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3294669
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Information
Patent Grant
3294669
References
Source
Patent Number
3,294,669
Date Filed
Not available
Date Issued
Tuesday, December 27, 1966
58 years ago
CPC
C23C14/564 - Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
C23C14/35 - by application of a magnetic field
H01J37/31 - for cutting or drilling
H01J37/34 - operating with cathodic sputtering
Y10S505/826 - Coating
US Classifications
204 - Chemistry: electrical and wave energy
422 - Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
505 - Superconductor technology: apparatus, material, process
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