3371650

Information

• Patent Grant
• 3371650

• References
• Source

• Patent Number

  3,371,650

• Date Filed

  Not available

• Date Issued

  Tuesday, March 5, 1968
  57 years ago

• CPC

  • G01N1/28 - Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere
  • B01J3/006 - Processes utilising sub-atmospheric pressure; Apparatus therefor
  • B23Q1/5437 - and in which the degree of freedom, which belongs to the working surface, is perpendicular to this surface
  • B25J7/00 - Micromanipulators
  • C23C14/50 - Substrate holders
  • C23C14/505 - for rotation of the substrates
  • G21F7/063 - Remotely manipulated measuring or controlling devices
  • H01L21/68 - for positioning, orientation or alignment

• US Classifications

  • 118 - Coating apparatus
  • 464 - Rotary shafts, gudgeons, housings, and flexible couplings for rotary shafts