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2787564
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Information
Patent Grant
2787564
References
Source
Patent Number
2,787,564
Date Filed
Not available
Date Issued
Tuesday, April 2, 1957
68 years ago
CPC
H01J37/3171 - for ion implantation
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S148/031 - Diffusion at an edge
US Classifications
257 - Active solid-state devices
148 - Metal treatment
438 - Semiconductor device manufacturing: process
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