- Issue date May 3, 2022
- Kioxia Corporation
- Ryosuke Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Task completion in a tracking device environment
- Patent number 11,316,970
- Issue date Apr 26, 2022
- Tile, Inc.
- Felipe Knorr Kuhn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic recording write head with spin-torque oscillator (STO) and...
- Patent number 11,170,803
- Issue date Nov 9, 2021
- Western Digital Technologies, Inc.
- Xiaoyong Liu
- G11 - INFORMATION STORAGE
Information Patent Grant
Methods of forming variable-depth device structures
- Patent number 11,112,694
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Andre P. LaBonte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanoscale etching of light absorbing materials using light and an e...
- Patent number 11,073,764
- Issue date Jul 27, 2021
- Northeastern University
- Meni Wanunu
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,044,799
- Issue date Jun 22, 2021
- Gigaphoton Inc.
- Tsutomu Kashiwazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining width-to-length ratio of chann...
- Patent number 11,011,437
- Issue date May 18, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Yingbin Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aqueous solution for resist pattern coating and pattern forming met...
- Patent number 11,009,795
- Issue date May 18, 2021
- NISSAN CHEMICAL CORPORATION
- Tokio Nishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for metrology
- Patent number 10,883,820
- Issue date Jan 5, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Baohua Niu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover glass of display panel and a manufacturing method thereof
- Patent number 10,773,993
- Issue date Sep 15, 2020
- Wuhan China Star Optoelectronics Technology Co., Ltd.
- Yong Yang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method and system to monitor a process apparatus
- Patent number 10,571,806
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, a method of manufacturing a device and a con...
- Patent number 10,534,270
- Issue date Jan 14, 2020
- ASML Netherlands B.V.
- Norbertus Josephus Martinus Van Den Nieuwelaar
- G02 - OPTICS
Information Patent Grant
Lithography apparatus and method of manufacturing a device
- Patent number 10,261,422
- Issue date Apr 16, 2019
- ASML Netherlands B.V.
- Norbertus Josephus Martinus Van Den Nieuwelaar
- G02 - OPTICS
Information Patent Grant
Display substrate
- Patent number 10,209,557
- Issue date Feb 19, 2019
- BOE Technology Group Co., Ltd.
- Jing Niu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist pattern forming method, semiconductor apparatus using said m...
- Patent number 10,048,593
- Issue date Aug 14, 2018
- TOSHIBA MEMORY CORPORATION
- Shinichi Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of patterning a thin film
- Patent number 9,625,820
- Issue date Apr 18, 2017
- National Tsing Hua University
- Arnold Chang-Mou Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for selective, oxidative patterning of a surface
- Patent number 8,119,335
- Issue date Feb 21, 2012
- Jane P. Bearinger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern formation method
- Patent number 8,080,364
- Issue date Dec 20, 2011
- Panasonic Corporation
- Masayuki Endo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO REDUCE DEFECTS POST-SEQUENTIAL INFILTRATION SYNTHESIS
- Publication number 20240419081
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Lin ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240310739
- Publication date Sep 19, 2024
- Seoul National University R&DB Foundation
- Kyoungwhan OH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEPOSITION DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING...
- Publication number 20240057463
- Publication date Feb 15, 2024
- SAMSUNG DISPLAY CO., LTD.
- Young Min MOON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK PROCESSING APPARATUS AND METHOD OF PROCESSING PHOTOMASK
- Publication number 20240053685
- Publication date Feb 15, 2024
- SEMES CO., LTD.
- Youngdae Chung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS
- Publication number 20240004299
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Device Manufacturing Method and Manufacturing Apparatus Usi...
- Publication number 20230341768
- Publication date Oct 26, 2023
- NTT ELECTRONICS CORPORATION
- Yoshinori Hibino
- G02 - OPTICS
Information Patent Application
METHOD FOR FORMING CONTINUOUS LINE-END TO LINE-END SPACES WITH SPAC...
- Publication number 20230314952
- Publication date Oct 5, 2023
- International Business Machines Corporation
- Allen GABOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND
- Publication number 20230280655
- Publication date Sep 7, 2023
- Shin-Etsu Chemical Co., Ltd.
- Daisuke KORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TASK COMPLETION IN A TRACKING DEVICE ENVIRONMENT
- Publication number 20230275987
- Publication date Aug 31, 2023
- Tile, Inc.
- Felipe Knorr Kuhn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR ETCHING CURVED SUBSTRATE
- Publication number 20230174416
- Publication date Jun 8, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING COMPOSITION
- Publication number 20230152699
- Publication date May 18, 2023
- NISSAN CHEMICAL CORPORATION
- Kodai KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230147919
- Publication date May 11, 2023
- SEMES CO., LTD.
- Gui Su PARK
- B08 - CLEANING
Information Patent Application
NANOSTRUCTURE-BASED SUBSTRATE FOR SURFACE-ENHANCED RAMAN SPECTROSCO...
- Publication number 20230092693
- Publication date Mar 23, 2023
- THE ASAN FOUNDATION
- Jun Ki KIM
- G01 - MEASURING TESTING
Information Patent Application
FABRICATING METHOD OF REDUCING PHOTORESIST FOOTING
- Publication number 20220365433
- Publication date Nov 17, 2022
- UNITED MICROELECTRONICS CORP.
- Hao-Hsuan Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOIMPRINT AND ETCH FABRICATION OF OPTICAL DEVICES
- Publication number 20220326611
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Jing JIANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING MATERIAL AND PATTERN FORMING METHOD
- Publication number 20220221792
- Publication date Jul 14, 2022
- KIOXIA Corporation
- Ryosuke YAMAMOTO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
TASK COMPLETION IN A TRACKING DEVICE ENVIRONMENT
- Publication number 20220217231
- Publication date Jul 7, 2022
- Tile, Inc.
- Felipe Knorr Kuhn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FLOW CELLS AND METHODS FOR MAKING THE SAME
- Publication number 20220100091
- Publication date Mar 31, 2022
- Illumina, Inc.
- Sahngki Hong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Nanoscale Etching of Light Absorbing Materials using Light and an E...
- Publication number 20210405533
- Publication date Dec 30, 2021
- Meni Wanunu
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
APPARATUS AND METHOD FOR METROLOGY
- Publication number 20210148695
- Publication date May 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ji-Feng YING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL METHOD AND APPARATUS FOR FABRICATION OF VERY LARGE SCALE INTE...
- Publication number 20210026234
- Publication date Jan 28, 2021
- Intel Corporation
- John MAGANA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TASK COMPLETION IN A TRACKING DEVICE ENVIRONMENT
- Publication number 20210018829
- Publication date Jan 21, 2021
- Tile, Inc.
- Felipe Knorr Kuhn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Selective Delamination and Transfer of Thin Film Using L...
- Publication number 20200387073
- Publication date Dec 10, 2020
- Korea Advanced Institute of Science and Technology
- Taek-Soo KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID EJECTION DEVICE WITH DAMPENING DEVICE
- Publication number 20200376843
- Publication date Dec 3, 2020
- Canon Production Printing Holding B.V.
- Hans REINTEN
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
METHODS OF FORMING VARIABLE-DEPTH DEVICE STRUCTURES
- Publication number 20200363719
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Andre P. LABONTE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inorganic-Infiltrated Polymer Hybrid Thin Film Resists for Advanced...
- Publication number 20200285148
- Publication date Sep 10, 2020
- Brookhaven Science Associates, LLC
- Chang-Yong Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE FOR TOUCH SCREEN PANEL, TOUCH SCREEN PANEL HAVING SAME AN...
- Publication number 20200264730
- Publication date Aug 20, 2020
- AMOGREENTECH CO., LTD.
- Sung-Baek DAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR REPAIRING A PHOTOLITHOGRAPHIC MASK
- Publication number 20200249564
- Publication date Aug 6, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Determining Width-to-Length Ratio of Chann...
- Publication number 20200161196
- Publication date May 21, 2020
- HEIFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yingbin HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL SUPPLY STRUCTURE AND A DEVELOPING APPARATUS HAVING THE SAME
- Publication number 20200150539
- Publication date May 14, 2020
- Samsung Electronics Co., Ltd.
- Jong-Keun OH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

with the production of a chemical active agent from a fluid

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Inorganic-infiltrated polymer hybrid thin film resists for advanced...

Nanoimprint and etch fabrication of optical devices

Task completion in a tracking device environment

Fabricating method of reducing photoresist footing

Method and system to monitor a process apparatus

Method for etching curved substrate

Task completion in a tracking device environment

Apparatus and method for metrology

Salt compound, chemically amplified resist composition, and pattern...

Chemical supply structure and a developing apparatus having the same

Method for selective delamination and transfer of thin film using l...

Pattern forming material and pattern forming method

Task completion in a tracking device environment

Apparatus and method for repairing a photolithographic mask

Magnetic recording write head with spin-torque oscillator (STO) and...

Methods of forming variable-depth device structures

Nanoscale etching of light absorbing materials using light and an e...

Extreme ultraviolet light generation apparatus and electronic devic...

Method and apparatus for determining width-to-length ratio of chann...

Aqueous solution for resist pattern coating and pattern forming met...

Apparatus and method for metrology

Cover glass of display panel and a manufacturing method thereof

Method and system to monitor a process apparatus

Lithography apparatus, a method of manufacturing a device and a con...

Lithography apparatus and method of manufacturing a device

Display substrate

Resist pattern forming method, semiconductor apparatus using said m...

Method of patterning a thin film

Methods and apparatus for selective, oxidative patterning of a surface

Pattern formation method

Patents Applicationslast 30 patents

METHOD TO REDUCE DEFECTS POST-SEQUENTIAL INFILTRATION SYNTHESIS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

DEPOSITION DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING...

PHOTOMASK PROCESSING APPARATUS AND METHOD OF PROCESSING PHOTOMASK

METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS

Optical Device Manufacturing Method and Manufacturing Apparatus Usi...

METHOD FOR FORMING CONTINUOUS LINE-END TO LINE-END SPACES WITH SPAC...

COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND

TASK COMPLETION IN A TRACKING DEVICE ENVIRONMENT

METHOD FOR ETCHING CURVED SUBSTRATE

FILM-FORMING COMPOSITION

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

NANOSTRUCTURE-BASED SUBSTRATE FOR SURFACE-ENHANCED RAMAN SPECTROSCO...

FABRICATING METHOD OF REDUCING PHOTORESIST FOOTING

NANOIMPRINT AND ETCH FABRICATION OF OPTICAL DEVICES

PATTERN FORMING MATERIAL AND PATTERN FORMING METHOD

TASK COMPLETION IN A TRACKING DEVICE ENVIRONMENT

FLOW CELLS AND METHODS FOR MAKING THE SAME

Nanoscale Etching of Light Absorbing Materials using Light and an E...

APPARATUS AND METHOD FOR METROLOGY

NOVEL METHOD AND APPARATUS FOR FABRICATION OF VERY LARGE SCALE INTE...

TASK COMPLETION IN A TRACKING DEVICE ENVIRONMENT

Method for Selective Delamination and Transfer of Thin Film Using L...

LIQUID EJECTION DEVICE WITH DAMPENING DEVICE

METHODS OF FORMING VARIABLE-DEPTH DEVICE STRUCTURES

Inorganic-Infiltrated Polymer Hybrid Thin Film Resists for Advanced...

SUBSTRATE FOR TOUCH SCREEN PANEL, TOUCH SCREEN PANEL HAVING SAME AN...

APPARATUS AND METHOD FOR REPAIRING A PHOTOLITHOGRAPHIC MASK

Method and Apparatus for Determining Width-to-Length Ratio of Chann...

CHEMICAL SUPPLY STRUCTURE AND A DEVELOPING APPARATUS HAVING THE SAME