3108915

Information

• Patent Grant
• 3108915

• References
• Source

• Patent Number

  3,108,915

• Date Filed

  Not available

• Date Issued

  Tuesday, October 29, 1963
  61 years ago

• CPC

  • G03F7/0042 - with inorganic or organometallic light-sensitive compounds not otherwise provided for
  • C23C16/047 - using irradiation by energy or particles
  • C30B31/185 - Pattern diffusion
  • G03F1/54 - Absorbers
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S438/944 - Shadow

• US Classifications

  • 438 - Semiconductor device manufacturing: process