3400066

Information

• Patent Grant
• 3400066

• References
• Source

• Patent Number

  3,400,066

• Date Filed

  Not available

• Date Issued

  Tuesday, September 3, 1968
  56 years ago

• CPC

  • H01J37/36 - for cleaning surfaces while plating with ions of materials introduced into the discharge
  • C23C14/28 - by wave energy or particle radiation
  • C23C14/35 - by application of a magnetic field
  • H01C17/12 - by sputtering
  • H01J37/34 - operating with cathodic sputtering
  • H01L49/02 - Thin-film or thick-film devices

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 257 - Active solid-state devices
  • 313 - Electric lamp and discharge devices
  • 338 - Electrical resistors