2873222

Information

• Patent Grant
• 2873222

• References
• Source

• Patent Number

  2,873,222

• Date Filed

  Not available

• Date Issued

  Tuesday, February 10, 1959
  65 years ago

• CPC

  • C30B31/06 - by contacting with diffusion material in the gaseous state
  • C30B25/16 - Controlling or regulating
  • C30B31/00 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S252/951 - for vapor transport
  • Y10S438/909 - Controlled atmosphere
  • Y10S438/919 - Compensation doping
  • Y10S438/921 - Nonselective diffusion

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 252 - Compositions