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3192136
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Information
Patent Grant
3192136
References
Source
Patent Number
3,192,136
Date Filed
Not available
Date Issued
Tuesday, June 29, 1965
59 years ago
CPC
G03F1/20 - Masks or mask blanks for imaging by charged particle beam [CPB] radiation
C23F1/02 - Local etching
C25D1/10 - Moulds Masks Masterforms
C25D5/02 - Electroplating of selected surface areas
G03F7/0957 - with sensitive layers on both sides of the substrate
G03F7/12 - Production of screen printing forms or similar printing forms
US Classifications
156 - Adhesive bonding and miscellaneous chemical manufacture
205 - Electrolysis: processes, compositions used therein, and methods of preparing the compositions
216 - Etching a substrate: processes
430 - Radiation imagery chemistry: process, composition, or product thereof
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