3298879

Information

• Patent Grant
• 3298879

• References
• Source

• Patent Number

  3,298,879

• Date Filed

  Not available

• Date Issued

  Tuesday, January 17, 1967
  58 years ago

• CPC

  • H01L21/2258 - Diffusion into or out of AIIIBV compounds
  • C30B31/185 - Pattern diffusion
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S148/043 - Dual dielectric
  • Y10S148/051 - Etching
  • Y10S148/065 - Gp III-V generic compounds-processing
  • Y10S148/106 - Masks, special

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices