XeF

Industry

CPC
H01S3/2255

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/2255XeF

Industries

Patents Grantslast 30 patents

Information Patent Grant
System for reclaiming, rebalancing and recirculating laser gas mixt...
- Patent number 10,103,507
- Issue date Oct 16, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 10,090,629
- Issue date Oct 2, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation device and method for patterning self assembled m...
- Patent number 10,061,197
- Issue date Aug 28, 2018
- Ushio Denki Kabushiki Kaisha
- Tatsushi Owada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,966,721
- Issue date May 8, 2018
- Gigaphoton Inc.
- Kouji Kakizaki
- G02 - OPTICS
Information Patent Grant
System for reclaiming, rebalancing and recirculating laser gas mixt...
- Patent number 9,831,627
- Issue date Nov 28, 2017
- Maheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 9,819,136
- Issue date Nov 14, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser thin film poly-silicon annealing system
- Patent number 7,061,959
- Issue date Jun 13, 2006
- TCZ GmbH
- William N. Partlo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ultraviolet laser apparatus and gas for ultraviolet laser
- Patent number 6,496,527
- Issue date Dec 17, 2002
- Komatsu, Ltd.
- Katsutomo Terashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 5,060,231
- Issue date Oct 22, 1991
- The Secretary of State for Defence in Her Britannic Majesty's Government of t...
- Richard C. Hollins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Injection locking a xenon chloride laser at 308.4 nm
- Patent number 4,689,794
- Issue date Aug 25, 1987
- Northrop Corporation
- Stephen J. Brosnan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...
- Publication number 20180097331
- Publication date Apr 5, 2018
- Matheson Tri-Gas, Inc.
- Joseph Vininski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LLP EUV drive laser
- Publication number 20060146906
- Publication date Jul 6, 2006
- Cymer, Inc.
- Daniel J.W. Brown
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser thin film poly-silicon annealing system
- Publication number 20050141580
- Publication date Jun 30, 2005
- William N. Partlo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System for reclaiming, rebalancing and recirculating laser gas mixt...

Gas mixture control in a gas discharge light source

Light irradiation device and method for patterning self assembled m...

Laser system

System for reclaiming, rebalancing and recirculating laser gas mixt...

Gas mixture control in a gas discharge light source

Laser thin film poly-silicon annealing system

Ultraviolet laser apparatus and gas for ultraviolet laser

Laser system

Injection locking a xenon chloride laser at 308.4 nm

Patents Applicationslast 30 patents

SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXT...

LLP EUV drive laser

Laser thin film poly-silicon annealing system